NL2025198B1 - Gmm-based macro-micro linear actuator - Google Patents

Gmm-based macro-micro linear actuator Download PDF

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NL2025198B1
NL2025198B1 NL2025198A NL2025198A NL2025198B1 NL 2025198 B1 NL2025198 B1 NL 2025198B1 NL 2025198 A NL2025198 A NL 2025198A NL 2025198 A NL2025198 A NL 2025198A NL 2025198 B1 NL2025198 B1 NL 2025198B1
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motion
micro
macro
gmm
coil
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NL2025198A
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Dutch (nl)
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Xie Tian
Yu Caofeng
Huang Qiyang
Xiong Meijun
Wang Shun
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Univ Anhui Sci & Technology
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/06—Drive circuits; Control arrangements or methods
    • H02N2/065—Large signal circuits, e.g. final stages
    • H02N2/067—Large signal circuits, e.g. final stages generating drive pulses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F7/00—Magnets
    • H01F7/06—Electromagnets; Actuators including electromagnets
    • H01F7/08—Electromagnets; Actuators including electromagnets with armatures
    • H01F7/16—Rectilinearly-movable armatures
    • H01F7/1607—Armatures entering the winding
    • H01F7/1615—Armatures or stationary parts of magnetic circuit having permanent magnet
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/04—Constructional details
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N35/00—Magnetostrictive devices

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Linear Motors (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)

Abstract

The present invention relates to a GMM-based macro-micro linear actuator, including a housing, a permanent magnet, a magnet yoke 1, a fastening screw, a micro-motion coil, a GMM rod, an output lever, a mover bracket, a fixed base, a linear guide, a grating, a water-cooled tube, a micro-motion coil bobbin, a linear rolling bearing, a slide bar, a magnet yoke 2, a magnetic separation sleeve, a macro-motion coil, and a limiting groove. The macro-motion coil is energized, and Lorentz force is generated, the Lorentz force making the mover move axially in a stable magnetic field provided by the permanent magnet to obtain macro displacement. A magnitude of Lorentz force is proportional to a magnitude of current in a conductive material. A macro displacement is adjusted by controlling the current. The macro-motion system is in a stationary state after initial positioning. A micro-motion system performs compensation control according to a detected system error to achieve secondary positioning. The micro-motion coil is energized to generate a stable magnetic field around the GMM rod. The GMM rod extends axially under the action of the magnetic field to obtain micro displacement and compensate the positioning accuracy of the macro motion, thereby achieving accurate positioning of the entire motion.

Description

P100404NL00 1 GMM-BASED MACRO-MICRO LINEAR ACTUATOR
BACKGROUND Technical Field The present invention relates to the field of precision positioning, and in particular, toa GMM-based macro-micro linear actuator. Related Art An ultra-precision feed system with high accuracy and a large stroke plays an extremely important role in the modern cutting-edge industrial production and scientific research fields, which may greatly improve the working accuracy of ultra-precision machine tools, and is of great significance to improve the development of our national economy, shorten the gap between our country and developed countries in the field of ultra-precision machining and detection, and accelerate the modernization of the national defence industry. A giant magnetostrictive actuator (GMA) is a micro-displacement output apparatus that uses a giant magnetostrictive material (GMM) as a core driving element and converts electromagnetic energy into mechanical energy based on a positive effect of magnetostriction, which not only overcomes the shortcoming of a traditional displacement drive apparatus, but also has higher magnetic machine conversion efficiency than other functional materials. By virtue of high output power, wide operating frequency (0-100 KHz), a microsecond response speed, excellent characteristics such as high-precision control may be achieved. However, due to performance of the giant magnetostrictive material, a maximum driving stroke of the giant magnetostrictive actuator is small and generally less than 0.2 mm, which cannot meet the requirement of a large stroke. The permanent magnet drive technology is applied to GMA design to obtain a novel macro-micro actuator with a large stroke. Macro-motion and micro-motion are combined together, which can not only meet the performance of precise positioning but also meet the performance of the large stroke, thereby improving overall performance of the actuator.
SUMMARY The invention is intended to provide a GMM-based macro-micro linear actuator, so
P100404NL00 2 as to further improve a working stroke of a GMA, widen the application field thereof, and reduce the influence of temperature variation caused by an inherent hysteresis characteristic and an eddy current characteristics of the GMM on output precision of the GMA.
A basic idea of a macro-micro composite drive platform is to compensate a motion error of a macro-motion platform with a large stroke and low precision by using a micro-motion platform with a small stroke and high precision, so as to finally achieve macro-micro composite motion with a large stroke and high precision.
In order to achieve the objective of the present invention, the following technical solution is provided in the present invention. A GMM-based macro-micro linear actuator, specifically including: a housing (1), a permanent magnet (2), a magnet yoke 1 (3), a fastening screw (4), a micro-motion coil (5), and a GMM rod (6), an output lever (7), a mover bracket (8), a fixed base (9), a linear guide (10), a grating (11), a water-cooled tube (12), a micro-motion coil bobbin (13), a linear rolling bearing (14), a slide bar (15), a magnet yoke 2 (16), a magnetic separation sleeve (17), a macro-motion coil (18), and a limiting groove (19), the housing (1) being fixed to one side of the fixed base (9), the permanent magnet (2) being embedded inside the housing (1) to form a stator part, the magnet yoke 1 (3) being fixed to the mover bracket (8) through the fastening screw (4), the macro-motion coil (18) wrapping the water-cooled tube (12) and being placed in an interlayer between the magnet yoke 1 (3) and one end of the permanent magnet (2), the GMM rod (6), the micro-motion coil bobbin (13), the micro-motion coil (5), and the magnet yoke 2 (16) that are sequentially wrapped in an interior of the magnet yoke 1 (3) from inside to outside forming a micro-motion structure, the micro-motion structure being embedded and mounted to a central part and forming a mover part with the magnetic separation sleeve (17), the magnet yoke 1 (3), and the macro-motion coil (18), the output lever (7) and the slide bar (15) being located on both sides of a shaft center, the mover bracket (8) being mounted onto the fixed base (9) through the linear guide (10) and limiting a stroke through the limiting groove (19), and the grating (11) being mounted on a same side of the mover bracket (8) and the fixed base (9) to measure displacement. A
P100404NL00 3 controller sets a threshold value, the threshold value being 30 um. When displacement information is input, the controller starts macro-micro determining; when an input value is less than the threshold value, a micro-motion part is activated to move. A micro-motion grating ruler performs position feedback in real time to form closed-loop control motion. When the input value is greater than the threshold value, the controller controls a macro-motion part to move according to a predetermined control algorithm, the macro grating ruler feeds back position information in real time, the controller calculates a difference between the feedback value and the input value and compares the difference with the threshold value, and if a compensation range of a micro-motion system is reached, the micro-motion system is started to compensate until a target position is achieved.
Preferably, according to the GMM-based macro-micro linear actuator provided in the present invention, in a stable magnetic field provided by a neodymium iron boron (NdFeB) N38H tile-shaped permanent magnet (2), the macro-motion coil (18) is energized, and Lorentz force is generated, the Lorentz force pushing the mover part to move axially to obtain macro-motion displacement, a magnitude of the Lorentz force being proportional to a magnitude of a current in a conductive material, and macro displacement positioning being adjusted by controlling the current.
Preferably, according to the GMM-based macro-micro linear actuator provided in the present invention, after initial positioning of a macro-motion system comes to an end, the macro-motion system is in a stationary state, and the micro-motion system performs compensation control according to the detected system error to achieve secondary positioning; when the micro-motion coil (5) is energized, a stable strong magnetic field is generated around the GMM rod (6); under the action of the strong magnetic field, the GMM rod (6) extends in an axial direction to obtain micro displacement, which may compensate positioning accuracy of macro motion, thereby achieving accurate positioning of the entire motion; preferably, a water-cooled temperature control method is adopted for temperature control, the magnet yoke 1 (3) serves as a bobbin, and a layer of copper tube with a 5 mm diameter is wound on an outer side for water cooling to take away heat generated by the coil, which is mounted
P100404NL00 4 in an actuator and does not affect a magnetic circuit due to magnetic conduction; and the copper tube is wound in a manner of double spiral crossing, which may also improve the water convection heat transfer efficiency under the condition that the winding is tight.
Preferably, according to the GMM-based macro-micro linear actuator provided in the present invention, a double “L-shaped” bracket is used as support, the mover bracket (8) is connected to a mover structure of the actuator, and after energized, the coil moves linearly in an X direction; there is a stator bracket boss on one side of the fixed base (9), and the linear rolling bearing is mounted in a limiting hole of an upper slide bar to reduce frictional force of linear motion; two brackets are placed in a superimposed manner, and the linear guide (10) and the limiting groove (19) are mounted in the middle to further increase smoothness of movement.
In comparison to the prior art, the GMM-based macro-micro linear actuator provided in the present invention has the following beneficial effects.
The macro-motion system may achieve fast and efficient positioning through the grating (11), improve the stroke of the actuator, and the micro-motion system achieves precise feeding and error compensation, so that a motion error of macro motion with a large stroke and low precision is compensated by using micro motion with a small stroke and high precision, and finally, macro-micro composite motion with a large stroke and high precision may be achieved. Since a double “L-shaped” bracket is adopted as a support for the macro-micro linear actuator, the structure is more compact, the positioning is more accurate, and the performance is more stable.
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic structural assembly diagram of a GMM-based macro-micro linear actuator according to the present invention.
In the figure, 1-housing, 2-permanent magnet, 3-magnet yoke 1, 4-fastening screw, S-micro-motion coil, 6-GMM rod, 7-output lever, 8-mover bracket, 9-fixed base, 10-linear guide, 1l-grating, 12-water-cooled tube, 13-micro-motion coil bobbin, 14-linear rolling bearing, 15-slide bar, 16-magnet yoke 2, 17-magnet separation sleeve, 18-macro-motion coil, 19-limiting groove.
P100404NL00
DETAILED DESCRIPTION The following clearly and completely describes the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are 5 only some embodiments instead of all embodiments of the present invention. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.
In the description of the present invention, it should be understood that orientation or position relationships indicated by the terms such as "dispose", "inside", "end", and "In" are used only for ease and brevity of illustration and description, rather than indicating or implying that the mentioned component or element must have a particular orientation or must be constructed and operated in a particular orientation. Therefore, such terms should not be construed as limiting of the present invention. Referring to FIG. 1, a GMM-based macro-micro linear actuator is provided in the present embodiment, including: a housing (1), a permanent magnet (2), a magnet yoke 1 (3), a fastening screw (4), a micro-motion coil (5), and a GMM rod (6), an output lever (7), a mover bracket (8), a fixed base (9), a linear guide (10), a grating (11), a water-cooled tube (12), a micro-motion coil bobbin (13), a linear rolling bearing (14), a slide bar (15), a magnet yoke 2 (16), a magnetic separation sleeve (17), a macro-motion coil (18), and a limiting groove (19), the housing (1) being fixed to one side of the fixed base (9), the permanent magnet (2) being embedded inside the housing (1) to form a stator part, the magnet yoke 1 (3) being fixed to the mover bracket (8) through the fastening screw (4), the macro-motion coil (18) wrapping the water-cooled tube (12) and being placed in an interlayer between the magnet yoke 1 (3) and one end of the permanent magnet (2), the GMM rod (6), the micro-motion coil bobbin (13), the micro-motion coil (5), and the magnet yoke 2 (16) that are sequentially wrapped in an interior of the magnet yoke 1 (3) from inside to outside forming a micro-motion structure, the micro-motion structure being embedded and mounted to a central part and forming a mover part with the magnetic separation sleeve (17), the magnet yoke 1 (3),
P100404NL00 6 and the macro-motion coil (18), the output lever (7) and the slide bar (15) being located on both sides of a shaft center, the mover bracket (8) being mounted onto the fixed base (9) through the linear guide (10) and limiting a stroke through the limiting groove (19), and the grating (11) being mounted on a same side of the mover bracket (8) and the fixed base (9) to measure displacement. A controller sets a threshold value, and when displacement information is input, the controller starts macro-micro determining. When an input value is less than the threshold value, a micro-motion part is activated to move. A micro-motion grating ruler performs position feedback in real time to form closed-loop control motion. When the input value is greater than the threshold value, the controller controls a macro-motion part to move according to a predetermined control algorithm, the macro grating ruler feeds back position information in real time, and the controller calculates a difference between the feedback value and the input value and compares the difference with the threshold value. If a compensation range of a micro-motion system is reached, the micro-motion system is started to compensate until a target position is achieved.
As a preferred manner of the present invention, according to the GMM-based macro-micro linear actuator provided in the present invention, the macro-motion coil is energized, and Lorentz force is generated, the Lorentz force making the mover part to move axially in a stable magnetic field provided by a neodymium iron boron (NdFeB) N38H tile-shaped permanent magnet, to obtain macro-motion displacement. A magnitude of the Lorentz force is proportional to a magnitude of a current in a conductive material, and macro displacement positioning is adjusted by controlling the current.
As a preferred manner of the present invention, according to the GMM-based macro-micro linear actuator, after initial positioning of a macro-motion system comes to an end, the macro-motion system is in a stationary state, and the micro-motion system performs compensation control according to the detected system error to achieve secondary positioning. When the micro-motion coil is energized, a stable strong magnetic field is generated around the GMM rod. Under the action of the strong magnetic field, the GMM rod extends in an axial direction to obtain micro displacement,
P100404NL00 7 which may compensate positioning accuracy of macro motion, thereby achieving accurate positioning of the entire motion.
As a preferred manner of the present invention, according to the GMM-based macro-micro linear actuator, a water-cooled temperature control method is adopted for temperature control, the magnet yoke 1 serves as a bobbin, and a layer of copper tube with a 5S mm diameter is wound on an outer side for water cooling to take away heat generated by the coil, which is mounted in an actuator and does not affect a magnetic circuit due to magnetic conduction. The copper tube is wound in a manner of double spiral crossing, which may also improve the water convection heat transfer efficiency under the condition that the winding is tight.
As a preferred manner of the present invention, according to the GMM-based macro-micro linear actuator provided in the present invention, a double “L-shaped” bracket is used as support, the mover bracket is connected to a mover structure of the actuator, and after energized, the coil moves linearly in an X direction. There is a stator bracket boss on one side of the fixed base, and the linear rolling bearing is mounted in a limiting hole of an upper slide bar to reduce frictional force of linear motion. Two brackets are placed in a superimposed manner, and the linear guide and the limiting groove are mounted in the middle to further increase smoothness of movement.
A specific application process of the present embodiment is as follows.
In order to achieve axial displacement of 15.34432 mm, the steps are as follows.
(1) A water-cooled apparatus is turned on, and a set screw is released to allow the shaft to obtain axial freedom; (2) A target value of 15.34432 mm is entered on a control panel; (3) A program autonomously recognizes a difference value between the current displacement and the target value. In comparison to the threshold (30 um), the macro-motion coil is activated when the difference value is greater than the threshold, and a current of about 1.5A is passed (a specific value of the current is controlled by the program of the given algorithm). When the difference value is less than the threshold, the accuracy of the macro-motion coil cannot meet the accuracy required for the remaining displacement. The micro-motion coil is activated, and the program is
P100404NL00 8 controlled to passes an appropriate current (a magnitude thereof is given by the algorithm in the program) to the micro-motion coil.
The micro-motion structure compensates the remaining displacement until the displacement reaches 15.34423 mm.
It is apparent to a person skilled in the art that the present invention is not limited to details in the foregoing exemplary embodiments, and the present invention can be implemented in another specific form without departing from the spirit or basic features of the present invention.
Therefore, the embodiments should be considered to be exemplary in all respects and not limitative.
The scope of the present invention is not defined by the foregoing description but by the appended claims.
The present invention is intended to include all the variations that are equivalent in significance and scope to the claims.
No reference numerals in the claims should be considered as limitations to the related claims.
In addition, it should be understood that, although this specification is described according to each implementation, each implementation may not include only one independent technical solution.
The description manner of this specification is merely for clarity.
This specification should be considered as a whole by a person skilled in the art, and the technical solution in each embodiment may also be properly combined, to form other implementations that can be understood by the person skilled in the art.

Claims (5)

CONCLUSIESCONCLUSIONS 1. Op GMM gebaseerd macro-micro lineaire aandrijfinrichting, omvattende een behuizing (1), een permanente magneet (2), een juk 1 (3), een bevestigingsschroef (4), een microbewegingsspoel (5), een GMM-staaf (6), een uitvoerstang (7), een bewegerbeugel (8), een bevestigingsbasis (9), een lineaire geleider (10), een rooster (11), een watergekoelde pijp (12), een skelet van microbewegingsspoel (13), een lineair rollend lager (14), een schuifstang (15), een juk 2 (16), een magnetische isolatiehuls (17), een macrobewegingsspoel (18) en een begrenzingsgroef (19), waarbij de behuizing (1) aan een zijde van de bevestigingsbasis (9) is bevestigd, en de permanente magneet (2) in de behuizing (1) is ingebed om een statordeel te vormen, en het juk 1 (3) aan de bewegerbeugel (8) is bevestigd door de bevestigingsschroef (4), en de macrobewegingsspoel (18) rond de watergekoelde pijp (12) is gewikkeld en in de tussenlaag tussen het juk 1 (3) en een uiteinde van de permanente magneet (2) 1s geplaatst, en de GMM-staaf (6), het skelet van de microbewegingsspoel (13), de microbewegingsspoel (5) en het juk 2 (16) achtereenvolgens van binnen naar buiten binnen het juk 1 (3) is gewikkeld om een microbewegingsstructuur te vormen, en de microbewegingsstructuur is ingebed en geïnstalleerd in het centrale deel en vormt een bewegerdeel met de magnetische isolatiehuls (17), het juk 1 (3) en de macrobewegingsspoel (18), en de uitvoerstang (7) en de schuifstang (15) bevinden zich aan beide zijden van het midden van de as, en de bewegerbeugel (8) is op de bevestigingsbasis (9) gemonteerd door de lineaire geleider (10) en de slag wordt begrensd door de begrenzingsgroef (19), en de rooster (11) is geïnstalleerd aan dezelfde zijde van de bewegerbeugel (8) en de bevestigingsbasis (9) om verplaatsing te meten; Voer een drempelwaarde in (30 micron) via de controlleur, en nadat de verplaatsingsinformatie is ingevoerd, zal de controlleur de macro-micro-beoordeling starten, waarbij als de invoerwaarde kleiner is dan de drempelwaarde, wordt de beweging van het microbewegingsdeel gestart en zal de microbewegingsschaal in realtime positieterugkoppeling uitvoeren om een gesloten-lusbesturingsbeweging te vormen, en als de invoerwaarde groter is dan de drempelwaarde, zal de controlleur de beweging van het macrobewegingsdeel starten volgens een vooraf bepaald besturingsalgoritme en zal de macrobewegingsschaal in realtime positieterugkoppeling uitvoeren, en de controlleur trekt de terugkoppelingswaarde af van de invoerwaarde om een verschilwaarde te verkrijgen en vergelijkt de verschilwaarde met de drempelwaarde, en als het bereik wordt bereikt dat het microbewegingssysteem kan compenseren, zal het microbewegingssysteem worden gestart om te compenseren totdat de doelpositie is bereikt.GMM-based macro-micro linear drive device, comprising a housing (1), a permanent magnet (2), a yoke 1 (3), a fastening screw (4), a micro-motion coil (5), a GMM rod (6 ), an output rod (7), a mover bracket (8), a mounting base (9), a linear guide (10), a grid (11), a water-cooled pipe (12), a skeleton of micro-motion coil (13), a linear roller bearing (14), a sliding rod (15), a yoke 2 (16), a magnetic isolation sleeve (17), a macro motion coil (18) and a limiting groove (19), the housing (1) on one side of the mounting base (9) is attached, and the permanent magnet (2) is embedded in the housing (1) to form a stator part, and the yoke 1 (3) is attached to the mover bracket (8) by the attachment screw (4), and the macro motion coil (18) is wrapped around the water cooled pipe (12) and placed in the intermediate layer between the yoke 1 (3) and one end of the permanent magnet (2) 1s, e n the GMM rod (6), the skeleton of the micro-motion coil (13), the micro-motion coil (5) and the yoke 2 (16) are wound sequentially from the inside outward within the yoke 1 (3) to form a micro-motion structure, and the micro-motion structure is embedded and installed in the central part and forms a mover part with the magnetic isolation sleeve (17), the yoke 1 (3) and the macro-motion coil (18), and the output rod (7) and the sliding rod (15) are located on both sides of the center of the shaft, and the mover bracket (8) is mounted on the mounting base (9) by the linear guide (10) and the stroke is limited by the limiting groove (19), and the grid (11) is installed on the same side of the mover bracket (8) and the mounting base (9) to measure displacement; Enter a threshold value (30 microns) via the controller, and after the displacement information has been entered, the controller will start the macro-micro judgment, where if the input value is less than the threshold value, the motion of the micro-motion part will be started and the micro motion scale in real time will perform position feedback to form a closed loop control motion, and if the input value is greater than the threshold value, the controller will start the macro motion part movement according to a predetermined control algorithm, and the macro motion scale will perform position feedback in real time, and the controller will pull subtracts the feedback value from the input value to obtain a difference value and compares the difference value with the threshold value, and when the range that the micromotion system can compensate is reached, the micromotion system will be started to compensate until the target position is reached. 2. Op GMM gebaseerd macro-micro lineaire aandrijfinrichting volgens conclusie 1, met het kenmerk, dat in een stabiel magnetisch veld verschaft door de neodymium-ijzer- boor N38H tegel-vormige permanente magneet (2), nadat de macrobewegingsspoel (18) is bekrachtigd, zal de Lorentz-kracht die erdoor wordt gegenereerd, duwt het bewegerdeel om in de axiale richting te bewegen om de macroverplaatsing te verkrijgen, waarbij de grootte van Lorentz-kracht is evenredig met de stroom in het geleidende materiaal, en de macroverplaatsing positionering wordt aangepast door de stroom te regelen.GMM-based macro-micro linear drive device according to claim 1, characterized in that in a stable magnetic field provided by the neodymium-iron-boron N38H tile-shaped permanent magnet (2), after the macro-motion coil (18) is energized , the Lorentz force generated by it will push the mover part to move in the axial direction to obtain the macro displacement, where the magnitude of Lorentz force is proportional to the current in the conductive material, and the macro displacement positioning is adjusted by regulating the flow. 3. Op GMM gebaseerd macro-micro lineaire aandrijfinrichting volgens conclusie 1, met het kenmerk, dat nadat de initiële positionering van het macrobewegingssysteem is voltooid, het macrobewegingssysteem zich in een stationaire toestand bevindt, en het microbewegingssysteem een compensatiecontrole uitvoert volgens de gedetecteerde systeemfout om de secundaire positionering te realiseren, en wanneer de microbewegingsspoel (5) is bekrachtigd, wordt een stabiel sterk magnetisch veld gegenereerd rond de GMM-staat (6), en onder invloed van het sterke magnetische veld zal de GMM-staaf (6) zich uitstrekken in de axiale richting om een microverplaatsing te verkrijgen, die de positioneringsnauwkeurigheid van de macrobeweging kan compenseren, waardoor een nauwkeurige positionering van de gehele beweging wordt bereikt.GMM-based macro-micro linear drive device according to claim 1, characterized in that after the initial positioning of the macro-motion system is completed, the macro-motion system is in a steady state, and the micro-motion system performs a compensation check according to the detected system error to secondary positioning, and when the micro motion coil (5) is energized, a stable strong magnetic field will be generated around the GMM state (6), and under the influence of the strong magnetic field, the GMM rod (6) will extend into the axial direction to obtain a micro-displacement, which can compensate for the positioning accuracy of the macro motion, thereby achieving accurate positioning of the entire motion. 4. Op GMM gebaseerd macro-micro lineaire aandrijfinrichting volgens conclusie 1, met het kenmerk, dat de temperatuurregeling wordt uitgevoerd door een watergekoelde temperatuurregelmethode, waarbij het juk 1 (3) als skelet fungeert en een laag koperen pijp met een diameter van 5 mm aan de buitenkant is gewikkeld voor waterkoeling en neemt de warmte af die door de spoel wordt gegenereerd, en het heeft geen invloed op het magnetische circuit vanwege magnetische permeabiliteit wanneer het in de aandrijfinrichting wordt geïnstalleerd; De koperen pijp is gewikkeld volgens de dubbele spiraalvormige dwarswikkeling, die de convectie-warmteoverdrachtsefficiëntie van water zal verbeteren onder strak wikkelen.GMM-based macro-micro linear drive device according to claim 1, characterized in that the temperature control is carried out by a water-cooled temperature control method, wherein the yoke 1 (3) acts as a skeleton and a layer of copper pipe with a diameter of 5 mm on it. the outside is wrapped for water cooling, and the heat generated by the coil takes off, and it does not affect the magnetic circuit due to magnetic permeability when installed in the driving device; The copper pipe is wound according to the double spiral cross winding, which will improve the convection heat transfer efficiency of water under tight wrapping. 5. Op GMM gebaseerd macro-micro lineaire aandrijfinrichting volgens conclusie 1, met het kenmerk, dat een dubbele "L"-vormige beugel wordt gebruikt als een ondersteuning, en de bewegerbeugel (8) 1s verbonden met de bewegerstructuur van de aandrijfinrichting, en nadat de spoel is bekrachtigd, zal het lineair in de X-richting bewegen; Er 1s een statorbeugelnaaf aan een zijde van de bevestigingsbasis (9), en een lineair rollend lager is geïnstalleerd 1n het begrenzingsgat van de bovenste schuifstang om de wrijvingskracht van lineaire beweging te verminderen; Twee beugels worden op elkaar geplaatst en een lineaire geleider (10) en een begrenzingsgroef (19) worden in het midden geïnstalleerd om de bewegingsvrijheid verder te vergroten.GMM-based macro-micro linear drive device according to claim 1, characterized in that a double "L" -shaped bracket is used as a support, and the mover bracket (8) is connected to the mover structure of the driver, and after the coil is energized, it will move linearly in the X direction; There is a stator bracket hub on one side of the mounting base (9), and a linear rolling bearing is installed in the limiting hole of the upper slide rod to reduce the frictional force of linear motion; Two brackets are placed on top of each other and a linear guide (10) and a boundary groove (19) are installed in the center to further increase freedom of movement.
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