NL2017579A - Optical Element - Google Patents
Optical Element Download PDFInfo
- Publication number
- NL2017579A NL2017579A NL2017579A NL2017579A NL2017579A NL 2017579 A NL2017579 A NL 2017579A NL 2017579 A NL2017579 A NL 2017579A NL 2017579 A NL2017579 A NL 2017579A NL 2017579 A NL2017579 A NL 2017579A
- Authority
- NL
- Netherlands
- Prior art keywords
- radiation beam
- protrusions
- optical element
- radiation
- optical
- Prior art date
Links
- 230000003287 optical effect Effects 0.000 title abstract description 333
- 230000005855 radiation Effects 0.000 claims abstract description 340
- 239000000758 substrate Substances 0.000 claims description 50
- 238000005286 illumination Methods 0.000 claims description 14
- 238000000059 patterning Methods 0.000 claims description 14
- 238000001459 lithography Methods 0.000 claims description 7
- 230000007246 mechanism Effects 0.000 abstract description 44
- 238000009826 distribution Methods 0.000 description 53
- 239000010410 layer Substances 0.000 description 44
- 239000003574 free electron Substances 0.000 description 40
- 238000009304 pastoral farming Methods 0.000 description 37
- 239000000463 material Substances 0.000 description 36
- 238000010894 electron beam technology Methods 0.000 description 32
- 239000011295 pitch Substances 0.000 description 31
- 230000001419 dependent effect Effects 0.000 description 23
- 239000004020 conductor Substances 0.000 description 17
- 239000012528 membrane Substances 0.000 description 11
- 238000005452 bending Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 230000000737 periodic effect Effects 0.000 description 8
- 238000007689 inspection Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 5
- 210000001747 pupil Anatomy 0.000 description 5
- 229910052707 ruthenium Inorganic materials 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 230000009286 beneficial effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 4
- 239000011247 coating layer Substances 0.000 description 4
- 238000000576 coating method Methods 0.000 description 4
- 230000001427 coherent effect Effects 0.000 description 4
- 230000005684 electric field Effects 0.000 description 4
- 230000005670 electromagnetic radiation Effects 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 230000001902 propagating effect Effects 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 239000003989 dielectric material Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 239000002901 radioactive waste Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000005672 electromagnetic field Effects 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052594 sapphire Inorganic materials 0.000 description 2
- 239000010980 sapphire Substances 0.000 description 2
- 230000007480 spreading Effects 0.000 description 2
- 238000003892 spreading Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000010420 art technique Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000005251 gamma ray Effects 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005381 magnetic domain Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000003134 recirculating effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Claims (1)
1. Een lithografieinrichting omvattende: een belichtinginrichting ingericht voor het leveren van een stralingsbundel; 5 een drager geconstrueerd voor het dragen van een patroneerinrichting, welke patroneerinrichting in staat is een patroon aan te brengen in een doorsnede van de stralingsbundel ter vorming van een gepatroneerde stralingsbundel; een substraattafel geconstrueerd om een substraat te dragen; en een projectieinrichting ingericht voor het projecteren van de gepatroneerde stralingsbundel op 10 een doelgebied van het substraat, met het kenmerk, dat de substraattafel is ingericht voor het positioneren van het doelgebied van het substraat in een brandpuntsvlak van de projectieinrichting.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP15193204 | 2015-11-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| NL2017579A true NL2017579A (en) | 2017-05-24 |
Family
ID=54427650
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL2017579A NL2017579A (en) | 2015-11-05 | 2016-10-05 | Optical Element |
Country Status (1)
| Country | Link |
|---|---|
| NL (1) | NL2017579A (nl) |
-
2016
- 2016-10-05 NL NL2017579A patent/NL2017579A/en unknown
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