NL2008067C2 - Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method. - Google Patents

Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method. Download PDF

Info

Publication number
NL2008067C2
NL2008067C2 NL2008067A NL2008067A NL2008067C2 NL 2008067 C2 NL2008067 C2 NL 2008067C2 NL 2008067 A NL2008067 A NL 2008067A NL 2008067 A NL2008067 A NL 2008067A NL 2008067 C2 NL2008067 C2 NL 2008067C2
Authority
NL
Netherlands
Prior art keywords
substrate
holder
substrate holder
positioning
inkjet system
Prior art date
Application number
NL2008067A
Other languages
Dutch (nl)
Inventor
Henk Jan Zwiers
Original Assignee
Mutracx B V
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL2008067A priority Critical patent/NL2008067C2/en
Application filed by Mutracx B V filed Critical Mutracx B V
Priority to CN201710214103.1A priority patent/CN106973516B/en
Priority to MYPI2014001972A priority patent/MY168052A/en
Priority to CA2862582A priority patent/CA2862582C/en
Priority to CA3061803A priority patent/CA3061803A1/en
Priority to SG11201403776XA priority patent/SG11201403776XA/en
Priority to EP17175965.7A priority patent/EP3261425A1/en
Priority to KR1020207000005A priority patent/KR20200004463A/en
Priority to KR1020147021662A priority patent/KR102063516B1/en
Priority to CN201710214554.5A priority patent/CN106985520B/en
Priority to EP12821205.7A priority patent/EP2800965B1/en
Priority to US14/370,195 priority patent/US9363899B2/en
Priority to CN201280071043.8A priority patent/CN104136917B/en
Priority to PCT/NL2012/050934 priority patent/WO2013103298A1/en
Priority to ES12821205.7T priority patent/ES2638597T3/en
Priority to CN201710213912.0A priority patent/CN106965584B/en
Priority to CN201710213914.XA priority patent/CN106998628B/en
Priority to CN201710213793.9A priority patent/CN106965554B/en
Priority to CN201710213913.5A priority patent/CN106985530B/en
Publication of NL2008067C2 publication Critical patent/NL2008067C2/en
Application granted granted Critical
Priority to IL233458A priority patent/IL233458B/en
Priority to PH12014501520A priority patent/PH12014501520A1/en
Priority to HK14112454.8A priority patent/HK1199096A1/en
Priority to US15/148,780 priority patent/US9769932B2/en
Priority to US15/677,926 priority patent/US10123427B2/en
Priority to US16/152,065 priority patent/US20190037704A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/407—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for marking on special material
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
    • B41J3/28—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for printing downwardly on flat surfaces, e.g. of books, drawings, boxes, envelopes, e.g. flat-bed ink-jet printers

Landscapes

  • Coating Apparatus (AREA)

Description

P30975NL00/KHO
Title: Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method
The present invention relates to an inkjet system, in particular an 1C inkjet system for printing an integrated circuit, and a method for calibrating and controlling a substrate holder with respect to a virtual plane which is in parallel with an imaginary plane formed by a common position of a group of nozzles of a print head.
5 Integrated circuit (1C) printing, in particular printing of printed circuit boards, is an emerging technology that attempts to reduce the costs associated with 1C production by replacing expensive lithographic processes with simple printing operations. By printing an 1C pattern directly on the substrate rather than using the delicate and time-consuming lithography processes used in conventional 1C manufacturing, an 1C printing system can 10 significantly reduce IC production costs. The printed IC pattern can either comprise actual IC features (i.e., elements will be incorporated into the final IC, such as the gates and source and drain regions of thin film transistors, signal lines, opto-electronic device components, etc. or it can be a mask for subsequent semiconductor processing (e.g., etch, implant, etc.).
Typically, IC printing involves depositing a print solution by raster bitmap along a 15 single print travel axis (the "printing direction ") across a substrate. Print heads, and in particular the arrangements of the ejector(s) incorporated in those printheads, are optimised for printing along this print travel axis. Printing of an IC pattern takes place in a raster fashion, with the printhead making "printing passes" across the substrate as the ejector(s) in the printhead dispense individual droplets of print solution onto the substrate. Generally, at 20 the end of each printing pass, the printhead makes a perpendicular shift relative to the print travel axis before beginning a new printing pass. The printheads continues making printing passes across the substrate in this manner until the IC pattern has been fully printed.
A drawback in this context is that an accuracy of such IC printing system is limited. The accuracy of the IC printing system is limited due to deviations which occur during 25 printing movements of the print head and the substrate. Deviations are typically introduced by guidances and bearings of the IC printing system.
The general object of the present invention to at least partially eliminate the above mentioned drawbacks and/or to provide a useable alternative. More specific, it is an object of the invention to provide an inkjet system which includes a relative simple configuration but 30 which has a high accuracy performance and a method to control a positioning of a substrate in an inkjet system with high precision.
-2-
According to the invention, this object is achieved by an inkjet system according to claim 1.
According to the invention, an inkjet system is provided for printing an ink pattern on a substrate. The inkjet system comprises a substrate holder for holding a substrate.
5 Further, the inkjet system comprises a substrate positioning stage for positioning the substrate holder in a printing direction. The printing direction is defined as a direction of travel of the substrate positioning stage about a longitudinal axis of the inkjet system. The printing direction of the inkjet system may be defined as a direction of movement of a substrate when passing a print head assembly to print a swath onto the substrate. The 10 substrate holder is supported by the substrate positioning stage.
Further, the inkjet system comprises a stage positioning device. The substrate positioning stage is movable by the stage positioning device. In particular, the substrate positioning stage is movable in the printing direction about a long stroke of at least 0.5m and at most 2m.
15 Further, the inkjet system comprises a print head holder for holding a print head assembly which includes at least one print head for ejecting ink from a nozzle to the substrate.
The inkjet system according to the invention is improved in that the inkjet system further comprises a holder positioning device for positioning the substrate holder in at least 20 one degree of freedom with respect to the substrate positioning stage. In particular, the substrate positioning stage is movable in in at least one degree of movement about a short stroke of at least 0.5mm and at most 10mm, more in particular at least 2mm and at most 8mm. In particular, the holder positioning device is supported by the substrate positioning stage.
25 Advantageously, a positioning of the substrate holder with respect to the substrate positioning stage can compensate for deviations which occur during a travel of the substrate positioning stage. Such deviations from a theoretical ideal straight path of the substrate positioning stage may e.g. be caused by a deviation in straightness of a stage guidance.
The occurring deviations can be measured during a travel of the substrate positioning stage 30 and subsequently compensated by moving the substrate holder relative to the substrate positioning stage. Herewith, a held substrate in the substrate holder can be guided more accurate along a longitudinal axis of the inkjet system and passed along a print head.
Due to the fact that the substrate holder can be correctly positioned on-the-fly through control and measurement loops, the supporting substrate positioning stage itself 35 does not need a very high accuracy. This makes a low-cost design possible. It is for instance possible to use a belt drive for driving the substrate positioning stage in the printing direction. It is possible to actively correct the substrate holder for all position errors -3- introduced by a lower arranged substrate positioning stage due to deviations in for example a frame and guiding straightness.
An orthogonal system including an X, Y and Z-axis can be projected onto the inkjet system. An Y-axis may be defined in a longitudinal direction which corresponds with a 5 printing direction. An X-axis may be defined in a lateral direction. The X-axis extends in a direction transversal the printing direction. In particular, the X-axis and Y-axis define a horizontal plane. A Z-axis may be defined in upwards direction. The Z-axis is an up-down axis, in particular the Z-axis defines a vertical direction. Rotational directions can be defined in relation to the X-, Y-, and Z-axis. A rotational direction about the X-axis Rx, a pitch motion, 10 may be defined as a rotation of the substrate about the lateral axis. A rotational direction about the Y-axis Ry, a roll motion, may be defined as a rotation of the substrate about a longitudinal axis. A rotational direction about the Z-axis Rz, a yaw motion, may be defined as a rotation of the substrate about the up-down axis.
In an embodiment of the inkjet system according to the invention, the at least one 15 degree of freedom in which the substrate holder is positioned coincidences with a direction defined by an axis of the orthogonal system. In particular, the substrate holder is movable, in particular in the printing direction, about a stroke of at most 10mm, in particular at most 5mm with respect to the substrate positioning stage.
In an embodiment of the inkjet system according to the invention, the least one 20 degree of freedom in which the substrate holder is positioned with respect to the substrate positioning stage is directed in the printing direction. Typically, the at least one printhead ejects ink droplets from a nozzle at a constant frequency. To obtain an accurate ink pattern, it may be preferred to pass the substrate along the printhead at a constant speed such that the ink droplets are deposed at a regular interval. The substrate holder velocity can be 25 controlled through a master slave control system to obtain a constant speed in which the substrate holder compensates for small speed errors along the travel of the substrate positioning stage in the longitudinal direction.
In an embodiment of the inkjet system according to an invention, the at least one degree of freedom in which the substrate holder is positioned with respect to the substrate 30 positioning stage is directed in the upwards direction. Advantageously, the holder positioning device can compensate for deviations in the upwards or downwards direction during a travel of the substrate positioning stage.
In an embodiment of the inkjet system according to an invention, the holder positioning device positions the substrate holder in at least three degrees of freedom. In 35 particular, the holder positioning device positions the substrate holder in upwards direction (Z-direction), in a rotational direction Ry along a longitudinal axis (Y-axis) and a rotational direction Rx along a lateral axis (X-axis).
-4-
The holder positioning device provides a possibility to orient a held substrate in the substrate holder in a virtual plane. In particular, the virtual plane coincidences with a plane in parallel with the X-Y plane of the orthogonal system which is in particular a horizontal plane. The virtual plane is arranged in parallel with an imaginary plane in which a group of nozzles 5 is arranged. By positioning a substrate in parallel with the virtual plane, the substrate may be arranged in parallel with the imaginary plane formed by the group of nozzles. The substrate may be spaced at a constant distance from the group of nozzles which allows a more accurate positioning of ink droplets at a top surface of the substrate.
In an embodiment of the inkjet system according to the invention, the holder 10 positioning device positions to substrate holder in all degrees of freedom with respect to the substrate positioning stage. Advantageously, the positioning device provides a full control of all possible movements of the substrate. The positioning device allows a compensation for all deviations in all directions of the substrate holder with respect to the substrate positioning stage.
15 In an embodiment of the inkjet system according to the invention, the holder positioning device comprises at least one holder actuator in which the at least one holder actuator positions one degree of freedom in translation. The holder actuator determines one degree of freedom while the remaining five degrees of freedom are left free. Two paired of such holder actuators allow in cooperation a positioning of the substrate holder in a 20 rotational degree of freedom.
In an embodiment of the inkjet system according to an invention, the holder positioning device comprises at least one holder actuator and at least one holder position measurement system. In particular, the holder actuator is a voice coil actuator. The holder position measurement system may be incorporated in the holder actuator. The holder 25 position measurement system may be a built-in encoder with an accuracy of at least 1 pm. The holder actuator has a holder actuator base which is connectable to the substrate positioning stage and a holder actuator body which is connectable to the substrate holder. The holder actuator body is movable with respect to the holder actuator base. In particular, the holder actuator body has a body member which determines only one degree of freedom 30 of available directions of movements. In particular, the body member has an elongated portion. In particular the body member is antenna shaped. The body member allows a movement of five degrees of freedom, but resists a movement, more precisely said a translation, in a direction parallel to the elongated portion.
In an embodiment of the inkjet system according to invention the printhead holder is 35 stationary mounted in the inkjet system. The printhead holder may be beam-shaped and fixedly connected to a frame of the inkjet system. As a result, the at least one printhead is stationary mounted in the inkjet system during a printing step in which ink droplets are -5- ejected. A necessary relative motion of a substrate with respect to a printhead during the printing step is obtained by moving the substrate holder with respect to the stationary arranged printhead holder. Advantageously, the stationary mounted printhead holder provides a more accurate inkjet system. No deviations are generated which would have 5 occur by a moving printhead holder.
In an embodiment of the inkjet system according to invention, the print head holder comprises at least three reference marks. The three reference marks may be incorporated in one print head holder reference surface. The three reference marks define an imaginary plane, which is parallel to the imaginary plane formed by the group of nozzles of a print 10 head. In particular, the imaginary plane has a normal vector in upwards direction.
Advantageously, a substrate holder can be aligned e.g. by contacting with the reference surface of the print head holder to align the substrate holder with the virtual plane. After an alignment step, also called homing of the substrate holder at a homing position, the holder positioning device is programmed to control the substrate holder in parallel with the virtual 15 plane.
In an embodiment of the inkjet system according to the invention, the inkjet system comprises a X-calibration element including a calibration element X-reference surface. The X-calibration element reference surface extends in the printing direction, the Y-direction, in parallel with a plane oriented in the Z- and Y-axis. The substrate holder comprises at least 20 two sensors, so called X-sensors for measuring a relative distance in X-direction in between the substrate holder and the calibration element X-reference surface. Preferably, the at least two X-sensors are arranged at a predetermined distance in Y-direction, a shift, from each other. The at least two X-sensors are positioned at a same height level in Z-direction. Advantageously, the arrangement of the substrate holder including the at least two X-25 sensors can be used in a holder calibration method according to the invention as described hereafter. In particular, the at least two X-sensors can be used to provide a more accurate positioning of the substrate holder in X-direction. Advantageously, after homing the substrate holder to the imaginary plane to a home position, the home position of the substrate holder can be maintained more accurately during a travel of the substrate 30 positioning stage. Additionally, a more accurate rotational positioning about an upwards axis Rz can be obtained.
In an embodiment of the inkjet system according to the invention, the inkjet system comprises a Z-calibration element including a calibration element Z-reference surface. The calibration element reference surface extends in the printing direction, the Y-direction, in 35 parallel with a plane oriented in the X- and Y-axis. The substrate holder comprises at least two sensors, also called Z-sensors, for measuring a relative distance in Z-direction in between the substrate holder and the calibration element Z-reference surface. The at least -6- two Z-sensors are arranged at a predetermined distance in Y-direction, a shift, from each other. The at least two Z-sensors are preferably positioned at a same lateral level in Z-direction. Advantageously, the arrangement of the substrate holder including the at least two sensors can be used in a holder calibration method according to the invention as described 5 hereafter. In particular, the at least two Z-sensors can be used to provide a more accurate positioning of the substrate holder in Z-direction. In particular, the at least two Z-sensors can further be used to provide a more accurate rotational positioning about a lateral axis Rx.
In a further embodiment of the inkjet system according to the invention, the inkjet system comprises a Z-calibration element including a calibration element Z-reference 10 surface. The calibration element reference surface extends in the printing direction, the Y-direction, in parallel with a plane oriented in the X- and Y-axis. The substrate holder comprises at least a third sensor, also called a Z3-sensor, for measuring a relative distance in Z-direction in between the substrate holder and the calibration element Z-reference surface. The at least third Z3-sensor is arranged at a predetermined distance in X-direction, 15 a shift, from the at least one other Z-sensor. Advantageously, the arrangement of the substrate holder including the at least three sensors can be used in a holder calibration method according to the invention as described hereafter. In particular, the at least three Z-sensors can be used to provide a more accurate positioning of the substrate holder in Z-direction and a more accurate rotational positioning about a longitudinal axis Ry.
20 In an embodiment of the inkjet system according to the invention, the X-calibration element and Z-calibration element are incorporated into one XZ-calibration element. In stead of two separate calibration elements, the XZ-calibration element advantageously provides one component which has a higher functionality.
In an embodiment of the inkjet system according to the invention, the inkjet system 25 comprises a marking unit for marking a substrate by applying at least two fiducial members in a substrate reference surface. In particular, the substrate reference surface is a top surface of the substrate. Further, the inkjet system comprises a scanning unit for scanning a reference surface of a substrate to determine a position of a fiducial member. Preferably, the metrology frame supports the scanning unit for scanning a substrate. In particular, the 30 scanning unit is arranged to determine a position of the at least two fiducial members in a substrate reference surface of a substrate with respect to an scanning reference axis. The scanning reference axis has a predetermined orientation in the X-Y plane, e.g. in the X-direction or Y-direction.
In an exemplary embodiment of the inkjet system according to the invention, the 35 scanning reference axis extends in parallel with the X-axis of the inkjet system. The scanning unit outputs a scanned position of the at least two fiducial members. The scanned position includes a first coordinate in X-direction and a second coordinate in Y-direction. The -7- control electronics of the inkjet system are configured to determine from the at least two scanned positions a deviation in an initial position of the substrate in a rotational direction about the Z-axis, Rz. The deviation can be compensated by a rotational movement of the substrate holder to bring the substrate in a print position. In the print position, the substrate 5 is ready to be printed. Further, the control electronics are configured to store a X-calibration value and/or an Y-calibration value to establish respectively a X-position and/or Y-position of the substrate in the print position.
In an embodiment of the inkjet system according to the invention, the inkjet system comprises control electronics which comprises software which is configured to carry out a 10 method for calibrating the substrate holder with respect to the virtual plane as described hereafter. A method for calibrating the substrate holder with respect to the virtual plane is carried out in the inkjet system.
In an embodiment of the inkjet system according to the invention, the inkjet system is a printed circuit board inkjet system, a so called PCB inkjet system. The inkjet system is 15 designed for printing substrates which are suitable to be used as printed circuit boards. The inkjet system is designed for producing printed circuit boards.
Further, the invention relates to a method for calibrating the substrate holder with respect to the virtual plane. The method is also called a holder calibration method. The 20 method comprises at least one step to calibrate at least one degree of freedom of the substrate holder with respect to the virtual plane.
Preferably, a substrate is held by the substrate holder during the holder calibration method. The holder calibration method may be performed for each individual substrate as a preparing step before starting a printing operation in which ink droplets are deposited onto 25 the substrate. The top surface of the held substrate may be used as a substrate reference surface. Advantageously, this may directly result in a compensation for varying thickness of substrates which increases the accuracy of the printing process.
In an embodiment of the method a step of the holder calibration method is performed, wherein the substrate holder is aligned with the print head holder. The substrate 30 holder is aligned to the print head holder by positioning the substrate holder, in particular the substrate reference surface of a held substrate, at at least three spaced points at a constant distance in Z-direction to the virtual plane of the print head holder. This step of aligning may also be called homing of the substrate holder. The substrate holder may be homed to the virtual plane at an individual Y-position of the substrate positioning stage. After homing the 35 substrate holder, the substrate holder can be moved by the substrate positioning stage along the long stroke in which the holder positioning device is controlled to compensate for deviations caused by the substrate positioning device to maintain the substrate holder -8- positioned in the virtual plane. The introduced deviations by the substrate positioning stage can be calibrated and defined by calibration values which are used to control the substrate holder.
In particular, the constant distance in Z-direction to the virtual plane of the print head 5 holder is zero. In an embodiment, the substrate holder is aligned by mechanically contacting the substrate holder to the print head holder. Preferably, the substrate holder contacts the print head holder via the held substrate on top of the substrate holder. The substrate holder may be moved in upwards direction until the substrate holder abuts to the print head holder. The substrate holder is moved in upwards direction until the print head holder blocks a 10 further movement. The substrate holder may be contacted with the three reference marks of the print head holder. The substrate holder may be contacted with the reference surface of the print head holder to align the substrate holder with the print head holder and so to align the substrate holder with the virtual plane. After carrying out this step of the holder calibration method, the substrate holder is positioned in Z-direction and in a rotational 15 direction about the X-axis Rx and about the Y-axis Ry. The positioning of the substrate holder is read out as a function of an Y-position and stored as a calibration value. The calibration value is determined by storing position values of the holder actuators, in particular three vertically oriented holder actuators, as a function of an Y-positioning value of the substrate positioning stage.
20 In an embodiment of the holder calibration method, the substrate holder may be contacted to the print head holder at a plurality of y-positions of the substrate positioning stage to calibrate the substrate holder at a range of the travel in the printing direction.
In an embodiment of the holder calibration method, another step of the holder calibration method is carried out, wherein the substrate holder is calibrated in a rotational 25 direction about the Z-axis, Rz. In a preparing step a substrate is provided with at least two fiducial members in the substrate reference surface. In particular, the fiducial member is represented by a cross circumvented by at least one ring. A marking unit may be used to apply the at least two fiducial points to the substrate. In the holder calibration method, the substrate including the at least two fiducial members is held by the substrate holder. The 30 inkjet system comprises a scanning unit for scanning a substrate. The scanning unit is mounted to the metrology frame. The scanning unit is arranged in an upper region of the inkjet system at a position above the substrate holder, such that the top surface of the substrate can be scanned. The scanning unit is arranged to determine a position of the at least two fiducial members with respect to a scanning reference axis. In particular, the 35 scanning reference axis extends in parallel with the X-axis of the inkjet system. The scanning unit outputs a scanned position of the at least two fiducial members. The scanned position includes a first coordinate in X-direction and a second coordinate in Y-direction. The -9- control electronics of the inkjet system are configured to determine from the at least two scanned positions a deviation in position of the substrate in a rotational direction about the Z-axis, Rz. The deviation can be compensated by a rotational movement of the substrate holder. Further, the control electronics may be configured to store a X-calibration value to 5 establish an X-position of the substrate. Additionally, the control electronics may be configured to store a X-calibration value to establish an X-position of the substrate.
During a travel of the substrate positioning stage, a travel deviation in at least one direction occurs from a desired straight path of a substrate. In an embodiment of the holder calibration method according to the invention, the inkjet system may be provided with a 10 calibration element, in particular an elongated calibration element, more in particular a calibration strip to compensate for a travel deviation in X-direction, a so called X-deviation or Z-direction, a so called Z-deviation. The calibration strip extends in the printing direction, the Y-direction. The calibration strip reference is positioned in parallel with a plane oriented in the Z- and Y-axis for measuring a deviation in X-direction or with a plane oriented in the X-15 and Y-axis for measuring deviations in Z-direction.
In an embodiment of the holder calibration method according to the invention, the substrate positioning stage travels along the calibration strip. In particular, the calibration strip has at least one calibration strip reference surface which has a relative too low flatness of about 100pm about a stroke of about 1,5metre. This flatness is too low, because the 20 substrate needs to be positioned in X-direction with an accuracy of at most 25pm, in particular at most 10pm, but preferably at most 5pm.
In an embodiment, the substrate holder comprises at least two sensors for measuring a relative distance in X-direction in between the substrate holder and the calibration strip reference surface. Preferably, the sensors have a high accuracy of at least 1pm, in 25 particular at least 0.5pm, but preferably at least 0.1pm.
At least one sensor is necessary to measure a main deviation in X-direction which occurs when the substrate positioning stage travels along the long stroke. The measured X-deviation is compensated by a movement of the substrate holder in an opposite X-direction.
At least two sensors are necessary to compensate for the relative low flatness of the 30 calibration strip. The at least two sensors are spaced apart from each other in Y-direction about a predetermined distance 'S'. The at least two sensors measure both a relative distance in X-direction as a function of a position along the Y-axis of the substrate positioning stage. Hence, a first sensor measures a first relative distance X1 at a certain Y-position and a second sensor measure a second relative distance X2 at the same Y-position 35 of the substrate positioning stage. The measurement of relative distances can be performed about the whole travel distance of the substrate positioning stage to output a set of X1 values and a set of X2-values as a function of an Y-position. The distance 'S' in between the - 10-
first and second sensor is known which implicates a shift in Y-direction of the measured X1 and X2 values. By comparing the two sets of measured values X1 and X2 at a first and second Y-position which correspond to the shift at a distance 'S', the flatness of the calibration strip can be determined. The comparison of the two sets of measured values X1 5 and X2 can be made by a subtraction of the values X1 and X2 for a corresponding Y
positions. Subsequently, the flatness of the calibration strip can be taken into account during a controlled movement of the substrate positioning stage. The flatness of the calibration strip and the main X-deviation can be compensated in a feed forward control by the control electronics.
10 In an analoguous embodiment, the substrate holder comprises at least two sensors for measuring a relative distance in Z-direction in between the substrate holder and the calibration strip reference surface. Preferably, the sensors have a high accuracy of at least 1pm, in particular at least 0.5 pm, but preferably at least 0.1 pm.
At least one sensor is necessary to measure a main deviation in Z-direction which 15 occurs when the substrate positioning stage travels along the long stroke. The measured Z-deviation is compensated by a movement of the substrate holder in an opposite Z-direction.
At least two sensors are necessary to compensate for the relative low flatness of the calibration strip. The at least two sensors are spaced apart from each other in Y-direction about a predetermined distance 'S'. The at least two sensors measure both a relative 20 distance in X-direction as a function of a position along the Y-axis of the substrate
positioning stage. Hence, a first sensor measures a first relative distance Z1 at a certain Y-position and a second sensor measure a second relative distance Z2 at the same Y-position of the substrate positioning stage. The measurement of relative distances can be performed about the whole travel distance of the substrate positioning stage to output a set of Z1 25 values and a set of Z2-values as a function of an Y-position. The distance'S' in between the first and second sensor is known which implicates a shift in Y-direction of the measured Z1 and Z2 values. By comparing the two sets of measured values Z1 and Z2 at a first and second Y-position which correspond to the shift at a distance 'S', the flatness of the calibration strip can be determined. The comparison of the two sets of measured values Z1 30 and Z2 can be made by a subtraction of the values Z1 and Z2 for a corresponding Y
positions. Subsequently, the flatness of the calibration strip can be taken into account during a controlled movement of the substrate positioning stage. The flatness of the calibration strip and the main Z-deviation can be compensated in a feed forward control by the control electronics.
35 Further, the invention relates to a method of controlling a position of a substrate holder after carrying out a step of the holder calibration method.
Further, embodiments are defined in the subclaims.
-11 -
The invention will be explained in more detail with reference to the appended drawings. The drawings show a practical embodiment according to the invention, which may not be interpreted as limiting the scope of the invention. Specific features may also be considered apart from the shown embodiment and may be taken into account in a broader 5 context as a delimiting feature, not only for the shown embodiment but as a common feature for all embodiments falling within the scope of the appended claims, in which:
Fig. 1 shows in a schematic view an inkjet system according to the invention;
Fig. 2 shows in a cross-sectional view the inkjet system of Fig. 1; 10 Fig. 3 shows a printhead assembly in a schematic view in detail, which print head assembly is spaced from a substrate on a substrate holder in a vertical direction;
Fig. 4 shows in a schematic view a step of a calibration method to deliberate a substrate holder in a lateral direction.
15 Fig. 1 depicts an inkjet system according to an embodiment of the invention. Fig. 1 depicts an inkjet system IS according to an embodiment of the invention for depositing material in a desired ink pattern on a substrate S by jetting liquid droplets of the material towards the substrate. The material is in particular ink. The ink pattern has to be produced according to a pattern layout. The pattern layout is e.g uploaded to the inkjet system as a 20 bitmap. The inkjet system is preferably a drop-on-demand inkjet system in which a droplet is only jetted when required. This is in contrast to continuous inkjet systems in which droplets are continuously jetted at a predetermined frequency and wherein droplets required to form the pattern are directed towards the substrate and the remaining droplets are captured and thus prevented from reaching the substrate.
25 The inkjet system of Fig. 1 is an industrial inkjet system, in particular an IC inkjet system, for instance an inkjet system used to deposit resist material as a mask layer on a printed circuit board PCB as an alternative to the more traditional process of providing a mask layer using lithography. Because the mask layer can be deposited directly by the inkjet system, the amount of process steps can be reduced dramatically and thus the time for PCB 30 manufacturing. However, such an application requires a high droplet placement accuracy and a high reliability (every droplet counts).
As depicted in Fig. 1, an orthogonal system including an X, Y and Z-axis can be projected onto the inkjet system. The Y-axis is a longitudinal axis. The Y-axis may be defined as a direction extending in a printing direction. The printing direction of the inkjet 35 system is defined as a direction of movement of a substrate when passing a print head assembly to print a swath onto the substrate. The printing direction corresponds with a travel - 12- of the substrate positioning stage. The travel of the substrate positioning stage corresponds with a largest stroke of the substrate with respect to the printing assembly.
The X-axis may be defined as a direction perpendicular to the Y-axis. The X-axis extends in a direction transversal the printing direction. The X-axis is a lateral axis. The X-5 axis and Y-axis define a substantially horizontal plane in the inkjet system.
The Z-axis may be defined as a direction perpendicular to the X- and Y-axis. The Z-axis extends in upwards direction. The Z-axis is an up-down axis. The Z-axis extends in a substantially vertical direction.
A rotational direction about the X-axis Rx, a pitch motion, may be defined as a rotation of the 10 substrate about the lateral axis.
A rotational direction about the Y-axis Ry, a roll motion, may be defined as a rotation of the substrate about a longitudinal axis. The longitudinal axis extends from a front to a back of the substrate.
A rotational direction about the Z-axis Rz, a yaw motion, may be defined as a rotation of the 15 substrate about the up-down axis.
To provide a high accuracy inkjet system, the inkjet system IS comprises a force frame FF which supports a metrology frame MF from the ground GR. Between the force frame FF and the metrology frame MF a vibration isolation system VIS is provided to support the metrology frame MF from the force frame FF while isolating the metrology frame MF 20 from vibrations in the force frame FF. As a result, a relatively steady and quiet printing environment can be created on the metrology frame which is advantageous for accuracy.
The inkjet system further comprises a print head holder H. Here, the print head holder H is stationary mounted in the inkjet system. The print head holder H is fixedly connected to the metrology frame MF. The print head holder H has a shape of a beam. The 25 print head holder extends in an X-direction. The print head holder holds a print head assembly which comprises at least one print head PH. The print heads PH each comprise one or more, typically dozens of, nozzles from which droplets can be ejected towards the substrate S. The print head assembly defines a printing range in the X-direction in which droplets can be placed during a forward or backward swath.
30 Further, the inkjet system comprises a substrate holder SH to hold a substrate S.
The substrate holder SH is moveable relative to the print head PH in a printing direction PD parallel to the Y-direction in order to let a substrate S pass below the print head assembly. In this application a distinction is made between passing the print head assembly while moving from left to right in Fig. 1, i.e. moving the substrate holder in the positive Y-direction, and 35 passing the print head assembly while moving from right to left, i.e. moving the substrate holder in the negative Y-direction. The right to left movement will be referred to as a forwards swath and the left to right movement will be referred to as a backward swath.
- 13-
In order to be able to cover an entire top surface TS of the substrate S, many configurations of the print head assembly are possible.
In a first configuration, the printing range in the X-direction is at least as large as the largest possible dimension in X-direction of a substrate S that can be held by the substrate holder 5 SH. In that case, a single swath of the substrate holder SH may suffice to cover the entire top surface with droplets.
The print head of the print head assembly may comprise an array of print head nozzles which are equally spaced form each other in X-direction. A pitch between neighbouring nozzles may e.g. be about 100pm. However, a pattern layout for an ink pattern 10 may include tracks which are spaced at a distance smaller than the pitch in between the neighbouring nozzles. In such a case, the print head holder may move relative to a substrate in a direction transversal, in particular perpendicular, the printing direction, i.e. the X-axis, to allow a deposition of droplets at a region positioned in between the neighbouring nozzles. Hence, in this situation multiple passes of the substrate are necessary to comply to the 15 design requirements of the pattern layout. Preferably, the relative movement of the printhead with respect of the substrate is obtained by moving the substrate in X-direction.
In a second configuration, the printing range in X-direction is smaller than the largest possible dimension in X-direction of a substrate S that can be held by the substrate holder SH. In that case, multiple parallel swaths are necessary to cover the entire top surface TS of 20 the substrate S. To allow multiple parallel swaths, the print head assembly and/or the substrate holder SH is moveable in the X-direction perpendicular to the printing direction PD.
In this embodiment, the print head assembly has a printing range in X-direction at least as large as the largest possible dimension in X-direction of a substrate the substrate holder SH can handle. The print head assembly is mounted stationary with respect to the 25 metrology frame MF.
In the embodiment of Fig. 1, which is further illustrated in Fig. 2, the substrate holder SH is supported by a substrate positioning stage PS. The substrate positioning stage PS is supported by the metrology frame MF. The substrate positioning stage PS is supported by the metrology frame such that it is moveable in the printing direction PD, thereby allowing to 30 position the substrate holder SH and thus the substrate S in the Y-direction. Positioning of the substrate positioning stage is done using a stage positioning device SD. The stage positioning device comprises a stage guidance, a stage position measuring system and a stage actuator.
The stage guidance is a linear guidance. The stage guidance comprises a pair of bar 35 elements to support and guide the substrate positioning stage. The substrate positioning stage is beared to the stage guidance by ball bearings. The stage guidance is connected to - 14- the metrology frame MF. Herewith, vibrations from the ground do not disturb a linear guidance of the substrate positioning stage.
The stage position measuring system comprises a linear encoder. The linear encoder includes an elongated ruler which extends in Y-direction which is mounted to the metrology 5 frame and an optical reader which is mounted to the substrate positioning stage. In operation, the substrate positioning stage passes along the ruler to obtain an Y-position of the substrate positioning stage. Preferably, the stage position measuring system comprises two linear encoders. Two linear encoders allow a more precise method for positioning the substrate positioning stage.
10 The stage actuator comprises a belt and a driving member. The substrate positioning stage is connected to the driving element by the belt. The driving element is mounted to the force frame FF. The driving element may include a gearwheel and a motor. Herewith, driving forces F are applied between the substrate positioning stage PS and the force frame FF. As a result, the driving forces F do not introduce disturbances to the metrology frame MF, but 15 are transmitted to the ground GR via the force frame, which results in a higher obtainable accuracy of the inkjet system.
Control electronics are provided to control the position and speed of the substrate positioning stage. A constant speed of the substrate positioning stage may be preferred, because of a resulting constant frequency of jetted droplets.
20 Between the substrate positioning stage PS and the substrate holder SH, a holder positioning device HD is provided in order to position the substrate holder SH in at least one degree of freedom. Preferably, at least one degree of freedom is determined, which at least one degree is a translation in the printing direction PD, the Y-direction, relative to the substrate positioning stage PS. Using this configuration, the stage positioning device SD can 25 be used for coarse positioning the substrate holder SH in the printing direction while the holder positioning device HD can be used for fine positioning of the substrate holder in the printing direction relative to the print head assembly. If required, the holder positioning device HD may also be used for fine positioning of the substrate holder in other directions as well, e.g. the X-direction and/or the Z-direction, and may even fine position the substrate 30 holder in rotational directions such as Rx, Ry and Rz as well.
The holder positioning device HD comprises at least one holder actuator and at least one holder position measurement system.
In the embodiment of Fig. 2, the substrate holder SH is connected to the substrate positioning stage PS by the holder positioning device HD, wherein all six degrees of freedom 35 are determined by the holder positioning device HD. The holder positioning device is arranged to position the substrate holder SH with respect to the substrate positioning stage in all six possible degrees of freedom.
- 15-
In particular, the holder actuator is a voice coil actuator. The holder position measurement system may be incorporated in the holder actuator. The voice coil actuator may include an encoder to measure a position, in particular a translation, of a movable voice coil actuator body. The voice coil actuator body may be movable about a stroke of at least 5 2mm, in particular at least 4mm, more in particular at least 6mm. The holder actuator has a holder actuator base which is connected to the substrate positioning stage and a holder actuator body which is connected to the substrate holder. The holder actuator body is movable with respect to the holder actuator base. In particular, the holder actuator body has a body member which limits only one degree of freedom of available directions of 10 movements. In particular, the body member has an elongated portion. In particular the body member is antenna shaped. The body member allows a movement of five degrees of freedom, but resists a movement, more precisely said a translation, in a direction parallel to the elongated portion.
The holder positioning device HD comprises six separate holder actuators in which 15 each holder actuator limits one degree of freedom in translation. Two paired holder actuators limit together a rotational degree of freedom in movement.
The holder positioning device HD comprises three holder actuators which are arranged in an upwards orientation to limit a translation in upwards, substantially vertical, direction. Each actuator holder has an antenna shaped body member which extends in 20 upwards direction. Further, the holder positioning device HD comprises three holder actuators which are arranged in a substantially horizontal orientation. The holder actuators are spaced apart from each other and are positioned on top of the substrate positioning stage. In particular, the holder actuators are positioned in a substantially horizontal plane. The actuator holders are connected to an underside of the substrate holder SH. The three 25 upwards oriented holder actuators limit three degrees of freedom by limiting a translation in Z-direction, a rotation about the X-axis, and a rotation about the Y-axis. The three sidewards oriented holder actuators limit three degrees of freedom by limiting a translation in X- and Y direction and a rotation about the Z-axis.
As shown in Fig. 2, a cross section about the X-axis of the substrate holder is LI-30 shaped, wherein the U-shape is oriented upside down. The U-shaped substrate holder has a U-base and downwardly extending U-legs. The six holder actuators are arranged in between the U-legs. Three vertically oriented holder actuators are connected to the U-base. Two horizontally oriented holder actuators are connected to a first U-leg and one horizontally oriented holder actuator is connected a second U-leg opposite the first U-leg.
To obtain an accurate printing process, it is a prerequisite that a top surface of a substrate travels during a printing operation at a constant distance from a group of nozzles of print 35 - 16- heads. Considered in Z-direction, the group of nozzles are positioned in a common plane which defines a virtual plane. The virtual plane is defined in parallel with the common plane. During a printing operation, the top surface of the substrate has to move in parallel to this virtual plane to maintain the constant distance of the nozzles to the top surface of the 5 substrate.
As shown in Fig. 3, the print heads PH are held in the print head holder H, such that the nozzles are positioned in parallel with the virtual plane. The print head holder H has at least three reference marks Z1,Z2,Z3 in Z-direction which define an imaginary plane in parallel with the virtual plane. In particular, the print head holder H may have a flat reference 10 surface which includes the three reference marks, wherein the flat reference surface is in parallel with the virtual plane.
The substrate S is positioned at the substrate holder SH. A travel of the substrate in the virtual plane is obtained by moving the substrate holder SH in parallel with the virtual plane. In operation, the holder positioning device HD is controlled such that the substrate holder SH 15 maintains positioned in parallel with the virtual plane during a travel. This in spite of deviations caused by e.g the substrate positioning stage PS. The substrate positioning stage travels about a long stroke of at least 1 metre, in particular about at least 1.5metres, in the printing direction, wherein deviations may occur from the ideal path. The deviations are e.g. introduced by non-straightness of the stage guidance. The holder positioning device HD 20 compensates for the deviations introduced by the substrate positioning stage during a travel. The holder positioning device HD is programmed to control the substrate holder SH in parallel with the virtual plane.
Fig. 2 further shows a scanning unit SU for scanning a substrate. The scanning unit is mounted on the metrology frame MF. A top surface of the substrate, which serves as a 25 reference surface, is scanned by the scanning unit. The reference surface of the substrate is provided with at least one fiducial member. In particular, the reference surface of the substrate is provided with two fiducial members. A position of the fiducial members in the X-Y plane is determined by the scanning unit SU. By scanning at least two positions, a rotational deviation of the substrate S with respect to the Z-axis is determined. After 30 determining the rotational deviation, the substrate S is rotated about the Z-axis by controlling the substrate holder SH to compensate for the rotational deviation.
Fig. 4 illustrates another step of the calibration method according to the invention.
Fig. 4 shows in a schematic view a substrate holder SH which is guided by the substrate positioning stage PS.
35 A travel of the substrate positioning stage PS introduces deviations from an ideal straight path in X-direction. The substrate holder SH comprises a holder position measuring system. The holder position measuring system comprises at least one sensor directed in X- - 17- direction, so called X-sensor and a X-calibration element. The X-calibration element is beam shaped and extends in Y-direction. The calibration element is arranged in parallel with a substrate positioning stage guidance PSg. The calibration element has a flat surface, which serves as a X-reference surface. The X-reference surface of the calibration element has a 5 flatness of about 100pm. In particular, the holder position measuring system comprises at least two sensors which are directed in X-direction. The at least two X-sensors are configured to measure a distance in between the substrate holder and the X-reference surface of the calibration element. The at least two X-sensors are spaced from each other in Y-direction at a predetermined shift'S'. The at least two X-sensors are arranged at 10 substantially the same height level at the substrate holder, such that the sensors measure a distance from the substrate holder to the reference surface of the calibration element along a same sensor path P.
In the first place, the measurement of the sensors determine a X-deviation in X-direction of the substrate positioning stage with respect to the calibration element. In the 15 second place, the measurement of the at least two X-sensors at the predetermined shift'S' can be used to determine the flatness of the reference surface of the calibration element as a function of the Y-position of the substrate positioning stage. A first X-sensor measures a first relative distance X1 at a certain Y-position and a second X-sensor measures a second relative distance X2 at the same Y-position of the substrate positioning stage PS. The 20 measurements of relative distances can be performed about the whole travel distance of the substrate positioning stage to output a set of X1 values and a set of X2 values as a function of an Y-position. The distance 'S' in between the first and second sensor is known which implicates a shift in Y-direction of the measured X1 and X2 values. By comparing two sets of measurement values X1 and X2 at a first and second Y-position along the longitudinal axis 25 which corresponds to the shift at a distant'S', the flatness of the calibration element can be determined. Subsequently, the flatness of the calibration element can be taken into account during a controlled movement of the substrate positioning stage. The flatness of the calibration element can be compensated together with the X-deviation in a feed forward control by the control electronics. The measured values for deviations in X-direction, so 30 called X-deviations, along a travel of the substrate positioning stage in Y-direction can be stored in a memory of the control electronics. The X-deviations can be stored in a table. The holder positioning device is configured to compensate an X-deviation as a function of a position of the substrate positioning stage. During a printing operation, the stored X-deviations as a function of a position of the substrate positioning stage along the longitudinal 35 axis can be used to move the substrate holder in an opposite X-direction to nullify the X-deviation.
- 18-
Analogous to the compensation in X-direction for X-deviations, a compensation in Z-direction can be carried out for Z-deviations. A travel of the substrate positioning stage PS introduces deviations from an ideal straight path in Z-direction. The substrate holder SH comprises a holder position measuring system. The holder position measuring system 5 comprises at least one sensor directed in Z-direction, a so called Z-sensor and a Z- calibration element. The Z-calibration element is beam shaped and extends in Y-direction. The Z-calibration element is arranged in parallel with a substrate positioning stage guidance PSg. The Z-calibration element has a flat surface, which serves as a reference surface. In particular, the same X-calibration element, a XZ-calibration element, which is used to 10 measure X-deviations can also be used to measure Z-deviations. The XZ-calibration element may comprises a first reference surface, a X-reference surface, to measure X-deviations and a second reference surface, Z-reference surface, to measure Z-deviations. The Z-reference surface of the calibration element has a flatness of about 100pm. In particular, the holder position measuring system comprises at least two Z-sensors which are 15 directed in Z-direction. The at least two Z-sensors are configured to measure a distance in between the substrate holder and the Z-reference surface of the calibration element. The at least two Z-sensors are spaced from each other in Y-direction at a predetermined shift'S'. The at least two Z-sensors are arranged at substantially the same position along the lateral axis at the substrate holder, such that the Z-sensors measure a distance from the substrate 20 holder to the reference surface of the calibration element along a same sensor path P.
In the first place, the measurement of the Z-sensors determine a Z-deviation in Z-direction of the substrate positioning stage with respect to the calibration element. In the second place, the measurement of the at least two Z-sensors at the predetermined shift'S' can be used to determine the flatness of the reference surface of the Z-calibration element 25 as a function of the Y-position of the substrate positioning stage. A first Z-sensor measures a first relative distance Z1 at a certain Y-position and a second sensor measures a second relative distance Z2 at the same Y-position of the substrate positioning stage PS. The measurements of relative distances can be performed about the whole travel distance of the substrate positioning stage to output a set of Z1 values and a set of Z2 values as a function 30 of an Y-position. The distance 'S' in between the first and second Z-sensor is known which implicates a shift in Y-direction of the measured Z1 and Z2 values. By comparing two sets of measurement values Z1 and Z2 at a first and second Y-position along the longitudinal axis which corresponds to the shift at a distant'S', the flatness of the Z-calibration element can be determined. Subsequently, the flatness of the Z-calibration element can be taken into 35 account during a controlled movement of the substrate positioning stage. The flatness of the calibration element can be compensated together with the Z-deviation in a feed forward control by the control electronics. The measured values for deviations in Z-direction, so - 19- called Z-deviations, along a travel of the substrate positioning stage in Y-direction can be stored in a memory of the control electronics. The Z-deviations can be stored in a table. The travel of the substrate positioning device is reproductive. The holder positioning device is configured to compensate an Z-deviation as a function of a position of the substrate 5 positioning stage. During a printing operation, the stored Z-deviations as a function of a position of the substrate positioning stage along the longitudinal axis can be used to move the substrate holder in an opposite Z-direction to nullify the Z-deviation.
In a further embodiment of the inkjet system according to the invention, the substrate holder comprises at least a third sensor, also called a Z3-sensor, for measuring a relative 10 distance in Z-direction in between the substrate holder and the calibration element Z- reference surface. The at least third Z3-sensor is arranged at a predetermined distance in X-direction, a shift, from the at least one other Z-sensor. In particular, the at least three Z-sensors can be used to provide a more accurate positioning of the substrate holder in Z-direction and a more accurate rotational positioning about a longitudinal axis Ry. Although 15 the invention has been disclosed with reference to particular embodiments, from reading this description those of skilled in the art may appreciate a change or modification that may be possible from a technical point of view but which do not depart from the scope of the invention as described above and claimed hereafter. Modifications may be made to adapt a particular situation or material to the teachings of the invention without departing from the 20 essential scope thereof. It will be understood by those of skilled in the art that various changes may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. Therefore, it is intended that the invention is not limited to the particular embodiments disclosed in the above detailed description, but that the invention will include all embodiments falling within the scope of the appended claims.
25

Claims (22)

1. Inkjet systeem IS voor het printen van een inktpatroon op een substraat omvattende: - een substraathouder voor het houden van een substraat; - een substraat positioneerslede PS voor het positioneren van de substraathouder in een print richting, waarbij de substraathouder afgesteund door de substraat positioneerslede, 5 waarbij de substraat positioneerslede PS beweegbaar is door een slede positioneer inrichting; - een printkophouder voor het houden van een printkop samenstel welke ten minste een printkop voor het uitspuiten van inkt vanuit een spuitmond naar het substraat omvat; waarbij het inkjet systeem verder een houder positioneerinrichting H D omvat voor het 10 positioneren van de substraathouder in ten minste één graad van vrijheid ten opzichte van de substraat positioneerslede.An inkjet system IS for printing an ink cartridge on a substrate comprising: - a substrate holder for holding a substrate; - a substrate positioning slide PS for positioning the substrate holder in a printing direction, wherein the substrate holder is supported by the substrate positioning slide, wherein the substrate positioning slide PS is movable by a slide positioning device; - a printhead holder for holding a printhead assembly which comprises at least one printhead for ejecting ink from a nozzle to the substrate; wherein the inkjet system further comprises a holder positioning device H D for positioning the substrate holder in at least one degree of freedom with respect to the substrate positioning carriage. 2. Inkjet systeem volgens conclusie 1, waarbij de ten minste ene graad van vrijheid gericht is in de print richting. 15The inkjet system of claim 1, wherein the at least one degree of freedom is directed in the print direction. 15 3. Inkjet systeem volgens conclusie 1, waarbij de houder positioneer inrichting HD de substraathouder SH in ten minste drie graden van vrijheid positioneert, waarbij de substraathouder SH in opwaartse richting (Z-richting), in een rotatierichting Ry over een longitudinale as (Y- as) en een rotatierichting Rx over een laterale as (X-as) is 20 gepositioneerd.The inkjet system according to claim 1, wherein the holder positioning device HD positions the substrate holder SH in at least three degrees of freedom, the substrate holder SH in upward direction (Z direction), in a rotation direction Ry along a longitudinal axis (Y- axis) and a direction of rotation Rx over a lateral axis (X axis) is positioned. 4. Inkjet systeem volgens conclusie 1, waarbij de houder positioneer inrichting HD de substraathouder in alle graden van vrijheid positioneert (X, Y, Z, Rx, Ry, Rz) ten opzichte van de substraat positioneerslede. 25The inkjet system of claim 1, wherein the holder positioning device HD positions the substrate holder in all degrees of freedom (X, Y, Z, Rx, Ry, Rz) relative to the substrate positioning carriage. 25 5 Y- richting, uitstrekt parallel aan een vlak georiënteerd in de Z- en Y-as, waarbij de substraathouder ten minste twee X-sensoren omvat voor het meten van een relatieve afstand in X-richting tussen de substraathouder en het calibratie element X-referentie oppervlak, waarbij de ten minste twee X-sensoren op een afstand in een Y-richting van elkaar over een vooraf bepaalde verschuiving 'S' zijn gepositioneerd, het uitvoeren van een 10 meting door het meten van een relatieve afstand in X-richting als een functie van een positie langs de Y-as van de substraat positioneerslede over ten minste een gedeelte van een slag van de substraat positioneerslede om een set van X1 -waarden en een set van X2-waarden als een functie van een Y-positie te genereren, het uitvoeren van een berekening waarbij de vooraf bepaalde verschuiving 'S' tussen de eerste en tweede sensor gebruikt wordt om de 15 twee sets van gemeten waarden X1 en X2 waarden op respectievelijk een eerste en tweede Y-positie te vergelijken welke correspondeert met de verschuiving 'S' om een vlakheid van het calibratie element te bepalen om te compenseren gedurende een gecontroleerde beweging van de substraat positioneerslede; - het uitlijnen van de substraathouder door gebruikmaking van een calibratie element, welke 20 een calibratie element Z-referentie oppervlak heeft welke zich in de printrichting, de Y- richting, uitstrekt parallel aan een vlak georiënteerd in de X- en Y-as, waarbij de substraathouder ten minste twee Z-sensoren omvat voor het meten van een relatieve afstand in Z-richting tussen de substraathouder en het calibratie element Z-referentie oppervlak, waarbij de ten minste twee Z-sensoren op een afstand in een Y-richting van 25 elkaar over een vooraf bepaalde verschuiving 'S' zijn gepositioneerd, het uitvoeren van een meting door het meten van een relatieve afstand in Z-richting als een functie van een positie langs de Y-as van de substraat positioneerslede over ten minste een gedeelte van een slag van de substraat positioneerslede om een set van Z1 -waarden en een set van Z2-waarden als een functie van een Y-positie te genereren, het uitvoeren van een berekening waarbij de 30 vooraf bepaalde verschuiving 'S' tussen de eerste en tweede sensor gebruikt wordt om de twee sets van gemeten waarden Z1 en Z2 waarden op respectievelijk een eerste en tweede Y-positie te vergelijken welke correspondeert met de verschuiving 'S' om een vlakheid van het calibratie element te bepalen om te compenseren gedurende een gecontroleerde beweging van de substraat positioneerslede; 35. het uitlijnen van de substraathouder door gebruikmaking van een scaneenheid voor het scannen van een substraat, waarbij de scaneenheid is ingericht voor het bepalen van een rotatie-afwijking, in het bijzonder over de Z-as, van ten minste twee fiducial elementen in een -24- een substraat referentie-oppervlak van een substraat gehouden door de substraathouder ten opzichte van een scanreferentie as welke rotatie afwijking gecompenseerd moet worden door een rotatiebeweging van de substraathouder gedurende een gecontroleerde beweging van de substraat positioneerslede. 55 Y direction, extending parallel to a plane oriented in the Z and Y axis, the substrate holder comprising at least two X sensors for measuring a relative distance in X direction between the substrate holder and the calibration element X reference surface, wherein the at least two X sensors are positioned at a distance in a Y direction from each other over a predetermined shift "S", performing a measurement by measuring a relative distance in the X direction as a function of a position along the Y-axis of the substrate positioning carriage over at least a portion of a stroke of the substrate positioning carriage to generate a set of X1 values and a set of X2 values as a function of a Y position performing a calculation where the predetermined shift "S" between the first and second sensor is used to compare the two sets of measured values X1 and X2 values at a first and second Y position, respectively calibration corresponding to the shift "S" to determine a flatness of the calibration element to compensate during a controlled movement of the substrate positioning slide; - aligning the substrate holder by using a calibration element, which has a calibration element Z-reference surface extending in the printing direction, the Y direction, parallel to a plane oriented in the X and Y axis, wherein the substrate holder comprises at least two Z sensors for measuring a relative distance in Z direction between the substrate holder and the calibration element Z-reference surface, wherein the at least two Z sensors are at a distance in a Y direction of 25 each other over a predetermined shift "S", performing a measurement by measuring a relative distance in Z direction as a function of a position along the Y-axis of the substrate positioning slide over at least a portion of a stroke of the substrate positioning slide to generate a set of Z1 values and a set of Z2 values as a function of a Y position, performing a calculation where the predetermined the shift 'S' between the first and second sensor is used to compare the two sets of measured values Z1 and Z2 values at a first and second Y position, respectively, which corresponds to the shift 'S' around a flatness of the calibration element to determine to compensate during a controlled movement of the substrate positioning carriage; 35. aligning the substrate holder by using a scanning unit for scanning a substrate, the scanning unit being adapted to determine a rotational deviation, in particular along the Z-axis, of at least two fiducial elements in a -24- a substrate reference surface of a substrate held by the substrate holder relative to a scan reference axis, which rotational deviation must be compensated for by a rotational movement of the substrate holder during a controlled movement of the substrate positioning carriage. 5 5. Inkjet systeem volgens een van de voorgaande conclusies, waarbij de houder positioneerinrichting ten minste een houder aktuator omvat waarbij de ten minste ene houder aktuator een graad van vrijheid in translatie (X, Y, Z) positioneert en waarbij twee gepaarde houder aktuatoren samen een graad van rotatiebewegingsvrijheid beperkt (Rx, Ry, Rz).An inkjet system according to any of the preceding claims, wherein the holder positioning device comprises at least one holder actuator wherein the at least one holder actuator positions a degree of freedom in translation (X, Y, Z) and wherein two paired holder actuators together degree of freedom of rotation limited (Rx, Ry, Rz). 6. Inkjet systeem volgens een van de voorgaande conclusies, waarbij de printkophouder H stationair is gemonteerd in het inkjet systeem.An inkjet system according to any of the preceding claims, wherein the printhead holder H is mounted stationary in the inkjet system. 7. Inkjet systeem volgens een van de voorgaande conclusies, waarbij de printkophouder -21 - printkophouder ten minste drie referentie markeringen omvat welke een virtueel vlak definiëren, waarbij het virtueel vlak parallel is aan een imaginair vlak gevormd door een gemeenschappelijke positionering, in het bijzonder een gemeenschappelijk hoogte niveau in een Z-richting, van een groep spuitmonden van de printkop, zodanig dat een 5 substraathouder positioneerbaar is op een constante afstand, in het bijzonder een afstand gelijk aan nul, ten opzichte van de referentiemarkeringen van de printkophouder om te substraathouder uit de lijnen ten opzichte van de printkophouder om de substraathouder uit te lijnen ten opzichte van het virtueel vlak.An inkjet system according to any one of the preceding claims, wherein the printhead holder -21 printhead holder comprises at least three reference markings defining a virtual plane, the virtual plane being parallel to an imaginary plane formed by a common positioning, in particular a common height level in a Z direction, of a group of nozzles of the printhead, such that a substrate holder can be positioned at a constant distance, in particular a distance equal to zero, with respect to the reference marks of the printhead holder for removing the substrate holder the lines relative to the printhead holder to align the substrate holder with respect to the virtual plane. 8. Inkjet systeem volgens conclusie 7, waarbij de houder positioneer inrichting geprogrammeerd is om de substraathouder parallel te houden ten opzichte van het virtueel vlak.The inkjet system according to claim 7, wherein the holder positioning device is programmed to keep the substrate holder parallel to the virtual plane. 9. Inkjet systeem volgens een van de voorgaande conclusies, waarbij het inkjet systeem 15 HS een krachtframe (FF) omvat welke een metrologie frame (MF) steunt, waarbij een vibratie isolatie systeem (VIS) is voorzien tussen het krachtframe (FF) en het metrologie frame (MF) om het metrologie frame (MF) te steunen ten opzichte van het krachtframe (FF) terwijl het metrologie frame (MF) geïsoleerd wordt van trillingen in het krachtframe (FF), waarbij het metrologie frame (MF) de substraat positioneerslede (PS) en de printkop houder steunt.9. An inkjet system according to any one of the preceding claims, wherein the inkjet system HS comprises a force frame (FF) which supports a metrology frame (MF), wherein a vibration isolation system (VIS) is provided between the force frame (FF) and the metrology frame (MF) to support the metrology frame (MF) relative to the power frame (FF) while the metrology frame (MF) is isolated from vibrations in the power frame (FF), the metrology frame (MF) supporting the substrate positioning slide (PS) and the printhead holder. 10. Inkjet systeem volgens conclusie 9, waarbij de slede positioneer inrichting een sledegeleiding, een slede positioneer meetsysteem en een slede aktuator omvat, waarbij de slede geleiding en slede positioneer inrichting gesteund worden door het metrologie frame 25 en waarbij de slede aktuator gesteund wordt door het krachtframe.10. An inkjet system according to claim 9, wherein the carriage positioning device comprises a carriage guide, a carriage positioning measuring system and a carriage actuator, wherein the carriage guide and carriage positioning device are supported by the metrology frame and wherein the carriage actuator is supported by the power frame. 11. Inkjet systeem volgens een van de voorgaande conclusies, waarbij het inkjetsysteem en calibratie element omvat met een calibratie element referentie-oppervlak welke zich in de longitudinale as, de Y-inrichting, parallel aan een vlak georiënteerd in de Z- en Y-as uitstrekt, 30 waarbij de substraathouder ten minste twee sensoren omvat voor het meten van een relatieve afstand in X-richting tussen de substraathouder en het calibratie element referentie-oppervlak.The inkjet system according to any of the preceding claims, wherein the inkjet system comprises a calibration element with a calibration element reference surface located in the longitudinal axis, the Y device, parallel to a plane oriented in the Z and Y axis. wherein the substrate holder comprises at least two sensors for measuring a relative distance in X direction between the substrate holder and the calibration element reference surface. 12. Inkjet systeem volgens een van de voorgaande conclusies, waarbij de inkjet systeem 35 een markeereenheid omvat voor het markeren van een substraat door het aanbrengen van ten minste twee fiducial elementen in een substraat referentie-oppervlak. -22-An inkjet system according to any of the preceding claims, wherein the inkjet system 35 comprises a marking unit for marking a substrate by applying at least two fiducial elements in a substrate reference surface. -22- 13. Inkjet systeem volgens een van de voorgaande conclusies, waarbij het inkjet systeem verder een scaneenheid omvat voor het scannen van een substraat, in het bijzonder voor het scannen van een substraat referentie-oppervlak om de ten minste twee fiducial elementen te detecteren. 5An inkjet system according to any of the preceding claims, wherein the inkjet system further comprises a scanning unit for scanning a substrate, in particular for scanning a substrate reference surface to detect the at least two fiducial elements. 5 14. Inkjet systeem volgens conclusie 13, waarbij de scaneenheid is ingericht om een positie te bepalen van de ten minste twee fiducial elementen in een substraat referentie-oppervlak van een substraat ten opzichte van een scanreferentie as.The inkjet system of claim 13, wherein the scanning unit is arranged to determine a position of the at least two fiducial elements in a substrate reference surface of a substrate relative to a scan reference axis. 15. Inkjet systeem volgens een van de voorgaande conclusies, waarbij het inkjet systeem besturingselectronica omvat welke software omvat welke is ingericht om een werkwijze uit te voeren voor het kalibreren van de substraathouder ten opzichte van het virtueel vlak zoals gedefinieerd in een van de conclusies 16-22.The inkjet system according to any of the preceding claims, wherein the inkjet system comprises control electronics which includes software adapted to perform a method for calibrating the substrate holder relative to the virtual plane as defined in any of claims 16- 22. 16. Werkwijze voor het kalibreren van een substraathouder ten opzichte van een virtueel vlak in een inkjet systeem welke virtueel vlak parallel is aan een imaginair vlak gevormd door een positionering van een groep spuitmonden van een printkop welke gepositioneerd zijn in een gemeenschappelijk vlak, omvattende een stap van het verschaffen van het inkjetysteem omvattende: 20. een substraathouder voor het houden van een substraat; - een substraat positioneerslede PS voor het positioneren van de substraathouder in een print richting, waarbij de substraathouder gesteund is door de substraat positioneerslede, waarbij de substraat positioneerslede PS beweegbaar is door een slede positioneerinrichting; 25. een printkop houder voor het houden van een printkop samenstel welke ten minste een printkop omvat voor het uitspuiten van inkt uit een spuitmond naar het substraat; waarbij het inkjet systeem verder een houder positioneerinrichting HD omvat voor het positioneren van de substraathouder in ten minste een graad van vrijheid ten opzichte van de substraat positioneerslede; 30 waarbij de werkwijze ten minste een van de volgende stappen voor het kalibreren van ten minste een graad van vrijheid (DOF) van de substraathouder ten opzichte van de substraat positioneerslede omvat: - het uitlijnen van de substraathouder ten opzichte van de printkophouder door het positioneren van de substraathouder op een constante afstand ten opzichte van ten minste 35 drie referentie markeringen van de printkophouder, welke een virtueel vlak definiëren, waarbij het virtueel vlak parallel is aan een imaginair vlak gevormd door een -23- gemeenschappelijke positionering, in het bijzonder een gemeenschappelijk hoogteniveau in een Z- inrichting, van een groep spuitmonden van de printkop; - het uitlijnen van de substraathouder door gebruikmaking van een X- calibratie element, welke een calibratie element X- referentie oppervlak heeft welke zich in de printrichting, deA method for calibrating a substrate holder relative to a virtual plane in an inkjet system which virtual plane is parallel to an imaginary plane formed by positioning a group of nozzles of a printhead positioned in a common plane, comprising a step of providing the inkjet system comprising: 20. a substrate holder for holding a substrate; - a substrate positioning slide PS for positioning the substrate holder in a printing direction, wherein the substrate holder is supported by the substrate positioning slide, wherein the substrate positioning slide PS is movable by a slide positioning device; 25. a printhead holder for holding a printhead assembly which comprises at least one printhead for ejecting ink from a nozzle into the substrate; wherein the inkjet system further comprises a holder positioning device HD for positioning the substrate holder in at least a degree of freedom with respect to the substrate positioning carriage; Wherein the method comprises at least one of the following steps for calibrating at least one degree of freedom (DOF) of the substrate holder relative to the substrate positioning carriage: - aligning the substrate holder with respect to the printhead holder by positioning the substrate holder at a constant distance from at least three reference marks of the printhead holder, which define a virtual plane, the virtual plane being parallel to an imaginary plane formed by a common positioning, in particular a common height level in a Z device, a group of nozzles of the printhead; - aligning the substrate holder by using an X-calibration element, which has a calibration element X-reference surface which, in the printing direction, 17. Werkwijze volgens conclusie 16, waarbij een substraat door de substraathouder wordt gehouden gedurende de houder calibratie werkwijze.The method of claim 16, wherein a substrate is held by the substrate holder during the container calibration method. 18. Werkwijze volgens conclusie 16 of 17, waarbij de substraathouder is uitgelijnd door 10 een mechanisch contact tussen de substraathouder en de printkop houder.18. Method according to claim 16 or 17, wherein the substrate holder is aligned by a mechanical contact between the substrate holder and the printhead holder. 19. Werkwijze volgens een van de conclusie 16-18, waarbij de substraathouder is uitgelijnd met het virtueel vlak over een verscheidenheid van y-posities van een substraat positioneerslede om de substraathouder te kalibreren over een gedeelte van de slag in de 15 printrichting.19. A method according to any of claims 16-18, wherein the substrate holder is aligned with the virtual plane over a variety of y positions of a substrate positioning slide to calibrate the substrate holder over a portion of the stroke in the printing direction. 20. Werkwijze volgens een van de conclusies 16-19, waarbij de calibratie werkwijze een voorbereidende stap omvat voor het verschaffen van een substraat met ten minste twee fiducial elementen in een substraat referentie-oppervlak. 20A method according to any of claims 16-19, wherein the calibration method comprises a preparatory step for providing a substrate with at least two fiducial elements in a substrate reference surface. 20 21. Werkwijze volgens een van de conclusies 16- 20, waarbij de werkwijze verder een stap van een gecontroleerde beweging van het inkjet systeem omvat met behulp van besturingselektronica, waarbij de besturingselectronica geprogrammeerd is om te compenseren voor afwijkingen welke gemeten zijn gedurende de stap van calibratie. 25A method according to any of claims 16-20, wherein the method further comprises a step of a controlled movement of the inkjet system using control electronics, wherein the control electronics are programmed to compensate for deviations measured during the calibration step . 25 22. Werkwijze volgens een van de conclusies 16- 21, waarbij een inkjet systeem is verschaft welke een Z-calibratie element omvat met een calibratie element Z-referentie oppervlak, welk calibratie element Z-referentie-oppervlak zich uitstrekt in de printrichting, de Y- richting, en parallel georiënteerd is aan een vlak in de X- en Y-as, waarbij de 30 substraathouder ten minste een derde sensor, een Z3-sensor, omvat voor het meten van een relatieve afstand in Z-richting tussen de substraathouder en het calibratie element Z-referentie oppervlak, waarbij de ten minste derde Z3-sensor is ingericht op een vooraf bepaalde afstand in X-richting, een verschuiving, ten opzichte van de ten minste ene andere Z- sensor, waarbij de werkwijze verder een stap van het meten van een relatieve afstand in 35 Z-richting omvat met gebruikmaking van de ten minste twee Z-sensoren inclusief de Z3-sensor en het bepalen van een rotatie afwijking Ry van de substraathouder over de -25- longitudinale as van het inkjetsysteem, Y-as, ten opzichte van het calibratie element Z-referentie-oppervlak en vervolgens het compenseren van de positie van de substraathouder.A method according to any of claims 16-21, wherein an inkjet system is provided which comprises a Z-calibration element with a calibration element Z-reference surface, which calibration element Z-reference surface extends in the printing direction, the Y - direction, and oriented parallel to a plane in the X and Y axis, wherein the substrate holder comprises at least a third sensor, a Z3 sensor, for measuring a relative distance in Z direction between the substrate holder and the calibration element Z-reference surface, wherein the at least third Z3 sensor is arranged at a predetermined distance in the X direction, a shift, relative to the at least one other Z-sensor, the method further comprising a step of measuring a relative distance in the Z direction using the at least two Z sensors including the Z3 sensor and determining a rotation deviation Ry of the substrate holder along the longitudinal axis of the inkjet system, Y-axis, relative to the calibration element Z-reference surface and then compensating for the position of the substrate holder.
NL2008067A 2012-01-02 2012-01-02 Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method. NL2008067C2 (en)

Priority Applications (25)

Application Number Priority Date Filing Date Title
NL2008067A NL2008067C2 (en) 2012-01-02 2012-01-02 Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method.
ES12821205.7T ES2638597T3 (en) 2012-01-02 2012-12-28 Inkjet system for printing a printed circuit
MYPI2014001972A MY168052A (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
CN201710213912.0A CN106965584B (en) 2012-01-02 2012-12-28 Profile printing
SG11201403776XA SG11201403776XA (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
EP17175965.7A EP3261425A1 (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
KR1020207000005A KR20200004463A (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
KR1020147021662A KR102063516B1 (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
CN201710214554.5A CN106985520B (en) 2012-01-02 2012-12-28 Virtual plane
EP12821205.7A EP2800965B1 (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
US14/370,195 US9363899B2 (en) 2012-01-02 2012-12-28 Inkjet system for printing a printed circuit board
CN201280071043.8A CN104136917B (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
CN201710214103.1A CN106973516B (en) 2012-01-02 2012-12-28 The positioning and transmission of substrate
CA2862582A CA2862582C (en) 2012-01-02 2012-12-28 Inkjet system for printing a printed circuit board
CA3061803A CA3061803A1 (en) 2012-01-02 2012-12-28 Inkjet system for printing a printed circuit board
CN201710213914.XA CN106998628B (en) 2012-01-02 2012-12-28 Stop metering
CN201710213793.9A CN106965554B (en) 2012-01-02 2012-12-28 Ink-jet system
CN201710213913.5A CN106985530B (en) 2012-01-02 2012-12-28 Print head maintenance
PCT/NL2012/050934 WO2013103298A1 (en) 2012-01-02 2012-12-28 Inkjetsystem for printing a printed circuit board
IL233458A IL233458B (en) 2012-01-02 2014-06-30 Inkjet system for printing a printed circuit board
PH12014501520A PH12014501520A1 (en) 2012-01-02 2014-06-30 Inkjetsystem for printing a printed circuit board
HK14112454.8A HK1199096A1 (en) 2012-01-02 2014-12-11 Inkjetsystem for printing a printed circuit board
US15/148,780 US9769932B2 (en) 2012-01-02 2016-05-06 Inkjet system for printing a printed circuit board
US15/677,926 US10123427B2 (en) 2012-01-02 2017-08-15 Inkjet system for printing a printed circuit board
US16/152,065 US20190037704A1 (en) 2012-01-02 2018-10-04 Print head maintenance

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL2008067A NL2008067C2 (en) 2012-01-02 2012-01-02 Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method.
NL2008067 2012-01-02

Publications (1)

Publication Number Publication Date
NL2008067C2 true NL2008067C2 (en) 2013-07-03

Family

ID=46051879

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2008067A NL2008067C2 (en) 2012-01-02 2012-01-02 Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method.

Country Status (1)

Country Link
NL (1) NL2008067C2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090051894A1 (en) * 2007-08-24 2009-02-26 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method
US20100266961A1 (en) * 2009-04-21 2010-10-21 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090051894A1 (en) * 2007-08-24 2009-02-26 Nikon Corporation Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method
US20100266961A1 (en) * 2009-04-21 2010-10-21 Nikon Corporation Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method

Similar Documents

Publication Publication Date Title
CN106985520B (en) Virtual plane
KR102471897B1 (en) Workpiece processing apparatus, workpiece processing method, and computer storage medium
CN108568383B (en) Droplet discharge device, droplet discharge method, program, and computer storage medium
KR102471901B1 (en) Droplet ejecting apparatus, droplet ejecting method, and computer storage medium
EP1935654B1 (en) Method of printing with high spot placement accuracy
EP3405972B1 (en) Inkjet printing system and method for processing substrates
US11945219B2 (en) Ejection control using substrate alignment features and print region alignment features
US9621858B2 (en) Substrate working device
JP2010099597A (en) Coating device and coating method
NL2008067C2 (en) Inkjet system comprising a holder positioning device for positioning a substrate holder and holder calibration method.
US8348384B2 (en) Rotational adjustment apparatus for inkjet coating head
KR20240050467A (en) Ejection control using imager
JP2002273974A (en) Controlling method for printer head and ink-jet printer
CN116552143B (en) Cross gantry type printing adjusting device and detection adjusting method thereof
JP2009131789A (en) Ink ejecting printing apparatus
JP7055185B2 (en) Droplet ejection device, droplet ejection method, program and computer storage medium
US20220223451A1 (en) Systems and methods for transferring devices or patterns to a substrate
KR20220090708A (en) Inkjet head seperation distance control apparatus and inkjet head seperation distance control method of using the same
CN118742399A (en) Inkjet printer calibration
KR20240149960A (en) Inkjet Printer Calibration
CN114945472A (en) Step-by-step compensated carriage printer

Legal Events

Date Code Title Description
PD Change of ownership

Owner name: MUTRACX INTERNATIONAL B.V.; NL

Free format text: DETAILS ASSIGNMENT: VERANDERING VAN EIGENAAR(S), OVERDRACHT; FORMER OWNER NAME: MUTRACX B.V.

Effective date: 20151124

MM Lapsed because of non-payment of the annual fee

Effective date: 20210201