KR102000315B1 - Linear motor device and method for controlling linear motor device - Google Patents

Linear motor device and method for controlling linear motor device Download PDF

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KR102000315B1
KR102000315B1 KR1020147016520A KR20147016520A KR102000315B1 KR 102000315 B1 KR102000315 B1 KR 102000315B1 KR 1020147016520 A KR1020147016520 A KR 1020147016520A KR 20147016520 A KR20147016520 A KR 20147016520A KR 102000315 B1 KR102000315 B1 KR 102000315B1
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South Korea
Prior art keywords
speed
mover
linear motor
control
pressed
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KR1020147016520A
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Korean (ko)
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KR20140106571A (en
Inventor
슈헤이 야마나카
유키 노무라
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티에치케이 가부시끼가이샤
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Priority to JPJP-P-2011-267938 priority Critical
Priority to JP2011267938 priority
Priority to JPJP-P-2012-247400 priority
Priority to JP2012247400A priority patent/JP6068098B2/en
Application filed by 티에치케이 가부시끼가이샤 filed Critical 티에치케이 가부시끼가이샤
Priority to PCT/JP2012/081499 priority patent/WO2013084933A1/en
Publication of KR20140106571A publication Critical patent/KR20140106571A/en
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P6/00Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
    • H02P6/006Controlling linear motors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K41/00Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02Linear motors; Sectional motors
    • H02K41/03Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02PCONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06Linear motors
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K13/00Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
    • H05K13/04Mounting of components, e.g. of leadless components
    • H05K13/0404Pick-and-place heads or apparatus, e.g. with jaws
    • H05K13/0413Pick-and-place heads or apparatus, e.g. with jaws with orientation of the component while holding it; Drive mechanisms for gripping tools, e.g. lifting, lowering or turning of gripping tools

Abstract

The linear motor apparatus includes a linear motor and a control unit for moving a mover of the linear motor to apply a load to the object to be pressed. When the mover starts to apply pressure to the object to be pressed after moving the mover to the object to be pressed at a predetermined first velocity based on the position control, the control unit controls the pressure applied to the object to be pressed slower than the first velocity, And the mover is moved until the current flowing through the linear motor becomes equal to or higher than a predetermined current limit value.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a linear motor device and a control method of the linear motor device,

The present invention relates to a linear motor device and a control method of the linear motor device.

The present invention claims priority based on Japanese Patent Application No. 2011-267938 filed in Japan on December 7, 2011 and Japanese Patent Application No. 2012-247400 filed in Japan on November 9, 2012 , Its contents are used here.

BACKGROUND ART A machine tool for pressing a workpiece onto a substrate when mounting a workpiece such as an electronic component on a substrate is used. In such a machine tool, as a means for pressing the workpiece, a linear motor or the like is used (Patent Document 1).

In such a machine tool, it is necessary to press the workpiece with a load (pressure) equal to or greater than a certain level in order to reliably install the workpiece on the substrate. At this time, in order to prevent breakage of the work and the substrate, it is required to reduce the load as small as possible. In the machine tool, it is required to control the load on the work with high accuracy.

Japanese Patent Application Laid-Open No. 2009-194015

The technique described in Patent Document 1 uses a load detector that measures a load on a work, and controls the linear motor based on information obtained from the load detector. As a result, there is a problem that accuracy in controlling the load on the work is lowered when the installation position of the load detector deviates or when there is a large error in the detection accuracy of the load detector.

It is an object of the present invention to provide a linear motor device and a control method of a linear motor device capable of improving the precision of the pressure control on a pressing object without using a sensor for measuring a load on the pressing object such as a workpiece have.

An embodiment of the linear motor apparatus of the present invention is a linear motor apparatus comprising a linear motor and a control section for moving a mover of the linear motor to apply a load to the object to be pressed, Wherein when the mover starts to apply pressure to the object to be pressed after moving the mover toward the object to be pressed, the second speed is lower than the first speed, and the pressure applied to the object to be pressed is equal to or lower than the predetermined pressure. And moves the mover at the second speed until the current flowing through the linear motor becomes equal to or higher than a predetermined current limit value.

An embodiment of a control method of a linear motor apparatus of the present invention is a control method in a linear motor apparatus having a linear motor and a control section for moving a mover of the linear motor to apply a load to the object to be pressed, Wherein when the mover starts to apply pressure to the object to be pressed after moving the mover toward the object to be pressed at a first predetermined speed, the pressure applied to the object to be pressed slower than the first speed, And a step of moving the mover at the second speed until the current flowing through the linear motor reaches a predetermined current limit value or more .

According to the present invention, the linear motor device is capable of pressing the mover against the pressing object without giving an unnecessary shock to the pressing object by decelerating the mover at a second speed lower than the first speed before the mover touches the pressing object (work) have. Therefore, the accuracy of the pressure control with respect to the pressing object can be improved.

1 is a schematic block diagram showing the configuration of a machine tool 1 according to an embodiment of the present invention.
2 is a perspective view (partial cross-sectional view) of the linear motor 10 in the embodiment of the present invention.
3 is a perspective view showing the coil unit held by the coil holder 105 in the present embodiment.
4 is a diagram showing the positional relationship between the magnet 103 and the coil 104 of the linear motor 10 in this embodiment.
5 is a perspective view showing the principle of the magnetic sensor.
6 is a graph showing the relationship between the direction of the magnetic field and the resistance value in the AMR sensor.
7 is a diagram showing an example of the shape of the ferromagnetic thin film metal of the magnetic sensor 112 for detecting the direction of the magnetic field even when the magnetic field strength is equal to or higher than the saturation sensitivity.
8 is a diagram showing an equivalent circuit (half bridge) of the magnetic sensor.
9 is a diagram showing an example of the shape of the ferromagnetic thin film metal of the magnetic sensor for detecting the direction of the magnetic field.
10 is a diagram showing the positional relationship between the magnetic sensor 112 and the rod 101. As shown in Fig.
11 is a diagram showing an example of a signal output by the magnetic sensor 112. Fig.
12A is a diagram showing a magnetic sensor using two sets of full bridge configurations.
12B is a diagram showing a magnetic sensor using two sets of full bridge configurations.
13 is a graph showing a signal output by the magnetic sensor 112. In Fig.
14 is a conceptual diagram showing a positional relationship between the rod 101 and the magnetic sensor 112 and a signal output by the magnetic sensor 112. Fig.
15 is a diagram showing a Lis-master figure drawn by outputs VoutA and VoutB of the magnetic sensor 112. Fig.
16 is a diagram showing a magnetic sensor 112 installed in the end case 109. Fig.
17 is a view showing a bush 108 as a bearing provided in the end case 109. Fig.
18 is a schematic block diagram showing the configuration of the control unit 20 in the present embodiment.
19 is a flowchart showing the operation when the work machine 1 presses the work 33 for the first time in this embodiment.
20 is a flowchart showing the operation of pressing the work 33 onto the substrate 31 by using the FL mode start position updated by the machine tool 1 in the present embodiment.
FIG. 21 is a waveform diagram showing changes in speed, current, and operation completion signal in the operations from step S202 to step S209 in FIG.
FIG. 22 is a waveform diagram showing changes in speed, current, and operation completion signal in the operations from step S212 to step S217 in FIG.
23 is a graph showing the relationship between the phase shift of the electric angle and the thrust force generated by the linear motor 10. Fig.
24 is a flowchart showing a modified example of the operation in which the work machine 1 presses the work 33 onto the substrate 31 in the present embodiment.

Hereinafter, a linear motor device and a control method in an embodiment of the present invention will be described with reference to the drawings.

1 is a schematic block diagram showing the configuration of a machine tool 1 according to an embodiment of the present invention.

The machine tool 1 as a motor device includes a rod type linear motor 10, a pressing body 11 provided in the linear motor 10 and a control unit 20 for controlling the linear motor 10. At the tip of the rod 101 of the linear motor 10, a pressing body 11 is provided.

The machine tool 1 moves the pressing body 11 in the vertical direction and brings the pressing body 11 into contact with the work 33 (pressing object) such as an electronic part. Then, the work 33 is pressed toward the substrate 31 by using the pressing body 11. Thereby, the work machine 1 is installed with the work 33 on a predetermined portion of the substrate 31 with the adhesive 32 interposed therebetween.

Hereinafter, the configurations of the linear motor 10 and the control unit 20 will be described.

2 is a perspective view (partial cross-sectional view) of the linear motor 10 in the embodiment of the present invention.

The linear motor 10 can move the rod 101 in the axial direction with respect to the coil receiving case 102. [ A plurality of coils 104 held in a coil holder 105 are stacked (arranged) in a coil accommodating case 102. An end case 109 is provided on each of both end faces of the coil housing case 102. The end case 109 is provided with a bush 108 serving as a bearing for guiding the linear motion of the rod 101. [

The rod 101 includes, for example, a nonmagnetic material such as stainless steel and has a hollow space such as a pipe. In the hollow space of the rod 101, a plurality of columnar magnets 103 (segment magnets) are stacked along the longitudinal direction of the rod 101 with their coils opposed to each other. Each of the magnets 103 opposes one adjacent magnet 103 and the N poles, and opposes the other adjacent magnet 103 and the S poles. Between the magnet 103, a pole shoe 107 (magnetic pole block) including a magnetic body such as iron is interposed. The rod 101 passes through the stacked coil 104 and is supported by the coil housing case 102 so as to be movable in the axial direction.

3 is a perspective view showing the coil unit held by the coil holder 105 in the present embodiment.

As shown in Fig. 3, the coil 104 is wound in a spiral shape and held by the coil holder 105. As shown in Fig. A plurality of coils 104 are wound around a circumference of a rod 101 around a direction in which the magnets 103 of the rod 101 are arranged. The coils 104 are arranged in the same direction as the direction in which the magnets 103 are arranged.

A ring-shaped resin spacer 105a is interposed between the coils 104 because it is necessary to insulate the adjacent coils 104 from each other. A printed circuit board 106 is mounted on the coil holder 105. The end 104a of the coil of the coil 104 is connected to the printed board 106. [

In the present embodiment, the coil housing case 102 is formed integrally with the coil 104 by insert molding. Specifically, the coil 104 and the coil holder 105 are set in the mold, and the molten resin or the special ceramics is injected into the mold to form the coil receiving case 102.

As shown in Fig. 2, a plurality of fins 102a are formed in the coil housing case 102 in order to enhance heat dissipation of the coils 104. Fig.

The coil 104 held in the coil holder 105 is housed in a coil housing 102 made of aluminum and the gap between the coil 104 and the coil housing case 102 is filled with an adhesive, And the coil holder 105 may be fixed to the coil receiving case 102.

4 is a diagram showing the positional relationship between the magnet 103 and the coil 104 of the linear motor 10 in this embodiment.

In the hollow space in the rod 101, a plurality of cylindrical magnets 103 (segment magnets) are arranged so that their coils are opposite to each other. The number of the coils 104 is three and becomes a set of three-phase coils including U, V, and W phases. A plurality of three-phase coils are combined to constitute a coil unit. When a three-phase current having a phase difference of 120 degrees is supplied to a plurality of coils 104 divided into three phases of U, V and W phases, a moving magnetic field moving in the axial direction of the coil 104 is generated.

The rod 101 obtains a thrust by the action of the magnetic field generated by each magnet 103 as the driving magnet and the action of the moving magnetic field and performs a linear motion relative to the coil 104 in synchronization with the velocity of the moving magnetic field .

As shown in Fig. 2, a magnetic sensor 112 for detecting the position of the rod 101 is provided on one side of the end case 109, which is a magnetic sensor housing case. The magnetic sensor 112 is disposed with a predetermined clearance from the rod 101. The magnetic sensor 112 detects a change in the direction of the magnetic field (the direction of the magnetic vector) generated by each magnet 103 in the rod 101 due to the linear motion of the rod 101. [

5, the magnetic sensor 112 includes a Si or glass substrate 121 and a magnetoresistive element (a ferromagnetic film) formed of an alloy (ferromagnetic thin film metal) containing a ferromagnetic metal such as Ni and Fe as a main component 122).

The magnetic sensor 112 is called an AMR (Anisotropic-Magnetro-Resistance) sensor (anisotropic magnetoresistive element) because its resistance value changes in a specific magnetic field direction (refer to "Vertical Type MR Sensor Technical Data" October 1, 2005, Hamamatsu Optoelectronics &lt; / RTI &gt; Ltd., &Quot; Search on November 7, 2011 &quot;, Internet <URL; http://www.hkd.co.jp/technique/img/amr-note1.pdf>).

6 is a graph showing the relationship between the direction of the magnetic field and the resistance value in the AMR sensor.

It is assumed that a current is supplied to the magnetoresistive element 122 to apply a magnetic field strength to saturate a resistance change amount and the direction of the magnetic field H is given an angle change? 6, the resistance change amount DELTA R is maximized when the current direction and the magnetic field direction are perpendicular ([theta] = 90 [deg.] And 270 [deg.]), And the current direction and the magnetic field direction are parallel = 0 DEG, 180 DEG). The resistance value R changes according to the angle component in the current direction and the magnetic field direction according to the following equation (1).

If the magnetic field strength is equal to or higher than the saturation sensitivity,? R is a constant, and the resistance value R is not affected by the strength of the magnetic field.

[Equation 1]

Figure 112014056412175-pct00001

R0: resistance value of the ferromagnetic thin film metal in the magnetless system

ΔR: Change in resistance

&amp;thetas;: an angle representing the magnetic field direction

7 is a diagram showing an example of the shape of the ferromagnetic thin film metal of the magnetic sensor 112 for detecting the direction of the magnetic field even when the magnetic field strength is equal to or higher than the saturation sensitivity.

The ferromagnetic thin metal film element R1 formed in the longitudinal direction and the element R2 in the transverse direction are connected in series as shown in Fig.

The magnetic field in the vertical direction that promotes the greatest resistance change with respect to the element R1 becomes the minimum resistance change with respect to the element R2. The resistance values R1 and R2 are given by the following equations (2) and (3).

&Quot; (2) &quot;

Figure 112014056412175-pct00002

&Quot; (3) &quot;

Figure 112014056412175-pct00003

8 is a diagram showing an equivalent circuit (half bridge) of the magnetic sensor. The output Vout of this equivalent circuit is given by the following equation (4).

&Quot; (4) &quot;

Figure 112014056412175-pct00004

By substituting the equations (2) and (3) into the equation (4) and summarizing them, the following equations (5-1) and (5-2) are obtained.

[Equation 5-1]

Figure 112014056412175-pct00005

&Quot; (5-2) &quot;

Figure 112014056412175-pct00006

9 is a diagram showing an example of the shape of the ferromagnetic thin film metal of the magnetic sensor for detecting the direction of the magnetic field.

As shown in Fig. 9, when the shape of the ferromagnetic thin film metal is formed, it is possible to improve the stability of the midpoint potential and amplify by using the two outputs Vout + and Vout-.

The change of the magnetic field direction when the rod 101 linearly moves and the output of the magnetic sensor 112 will be described.

10 is a diagram showing the positional relationship between the magnetic sensor 112 and the rod 101. As shown in Fig.

As shown in Fig. 10, the magnetic sensor 112 is disposed at a position of the gap 1 to which a magnetic field strength higher than saturation sensitivity is applied, so that a change in magnetic field direction contributes to the sensor surface.

At this time, when the magnetic sensor 112 relatively moves the distance? Of the positions A to E along the rod 101, the output of the magnetic sensor 112 becomes as follows.

11 is a diagram showing an example of a signal output by the magnetic sensor 112. Fig.

As shown in Fig. 11, when the rod 101 linearly moves the distance [lambda], the direction of the magnetic field makes one rotation on the sensor surface. At this time, the voltage signal becomes a sinusoidal signal of one period. More precisely, the voltage Vout represented by Equation (5-1) becomes a sinusoidal wave signal for two cycles.

However, when a bias magnetic field is applied at 45 DEG to the element elongation direction of the magnetic sensor 112, the period is halved, and an output waveform of one cycle is obtained when the rod 101 linearly moves by?.

As shown in Fig. 12B, in order to know the direction of the motion, two sets of elements of the full bridge structure may be formed on one substrate so as to be inclined at 45 degrees with respect to each other.

As shown in Fig. 13, the outputs VoutA and VoutB obtained by two sets of full bridge circuits are a cosine wave signal and a sinusoidal wave signal having a phase difference of 90 degrees with each other.

As shown in Fig. 12A, in this embodiment, the magnetic sensor 112 is formed on one substrate so that the elements of two sets of the full bridge structure are inclined by 45 degrees with respect to each other. The magnetic sensor 112 detects a change in the direction of the magnetic field of the rod 101. 14, even if the installation position of the magnetic sensor 112 is shifted from (1) to (2), the sinusoidal wave signal and the cosine wave signal output from the magnetic sensor 112 And VoutB.

15 is a diagram showing a Lis-Diagram drawn by the outputs VoutA and VoutB of the magnetic sensor 112. Fig.

Since the change of the output of the magnetic sensor 112 is small, the size of the circle shown in Fig. 15 is hardly changed. Therefore, the direction? Of the magnetic vector 24 can be accurately detected. The exact position of the rod 101 can be detected even if the gap l between the rod 101 and the magnetic sensor 112 is not managed with high accuracy, so that mounting adjustment of the magnetic sensor 112 is facilitated. In addition, it is also possible to make the rod 101 guided by the bush 108 to have a rattling, and it is also possible to allow some bending of the rod 101.

16 is a diagram showing a magnetic sensor 112 installed in the end case 109. Fig.

The end case 109 is provided with a magnetic sensor accommodating portion 126 including a space for accommodating the magnetic sensor 112 therein. The magnetic sensor 112 is disposed in the magnetic sensor accommodating portion 126 and the periphery of the magnetic sensor 112 is filled with the filler 127. [ Thereby, the magnetic sensor 112 is fixed to the end case 109.

The magnetic sensor 112 has a temperature characteristic, and the output is changed by a change in temperature. A material having a thermal conductivity lower than that of the coil housing case 102 is used for the end case 109 and the filler material 127 in order to reduce the influence of the heat received from the coil 104. [ For example, an epoxy-based resin is used for the coil housing case 102, and polyphenylene sulfide (PPS) is used for the end case 109 and the filler material 127.

17 is a view showing a bush 108 as a bearing provided in the end case 109. Fig.

By providing the end case 109 with a bearing function, it is possible to prevent the gap between the rod 101 and the magnetic sensor 112 from fluctuating.

18 is a schematic block diagram showing the configuration of the control section 20 in the present embodiment.

The control unit 20 includes a position control unit 201, a switch unit 202, a speed control unit 203, a switch unit 204, a current control unit 205, a power converter 206, a current transformer (CT) 207 A speed calculating section 208, a position calculating section 209, a speed switching position determining section 210, a position determining section 211, a completion signal generating section 212 and an electric angle correcting section 213 have.

Hereinafter, the case where the position of the pressing body 11 when the rod 101 is lifted most is set as the reference point of the position of the pressing body 11 will be described.

The position control section 201 calculates a speed command based on a position command inputted from the outside and information indicating the position of the rod 101 calculated by the position calculating section 209. [ The position control section 201 stores the first to fourth speeds FL1SPD to FL4SPD in advance and sets the four speed commands (the first speed command to the fourth speed command) based on the first speed to the fourth speed, .

When the rod 101 moves from the predetermined origin to the pressurizing body 11 provided at the tip of the rod 101 to the vicinity of the work 33 (the force limit mode starting position FL) Is a command indicating the speed at which the rod 101 moves. In the first speed command, the upper limit value of the speed at which the rod 101 is moved is predetermined as the first speed FL1SPD. For example, the maximum speed at which the linear motor 10 moves the rod 101 is referred to as a first speed FL1SPD.

The second speed command is a command indicating the speed at which the rod 101 moves when the pressing body 11 moves from the vicinity of the work 33 to the contact with the work 33. In the second speed command, the speed at which the rod 101 is moved is predetermined as the second speed FL2SPD. The second speed FL2SPD is a speed lower than the first speed FL1SPD and is a speed at which the pressure (load) less than a certain level is applied to the work 33 when the pressing body 11 contacts the work 33 Respectively.

The third speed command is a command to move the rod 101 and the pressing body 11 away from the work 33 after the pressing body 11 is pressed against the work 33 to mount the work 33 on the substrate 31 Quot; direction &quot; In the third speed command, the speed at which the rod 101 is moved is predetermined as the third speed FL3PSD. The third speed command is a command used to move the rod 101 and the pressing body 11 toward the origin.

The fourth speed command is a command indicating the speed at which the load 101 is moved toward the origin after the pressing body 11 is pressed against the work 33 to mount the work 33 on the substrate 31 . In the fourth speed command, the upper limit value of the speed at which the rod 101 is moved is predetermined as the fourth speed FL4SPD. Further, the fourth speed FL4SPD is set at a higher speed than the third speed FL3SPD. For example, the fourth speed FL4SPD is set to the maximum speed at which the linear motor 10 moves the rod 101, as in the first speed FL1SPD.

The switch unit 202 selects any one of the four speed commands outputted from the position control unit 201 based on the control of the position judging unit 211. [

The speed control section 203 is inputted with a speed command selected by the switch section 202 and speed information indicating the speed of the rod 101 calculated by the speed calculating section 208. [ The speed control section 203 calculates a current value for making the speed at which the rod 101 moves the speed indicated by the speed command based on the speed difference indicated by the speed command and the speed indicated by the speed information.

Further, the speed control section 203 outputs the calculated current value as a non-regulated current command, and also outputs a limiting current command which is a current command whose upper limit is the predetermined current limit value FL2I.

When the calculated current value is equal to or less than the current limit value FL2I, the unrestricted current command and the limited current command indicate the same current value. On the other hand, when the calculated current value is larger than the current limit value FL2I, the non-restored current command indicates the calculated current value and the limiting current command indicates the current limiting value FL2I. The current limit value FL2I is predetermined based on the thrust of the linear motor 10 and the force for pressing the work 33 when the work 33 is mounted on the substrate 31. [

The switch unit 204 selects either the limit current command or the non-limit current command output from the speed control unit 203 based on the control of the position determination unit 211. [

The current control unit 205 reduces the deviation between the selected current command and the measured current value based on the current command selected by the switch unit 204 and the current value flowing through the linear motor 10 measured by the current transformer 207 The voltage command is calculated.

The electric power converter 206 converts each coil 104 of the U, V, and W phases of the linear motor 10 based on the electric angle input from the electric angle correcting unit 213 and the voltage command calculated by the current control unit 205, .

The current transformer 207 is installed in a power line connecting the power converter 206 and the linear motor 10. Further, the current transformer 207 measures the current value flowing through this power line. The current transformer 207 outputs a signal indicating the measured current value to the current control unit 205, the speed switching position determination unit 210, and the completion signal generation unit 212.

The speed calculating unit 208 calculates the moving speed of the rod 101 based on the amount of change of the sinusoidal wave signal and the cosine wave signal (output VoutA and VoutB) output from the magnetic sensor 112. [

The position calculating unit 209 calculates the amount of movement from the origin of the rod 101 based on the amount of change of the sinusoidal wave signal and the cosine wave signal (output VoutA and VoutB) output from the magnetic sensor 112. [ The position calculating section 209 outputs position information indicating the position of the rod 101 to the position control section 201, the speed switching position determining section 210 and the position determining section 211. [

The speed change position determining unit 210 outputs a signal indicating the FL mode start position to the position determining unit 211. [ The FL mode start position is a position for switching the speed command from the first speed command to the second speed command while the rod 101 and the pressing body 11 are moving toward the work 33 and the substrate 31 .

The speed change position determining unit 210 also outputs a signal indicating the speed change position FL3POS to the position determining unit 211. [ The speed change position is a position to switch the speed command from the third speed command to the fourth speed command while moving the rod 101 toward the origin after pressing the work 33 to the substrate 31. [

When the work for pressing the work 33 is performed for the first time, the speed change position determining section 210 outputs the previously stored initial change position FL2POSSUB to the position determining section 211 as the FL mode start position . The speed change position determining unit 210 determines the position of the work 33 on the basis of the speed and position at which the rod 101 moves and the current flowing through the linear motor 10 when the work 33 is initially pushed, The FL mode start position is updated so as to shorten the time required for the step of mounting the work 33 on the substrate 31. [

Then, the speed change position determining unit 210 outputs the updated FL mode start position to the position determining unit 211. [ The initial switching position is a predetermined position in accordance with the height of the work 33 and is set so as not to give an unnecessary impact to the work 33 when the pressing body 11 is brought into contact with the work 33, (The rod 101 of the linear motor 10). In the speed change position FL3POS, for example, the same position as the initial switching position FL2POSSUB is set in advance.

Based on the position command and operation start signal input from the outside and the position information outputted by the position calculating section 209, the position determining section 211 as the movement controlling section determines from the four speed commands outputted from the position controlling section 201 And controls the switch unit 202 to select any one of them. The position determination section 211 controls the switch section 204 to select any one of the two current commands output from the speed control section 203 based on the position command and operation start signal and the position information .

When the current value measured by the current transformer 207 reaches the predetermined current limit value FL2I while the pressing body 11 is pressing the work 33, the completion signal generating unit 212 outputs the operation completion signal UO2 ) To the outside.

The electric angle correcting unit 213 calculates the electric angle from the sinusoidal wave signal and the cosine wave signal output from the magnetic sensor 112. [ The electric angle correcting unit 213 outputs either the electric angle calculated or the electric angle obtained by correcting the calculated electric angle to the electric power converter 206 under the control of the position judging unit 211. [

The operation when the work machine 1 presses the work 33 for the first time will be described.

19 is a flowchart showing the operation when the work machine 1 presses the work 33 for the first time in the present embodiment. A direction in which the rod 101 approaches the work 33 and the substrate 31 is referred to as a CW direction and a direction in which the rod 101 moves away from the work 33 and the substrate 31 is referred to as a CCW direction.

When the position command based on the position of the work 33 is input from the outside, the control unit 20 starts driving of the linear motor 10 and performs home position return to move the pressing body 11 to the home position (step S101 ).

When the home position return is completed, the position judging section 211 judges whether or not the operation completion signal UI2 is externally turned on (step S102), and waits until the operation start signal is turned on (step S102 :no).

When the operation start signal is turned on in step S102 (step S101: YES), the position determining section 211 selects the first speed command to the switch section 202 and outputs the non-preset current command to the switch section 204 (step S103). Then, the position determining section 211 moves the rod 101 of the linear motor 10 toward the work 33 (in the CW direction) (step S104).

The position determining section 211 determines whether or not the position of the pressing body 11 reaches the initial switching position FL2POSSUB (step S105), and when the pressing body 11 reaches the initial switching position FL2POSSUB The linear motor 10 is driven using the first speed command (step S105: NO).

When the pressing body 11 reaches the initial switching position FL2POSSUB in step S105 (step S105: YES), the position determining section 211 selects the second speed command to the switch section 202, And selects the limit current command to the switch unit 204 (step S106). Then, the position determining section 211 decelerates the moving speed of the rod 101. [

After the second speed command is selected, the speed change position determining unit 210 determines whether or not the moving speed of the rod 101 is equal to or less than the second speed FL2SPD (step S107) (Step S107: NO) until it becomes equal to or less than the second speed FL2SPD.

When the travel speed of the rod 101 becomes equal to or less than the second speed (step S107: YES), the speed change position determining unit 210 determines the position of the current pressure body 11 and the initial switch position FL2POSSUB), and stores the calculated difference (FL2POSMAIN1) (step S108).

The electric angle correcting unit 213 calculates the ratio X (= "thrust limit value" / "maximum thrust") of the "thrust limit value" to the maximum thrust of the linear motor 10 (step S109).

The thrust limit value corresponds to the maximum value of the pressure (load) that can be applied to the work 33 and the substrate 31. [

The electrical angle correcting unit 213 calculates the phase angle Y corresponding to the ratio X of the thrust calculated in step S109 using the following equation (6) (step S110).

&Quot; (6) &quot;

Figure 112014056412175-pct00007

In Equation (6), &quot; cos-1 &quot; is an inverse cosine function.

The electric angle correcting unit 213 corrects the corrected electric angle obtained by adding the phase angle Y to the electric angle instead of the electric angle calculated from the sinusoidal wave signal and the cosine wave signal outputted by the magnetic sensor 112 to the electric power converter 206 (Step S111).

Then, while the electric angle correcting unit 213 is outputting the corrected electric angle, the electric power converter 206 converts the voltage of the phases advanced by the phase angle Y to the magnetic pole position of the rod 101 into U, V, W phases And is applied to the coil 104.

The correction using the phase angle Y may be performed by subtracting the phase angle Y from the electrical angle. In this case, the power converter 206 applies a voltage of a phase delayed by the phase angle Y to the magnetic pole position of the rod 101 to the coil 104 of U, V, W phase.

The speed switching position determination unit 210 determines whether the current value measured by the current transformer 207 is equal to or greater than the current limit value FL2I (step S112). When the measured current value reaches the current limit value FL2I (Step S112: NO).

If it is determined in step S112 that the current value measured by the current transformer 207 reaches the current limit value FL2I and that the measured current value is equal to or greater than the current limit value FL2I : YES), the position obtained by subtracting the difference (FL2POSMAIN1) calculated in step S108 from the current position of the pressure body 11 is stored as a new FL mode start position (FL2POSMAIN2) (step S113). At this time, the completion signal generator 212 turns on the operation completion signal UO2 and outputs it to the outside (step S114).

In step S114, the predetermined distance? D may be set as a margin when calculating the new FL mode start position (FL2POSMAIN2). More specifically, the position obtained by subtracting the distance DELTA d from the difference FL2POSMAIN1 may be set as a new FL mode starting position FL2POSMAIN2 from the current position of the pressing body 11. [

The position determining unit 211 determines whether or not the operation start signal input from the outside is off (step S115), and waits until the operation start signal is turned off (step S115: No).

In step S115, when the operation start signal is turned off (step S115: YES), the position control section 201 calculates a speed command in accordance with a position command to which the origin is moved. The electric angle correcting unit 213 outputs the electric angle calculated from the sinusoidal wave signal and the cosine wave signal outputted by the magnetic sensor 112 to the electric power converter 206 instead of the corrected electric angle (step S116). That is, the driving of the linear motor 10 using the corrected electric angle is ended.

The position determination section 211 selects the third speed command to the switch section 202 and selects the limit current command to the switch section 204 (step S117). Then, the position determining section 211 moves the rod 101 toward the origin (in the CCW direction) (step S118).

The position determining section 211 determines whether or not the pressing body 11 reaches the speed change position FL3POS (step S119), and until the pressing body 11 reaches the speed change position FL3POS (Step S119: NO).

When the pressing body 11 reaches the speed change position FL3POS in step S119 (step S119: YES), the position judging section 211 causes the switch section 202 to select the fourth speed command (step S120 ).

The position determining section 211 determines whether or not the pressing body 11 has reached the origin (step S121), and waits until the pressing body 11 reaches the origin (step S121: No).

When the pressure body 11 reaches the home position in step S121, the position determination section 211 outputs a signal indicating that the pressure body 11 has reached the origin, to the completion signal generation section 212, The generation unit 212 turns off the operation completion signal (step S122). In this way, the operation of initially pressing the work 33 to the substrate 31 is terminated.

20 is a flowchart showing the operation of pressing the work 33 onto the substrate 31 using the FL mode start position updated by the machine tool 1 in the present embodiment.

When the position command based on the position of the substrate 31 on which the work 33 is mounted or the position of the work 33 is input from the outside, the control unit 20 starts driving the linear motor 10, 11 to the home position (step S201).

When the home position return is completed, the position judging section 211 judges whether or not the operation start signal UI2 is turned on externally (step S202), and waits until the operation start signal is turned on (step S202 :no).

When the operation start signal is turned on in step S202 (step S202: YES), the position determining section 211 selects the first speed command to the switch section 202 and outputs the non-preset current command to the switch section 204 (step S203). Then, the position determining section 211 moves the rod 101 of the linear motor 10 toward the work 33 (in the CW direction) (step S204).

The position determining section 211 determines whether or not the position of the pressing body 11 reaches the FL mode start position FL2POSMAIN2 (step S205), and the pressing body 11 moves to the FL mode start position FL2POSMAIN2 The linear motor 10 is driven using the first speed command (step S205: NO).

When the pressing body 11 reaches the FL mode start position FL2POSMAIN2 in step S205 (step S205: YES), the position determining section 211 selects the second speed command to the switch section 202 , And selects the limit current command to the switch unit 204 (step S206). Then, the position determining section 211 decelerates the moving speed of the rod 101. [

When the moving speed of the rod becomes equal to or lower than the second speed, the electric angle correcting unit 213 corrects the phase angle Y for the electric angle instead of the electric angle calculated from the sinusoidal wave signal and the cosine wave signal outputted from the magnetic sensor 112 In addition, the corrected electric angle obtained by the correction is outputted to the electric power converter 206 (step S207).

The position determining unit 211 determines whether the current value measured by the current transformer 207 is equal to or greater than the current limit value FL2I (step S208), and waits until the measured current value reaches the current limit value FL2I (Step S208: NO).

When the current value reaches the current limit value FL2I and the measured current value is equal to or greater than the current limit value FL2I (YES in step S208), the position determining unit 211 determines in step S208 whether the current value is equal to or greater than the current limit value FL2I To the completion signal generation section 212, a signal indicating that the signal FL2I has arrived. The completion signal generator 212 turns on the operation completion signal UO2 and outputs it to the outside (step S209).

The position determining section 211 determines whether or not the operation completion signal inputted from the outside is off (step S210), and waits until the operation start signal is turned off (step S210: No).

In step S210, when the operation start signal is turned off (step S210: YES), the position control section 201 calculates the speed command in accordance with the position command for moving the origin. The electric angle correcting unit 213 outputs the electric angle calculated from the sinusoidal wave signal and the cosine wave signal outputted by the magnetic sensor 112 to the electric power converter 206 instead of the corrected electric angle (step S211). That is, the driving of the linear motor 10 using the corrected electric angle is ended.

The position determination section 211 selects the third speed command to the switch section 202 and selects the limit current command to the switch section 204 (step S212). Then, the position determining section 211 moves the rod 101 toward the origin (in the CCW direction) (step S213).

The position determining section 211 determines whether or not the pressing body 11 reaches the speed change position FL3POS (step S214), and until the pressing body 11 reaches the speed change position FL3POS (Step S214: NO).

When the pressing body 11 reaches the speed change position FL3POS in step S214 (step S214: YES), the position judging section 211 causes the switch section 202 to select the fourth speed command (step S215 ).

The position determining section 211 determines whether or not the pressing body 11 has reached the origin (step S216), and waits until the pressing body 11 reaches the origin (step S216: No).

When the pressure body 11 reaches the home position in step S216, the position determination section 211 outputs a signal indicating that the pressure body 11 has reached the origin to the completion signal generation section 212, The generation unit 212 turns off the operation completion signal UO2 (step S217). In this way, the operation of pressing the work 33 to the substrate 31 is terminated.

FIG. 21 is a waveform diagram showing changes in speed, current, and operation completion signal in the operations from step S202 to step S209 in FIG. In Fig. 21, the vertical axis indicates the position of the pressing body 11. As shown in Fig.

When the operation start signal is turned on, the control unit 20 moves the pressing body 11 toward the work 33 at the first speed FL1 SPD. The control unit 20 decelerates the pressing body 11 from the first speed FL1SPD to the second speed FL2SPD when the pressing body 11 reaches the FL mode start position FL2POSMAIN2.

The control unit 20 moves the pressing body 11 toward the work 33 at the second speed FL2SPD and presses the work 33 toward the substrate 31. [ At this time, if the force for pressing the pressing body 11 against the work 33 is greater than the force corresponding to the current limit value FL2I, the control unit 20 turns on the operation completion signal.

Fig. 22 is a waveform diagram showing changes in speed, current, and operation completion signal in the operations from step S212 to step S217 in Fig. 22, the vertical axis indicates the position of the pressing body 11. As shown in Fig.

The control section 20 moves the pressing body 11 toward the origin and raises the pressing body 11 at the third speed FL3SPD after pressing the pressing body 11 against the work 33. [ The control unit 20 moves the pressing body 11 toward the origin at a fourth speed FL4SPD faster than the third speed FL3SPD when the pressing body 11 reaches the speed change position.

The control unit 20 decelerates the moving speed of the rod 101 of the linear motor 10 so that the velocity of the pressing body 11 at the origin becomes zero and when the pressing body 11 reaches the origin, .

As described above, in the section from the start of driving of the linear motor 10 to the time when the pressing body 11 reaches the FL mode start position (FL2POSMAIN2), the machine tool 1 performs position control, speed control And the current control are combined to control the linear motor 10. The machine tool 1 controls the linear motor 10 in combination with speed control and current control in a section during which the pressing body 11 contacts the work 33 from the FL mode start position FL2POSMAIN2 do. Further, the machine tool 1 controls the linear motor 10 by current control after the pressing body 11 contacts the work 33.

That is, the machine tool 1 switches the control according to the position of the pressing body 11.

The work machine 1 decelerates the workpiece 33 at a second speed lower than the first speed before the pressing body 11 contacts the work 33 by control according to the position of the pressing body 11, The pressing body 11 can be pressed against the work 33 without giving an unnecessary impact to the pressing body 11. [ That is, the machine tool 1 can improve the accuracy of controlling the load (pressure) applied to the work 33. [

Further, the machine tool 1 moves the pressing body 11 at the second speed until the current value flowing through the linear motor 10 becomes equal to or larger than the current limit value. By stopping the drive of the linear motor 10 or decreasing the value of the current flowing through the linear motor 10 or moving the mover in the direction away from the work 33 after the current value reaches the current limit value or more, It is possible to prevent the work 33 from being given more than necessary load. That is, the machine tool 1 can improve the accuracy of controlling the load applied to the work 33. [

In this manner, the machine tool 1 can improve the accuracy of the pressure control on the work 33 without measuring the load on the work 33. [

The work machine 1 also detects a distance (difference (FL2POSMAIN1)) required when decelerating the work 33 from the first speed to the second speed when the work 33 is initially pressed, And calculates a new FL mode start position (FL2POSMAIN2) from the position of contact with the work (33) and the difference (FL2POSMAIN1). The work machine 1 performs an operation of pressing the work 33 to the substrate 31 by using the FL mode start position FL2POSMAIN2 calculated when the work 33 is initially pressed.

That is, the work machine 1 starts the FL mode based on the position of the work 33 detected when the work 33 is initially pressed and the distance required to decelerate from the first speed to the second speed And presses the work 33 using the calculated FL mode start position.

Thus, the machine tool (1) calculates the FL mode start position according to the height of the work (33), and performs control using the calculated FL mode start position. Thus, the machine tool 1 can improve the accuracy of pressing the work 33. [

The machine tool 1 can apply the thrust imparted to the rod 101 (movable element) directly to the work 33 by using the linear motor 10 as a drive device. As a result, the machine tool 1 can apply a load (pressure) to the work 33 without causing loss of thrust in the machine structure or the like, compared with an apparatus having a mechanical structure for changing the direction of thrust. Thus, the machine tool 1 can improve the precision of controlling the thrust.

Further, the machine tool (1) calculates the ratio X of the thrust limit value to the maximum thrust of the linear motor (10) and corrects the electric angle using the phase angle Y according to the calculated ratio X. By correcting the electric angle, the electric angle capable of generating the maximum thrust with respect to the magnetic pole position which is the positional relationship between the coil 104 of the U, V, W phase and the magnet 103 stacked in the rod 101 is shifted , The apparent thrust constant is changed to a small value.

The torque (torque) generated by the linear motor 10 becomes the value N0 x i obtained by multiplying the thrust constant N0 [N / Arms] by the current i [Arms] flowing through the linear motor 10. [ The resolution of the thrust in the linear motor 10 is proportional to the current resolution in the power converter 206 and the current transformer 207 and the thrust constant N0. The thrust constant N0 is a value when the phase relationship between the current flowing through the coil 104 and the magnetic flux of the magnet 103 is matched. Normally, when the linear motor 10 is driven, the control unit 20 causes current to flow so that the phase relationship between the current flowing through the coil 104 and the magnetic flux of the magnet 103 coincides with each other. When the phase is shifted by?, The apparent thrust constant N? Decreases and the thrust constant N? Is expressed by the following equation (7).

&Quot; (7) &quot;

Figure 112014056412175-pct00008

23 is a graph showing the relationship between the phase shift of the electrical angle and the thrust generated by the linear motor 10. Fig.

In Fig. 23, the vertical axis represents the thrust, and the horizontal axis represents the phase shift amount (angle). For example, when the phase is shifted by 60 degrees (? = 60 degrees), the apparent thrust constant N? Becomes half of the thrust constant N0. Further, when the phase is shifted by 90 degrees (? = 90 degrees), the apparent thrust constant N?

The work machine 1 is energized to the linear motor 10 by using the corrected electric angle obtained by correcting the electric angle by the phase angle Y after the pressing body 11 reaches the FL mode start position FL2POSMAIN2, The apparent thrust constant N? Is reduced. Thus, the resolution of thrust in the machine tool 1 can be reduced, and the accuracy of controlling the thrust can be improved. In addition, it is possible to suppress errors and variations in the thrust generated from the rounding error and the quantization error when calculating the voltage command, so that the thrust can be controlled with high accuracy.

Further, in the machine tool 1, when the moving speed of the mover is not more than the second speed, the electric angle correcting unit 213 corrects the electric angle. Thus, the machine tool 1 quickly decelerates the moving speed of the mover to the second speed after the mover reaches the FL mode start position, and increases the resolution of the thrust when the second speed is reached, thereby controlling the thrust And can be performed with high accuracy.

(Modified example)

In the case of performing the pressure control described in the above-described embodiment, it is preferable that the pressing force instantaneously reaches the pressing force after the pressing is started. In order to shorten the response time of the pressing force, it is necessary to make the response of the current command high. However, in reality, a delay occurs due to the response of the control system.

The control unit 20 controls the control loop to return from the current control unit 205 to the current control unit 205 via the current transformer 207 and the control loop from the speed control unit 203 to the speed control unit 203 via the magnetic sensor 112. [ And a control loop returned from the position control section 201 to the position control section 201 via the magnetic sensor 112. [ In the response time of the pressing force, a control loop starting from the current control section 205 and a control loop starting from the speed control section 203 are influenced. Since the position does not change when the pressurization is started, the influence of the control loop starting from the position control section 201 is hardly affected.

In the control loop starting from the current control unit 205, the loop is often small, so that it is often controlled at a sufficiently high speed so that there is almost no difference between the command value of the current and the measured value. As a result, the control loop starting from the speed control section 203 has a great influence on the response time of the pressing force (response performance of pressing). Therefore, it is conceivable to increase the control gain (proportional gain, integral gain, etc.) used when the current command is calculated in the speed control section 203. [ However, the magnitude of the control gain is limited by the natural frequency of the mechanical system of the machine tool 1 including the linear motor 10. Therefore, in order to make the linear motor 10 perform a stable operation, the control gain can not be set to a predetermined value or more.

Attention will be paid to the case of pressing the work 33 with the pressing body 11. The natural frequency of the mechanical system of the machine tool 1 including the linear motor 10 increases because the pressing body 11 and the work 33 contact each other. Therefore, when pressurization is performed, the control gain can be made larger than when the pressurizing member 11 and the rod 101 are moved. The control gain in the speed control section 203 is switched when moving the pressing body 11 and the rod 101 and pressing the work 33 with the pressing body 11. [ Thereby, the response time of the pressing force can be shortened and the pressing by the desired pressing force can be performed.

Hereinafter, the operation of switching the control gain in the speed control section 203 to the operation of the machine tool 1 shown in Fig. 20 will be described. The speed control section 203 is described as a case in which the control gain for movement and the control gain for pressing larger than the control gain for movement are stored in advance as two control gains.

24 is a flowchart showing a modified example of the operation of the work machine 1 in this embodiment for pressing the work 33 onto the substrate 31. Fig.

The flowchart shown in Fig. 24 differs from the flowchart shown in Fig. 20 in the following two points. That is, the process in which the speed control section 203 switches the control gain from the control gain for movement to the control gain for pressurization (step S206a) is added between step S206 and step S207 and that the speed control section 203 controls the gain (Step S210a) for switching from the control gain for pressurization to the control gain for movement is added between step S210 and step S211.

The processing in each of the other steps (steps S201 to S217) is the same as that in the flowchart of Fig. 20, and a description thereof will be omitted.

The speed control section 203 performs the processing of step S206a and step S210a on the basis of the determination result of the position determination section 211. [

In Fig. 24, the case of switching the control gain from the movement control gain to the pressure control gain is shown between step S206 and step S207, but the present invention is not limited to this. From the movement control gain to the pressure control gain until the position of the pressure body 11 reaches the FL mode start position (after step S205) until the pressing body 11 contacts the work 33 You can switch.

Also, the control gain may be switched from the control gain for pushing to the movement control gain before the movement is started toward the origin (in the CCW direction) at the third speed (FL3SPD) (before step S213). Further, the speed control section 203 may switch the control gain at the timing at which the deceleration from the first speed to the second speed is started.

As described above, by switching the control gain of the speed control section 203, when the pressing body 11 and the rod 101 are moved toward the work 33 and when the pressing body 11 and the rod 101 are moved It is possible to determine the control gain (control gain for pressurization) without being limited by the natural frequency of the mechanism system when moving toward the origin. As a result, the responsiveness of the pressing force can be improved and the time until the pressing body 11 presses the work 33 with a desired pressing force after the pressing body 11 contacts the work 33 can be shortened .

In the operation of the machine tool 1 shown in Fig. 19, the switching of the control gain in the speed control section 203 may be applied as shown in Fig.

In the above-described embodiment and its modifications, the control unit 20 controls the rod-type linear motor 10, but the present invention is not limited to this. The control unit 20 may control the flat type linear motor or the rotary motor. When the control unit 20 controls the rotary motor, the rotary motion may be converted into linear motion using a ball screw or the like.

The processing of steps S109 and S110 in Fig. 19 may be performed in advance, and the phase angle Y may be stored in advance in the electrical angle correcting unit 213 in advance.

The work 33 is pressed by the pressing body 11 provided at the tip end of the rod 101 of the linear motor 10. In the above embodiment, .

The control unit 20 described above may have a computer system therein. In this case, the position control section 201, the switch section 202, the speed control section 203, the switch section 204, the current control section 205, the speed calculating section 208, the position calculating section 209, The processes of the switching position determination unit 210, the position determination unit 211, the completion signal generation unit 212, and the electrical angle correction unit 213 are stored in a computer-readable recording medium in the form of a program. Then, the computer reads and executes the program, whereby the processing of each functional unit is performed.

The computer-readable recording medium refers to a magnetic disk, a magneto-optical disk, a CD-ROM, a DVD-ROM, a semiconductor memory, or the like. The computer program may be distributed to the computer by a communication line and the computer that has received the distribution may execute the program.

1: Machine tool (linear motor device)
10: Linear motor
20:
33: work (pressurized object)
101: Load (mover)
210: Speed switching position determining section
211: Position determination section (movement control section)
213:

Claims (6)

  1. A linear motor apparatus comprising a linear motor and a control section for moving a mover of the linear motor to apply pressure to the object to be pressed,
    Wherein,
    After the mover is moved toward the object to be pressed at a predetermined first speed based on the position control,
    The control is performed such that when the mover starts to apply pressure to the object to be pressed, the object is decelerated at a second speed lower than the first speed and at a second speed at which the pressure applied to the object to be pressed becomes a predetermined pressure or less, ,
    Moving the mover at the second speed until the current flowing through the linear motor reaches a predetermined current limit value or more,
    Wherein,
    Based on a distance required when decelerating the speed at which the mover moves from the first speed to the second speed and a position at which the mover starts to be pressed against the object to be pressed, A speed change position determining unit that calculates a speed reduction start position that is a position at which the speed starts to decelerate from the speed at the second speed;
    Wherein when the mover moves the mover of the linear motor to the first speed when the mover is moved from the predetermined position toward the object to be pressed and the mover reaches the deceleration start position, And a movement controller for moving the mover at the second speed until the mover reaches the second speed.
  2. The method according to claim 1,
    Wherein,
    Further comprising an electric angle correcting unit for correcting an electric angle corresponding to a magnetic pole position of the mover on the basis of a ratio of a load applied to the pressing object to a maximum thrust of the linear motor,
    And the mover is moved based on the electric angle corrected by the electric angle correcting unit.
  3. 3. The method of claim 2,
    Wherein the electric angle correcting unit comprises:
    And corrects the electric angle when the moving speed of the mover is not more than the second speed.
  4. The method according to claim 1,
    Wherein,
    Wherein the control gain is switched to a control gain that is larger than a control gain used when the mover is moved at the first speed after starting deceleration from the first speed to the second speed.
  5. There is provided a control method in a linear motor apparatus having a linear motor and a control section for moving a mover of the linear motor to apply pressure to the object to be pressed,
    After the mover is moved toward the object to be pressed at a predetermined first speed based on the position control,
    The control is performed such that when the mover starts to apply pressure to the object to be pressed, the object is decelerated at a second speed lower than the first speed and at a second speed at which the pressure applied to the object to be pressed becomes a predetermined pressure or less, ,
    And moving the mover at the second speed until the current flowing through the linear motor reaches a predetermined current limit value or more,
    Wherein the control unit includes a speed change position determining unit and a movement control unit,
    Wherein the speed change position determining section determines the speed of the mover based on the distance required when the speed of the mover is decelerated from the first speed to the second speed and the position to start the pressing with respect to the pressing object, A deceleration start position that is a position where deceleration of the speed from the first speed to the second speed is started,
    Wherein when the mover moves the mover from the predetermined position toward the object to be pressed, the mover moves the mover of the linear motor at the first speed, and when the mover reaches the deceleration start position, Moves the mover at the second speed until the current value reaches the current limit value or more.
  6. A linear motor apparatus comprising a linear motor and a control section for moving a mover provided in the linear motor to apply a load to the object to be pressed,
    Wherein,
    After the control is performed on the basis of the position of the mover toward the object to be pressed at a first predetermined speed, and when the mover starts to apply pressure to the object to be pressed at a second speed lower than the first speed The control unit moves the mover at the second speed until the current flowing through the linear motor becomes equal to or higher than a predetermined current limit value ,
    Wherein,
    A speed at which the mover moves is determined based on a distance required for decelerating the speed at which the mover moves from the first speed to the second speed and a position at which the mover starts to be pressed against the pressing object, A speed change position determining unit that calculates a speed reduction start position that is a position at which the speed starts to decelerate from the speed at the second speed;
    Wherein when the mover moves the mover of the linear motor to the first speed when the mover is moved from the predetermined position toward the object to be pressed and the mover reaches the deceleration start position, And a movement controller for moving the mover at the second speed until the mover reaches the second speed,
    Wherein the control unit moves the mover in a direction opposite to a direction in which a load is applied to the pressing object when an operation start signal is inputted from the outside after the operation completion signal is output to the outside.
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US20140333236A1 (en) 2014-11-13
CN106972728B (en) 2019-04-05
DE112012005130T5 (en) 2014-11-06
JP6068098B2 (en) 2017-01-25
TW201334393A (en) 2013-08-16
CN103959640A (en) 2014-07-30
KR20140106571A (en) 2014-09-03
TWI554021B (en) 2016-10-11
CN103959640B (en) 2017-03-29
WO2013084933A1 (en) 2013-06-13
CN106972728A (en) 2017-07-21
US9318984B2 (en) 2016-04-19

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