NL2024999A - Determining lithographic matching performance - Google Patents

Determining lithographic matching performance Download PDF

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Publication number
NL2024999A
NL2024999A NL2024999A NL2024999A NL2024999A NL 2024999 A NL2024999 A NL 2024999A NL 2024999 A NL2024999 A NL 2024999A NL 2024999 A NL2024999 A NL 2024999A NL 2024999 A NL2024999 A NL 2024999A
Authority
NL
Netherlands
Prior art keywords
data
scanner
substrate
matching
lithographic
Prior art date
Application number
NL2024999A
Other languages
English (en)
Inventor
Hubaux Arnaud
Warnaar Patrick
Anderson Middlebrooks Scott
Original Assignee
Asml Netherlands Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=70412419&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=NL2024999(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Asml Netherlands Bv filed Critical Asml Netherlands Bv
Priority to NL2024999A priority Critical patent/NL2024999A/en
Publication of NL2024999A publication Critical patent/NL2024999A/en

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Claims (1)

  1. CONCLUSIE
    1. Een inrichting ingericht voor het belichten van een substraat.
NL2024999A 2020-02-26 2020-02-26 Determining lithographic matching performance NL2024999A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
NL2024999A NL2024999A (en) 2020-02-26 2020-02-26 Determining lithographic matching performance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL2024999A NL2024999A (en) 2020-02-26 2020-02-26 Determining lithographic matching performance

Publications (1)

Publication Number Publication Date
NL2024999A true NL2024999A (en) 2020-04-30

Family

ID=70412419

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2024999A NL2024999A (en) 2020-02-26 2020-02-26 Determining lithographic matching performance

Country Status (1)

Country Link
NL (1) NL2024999A (nl)

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