NL2024999A - Determining lithographic matching performance - Google Patents
Determining lithographic matching performance Download PDFInfo
- Publication number
- NL2024999A NL2024999A NL2024999A NL2024999A NL2024999A NL 2024999 A NL2024999 A NL 2024999A NL 2024999 A NL2024999 A NL 2024999A NL 2024999 A NL2024999 A NL 2024999A NL 2024999 A NL2024999 A NL 2024999A
- Authority
- NL
- Netherlands
- Prior art keywords
- data
- scanner
- substrate
- matching
- lithographic
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Claims (1)
- CONCLUSIE1. Een inrichting ingericht voor het belichten van een substraat.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2024999A NL2024999A (en) | 2020-02-26 | 2020-02-26 | Determining lithographic matching performance |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2024999A NL2024999A (en) | 2020-02-26 | 2020-02-26 | Determining lithographic matching performance |
Publications (1)
Publication Number | Publication Date |
---|---|
NL2024999A true NL2024999A (en) | 2020-04-30 |
Family
ID=70412419
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL2024999A NL2024999A (en) | 2020-02-26 | 2020-02-26 | Determining lithographic matching performance |
Country Status (1)
Country | Link |
---|---|
NL (1) | NL2024999A (nl) |
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2020
- 2020-02-26 NL NL2024999A patent/NL2024999A/en unknown
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