NL2003342A1 - Deeltjesstraaltoestel met ringvormige belichtingsapertuur. - Google Patents

Deeltjesstraaltoestel met ringvormige belichtingsapertuur.

Info

Publication number
NL2003342A1
NL2003342A1 NL2003342A NL2003342A NL2003342A1 NL 2003342 A1 NL2003342 A1 NL 2003342A1 NL 2003342 A NL2003342 A NL 2003342A NL 2003342 A NL2003342 A NL 2003342A NL 2003342 A1 NL2003342 A1 NL 2003342A1
Authority
NL
Netherlands
Prior art keywords
ring
particle beam
beam device
shaped aperture
aperture
Prior art date
Application number
NL2003342A
Other languages
English (en)
Other versions
NL2003342C2 (nl
Inventor
Gerd Benner
Original Assignee
Zeiss Carl Nts Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Nts Gmbh filed Critical Zeiss Carl Nts Gmbh
Publication of NL2003342A1 publication Critical patent/NL2003342A1/nl
Application granted granted Critical
Publication of NL2003342C2 publication Critical patent/NL2003342C2/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/2614—Holography or phase contrast, phase related imaging in general, e.g. phase plates
NL2003342A 2008-08-14 2009-08-11 Deeltjesstraaltoestel met ringvormige belichtingsapertuur. NL2003342C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008037698 2008-08-14
DE102008037698A DE102008037698B4 (de) 2008-08-14 2008-08-14 Elektronenmikroskop mit ringförmiger Beleuchtungsapertur

Publications (2)

Publication Number Publication Date
NL2003342A1 true NL2003342A1 (nl) 2010-02-16
NL2003342C2 NL2003342C2 (nl) 2011-11-01

Family

ID=41347756

Family Applications (1)

Application Number Title Priority Date Filing Date
NL2003342A NL2003342C2 (nl) 2008-08-14 2009-08-11 Deeltjesstraaltoestel met ringvormige belichtingsapertuur.

Country Status (3)

Country Link
US (1) US8299442B2 (nl)
DE (1) DE102008037698B4 (nl)
NL (1) NL2003342C2 (nl)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007007923A1 (de) * 2007-02-14 2008-08-21 Carl Zeiss Nts Gmbh Phasenschiebendes Element und Teilchenstrahlgerät mit phasenschiebenden Element
EP2400522A1 (en) * 2010-06-24 2011-12-28 Fei Company Blocking member for use in the diffraction plane of a TEM
EP2485239A1 (en) 2011-02-07 2012-08-08 FEI Company Method for centering an optical element in a TEM comprising a contrast enhancing element
JP5669636B2 (ja) * 2011-03-15 2015-02-12 キヤノン株式会社 荷電粒子線レンズおよびそれを用いた露光装置
JP5745957B2 (ja) 2011-07-01 2015-07-08 株式会社日立ハイテクノロジーズ 位相板、および電子顕微鏡
JP5970213B2 (ja) * 2012-03-19 2016-08-17 株式会社ニューフレアテクノロジー マルチ荷電粒子ビーム描画装置及びマルチ荷電粒子ビーム描画方法
EP2887381B1 (en) * 2013-12-18 2016-09-21 Fei Company Method of investigating the wavefront of a charged-particle beam
EP3175473B1 (en) * 2014-07-30 2020-04-15 Forschungszentrum Jülich GmbH Tunable ampere phase plate for charged particle imaging systems
FR3073956B1 (fr) * 2017-11-22 2019-12-27 Commissariat A L'energie Atomique Et Aux Energies Alternatives Methode d'acquisition d'hologrammes par holographie electronique hors axe optique en mode precession
JP7193694B2 (ja) * 2018-07-26 2022-12-21 国立研究開発法人理化学研究所 電子顕微鏡およびそれを用いた試料観察方法
JP6995103B2 (ja) * 2019-11-15 2022-01-14 日本電子株式会社 透過電子顕微鏡および透過電子顕微鏡の制御方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814815A (en) 1995-12-27 1998-09-29 Hitachi, Ltd. Phase-contrast electron microscope and phase plate therefor
DE10200645A1 (de) * 2002-01-10 2003-07-24 Leo Elektronenmikroskopie Gmbh Elektronenmikroskop mit ringförmiger Beleuchtungsapertur
WO2006017252A1 (en) * 2004-07-12 2006-02-16 The Regents Of The University Of California Electron microscope phase enhancement
DE102006011615A1 (de) * 2006-03-14 2007-09-20 Carl Zeiss Nts Gmbh Phasenkontrast-Elektronenmikroskop
DE102007007923A1 (de) 2007-02-14 2008-08-21 Carl Zeiss Nts Gmbh Phasenschiebendes Element und Teilchenstrahlgerät mit phasenschiebenden Element

Also Published As

Publication number Publication date
US8299442B2 (en) 2012-10-30
DE102008037698B4 (de) 2012-08-16
DE102008037698A1 (de) 2010-02-18
US20100038537A1 (en) 2010-02-18
NL2003342C2 (nl) 2011-11-01

Similar Documents

Publication Publication Date Title
NL2003342A1 (nl) Deeltjesstraaltoestel met ringvormige belichtingsapertuur.
FR2962839B1 (fr) Dispositif actionneur hexapode.
BRPI1007310A2 (pt) Compostos inseticidas.
BRPI1012883A2 (pt) dispositivo intercorporal.
BR112013015117A2 (pt) conjunto microeletrônico, e, sistema
BRPI0918430A2 (pt) 4-fenil-1h-pirazóis inseticidas.
BR112013005636A2 (pt) passador de sutura de passagem de sutura através de um objeto
EP2587517A4 (en) ELECTRON LENS AND ELECTRON BEAM DEVICE
BR112012001561A2 (pt) aparelho de áudio.
SE0801651L (sv) Granuleringskvarn
IT1393170B1 (it) Dispositivo di controllo di contropunta.
BRPI0909036A8 (pt) pesticidas
IT1398984B1 (it) Dispositivo blocco-porta perfezionato.
JP2011229212A5 (nl)
BR112012019626A2 (pt) estrutura de plantio e métodos.
BRPI1014897A2 (pt) dispositivo de suspensão.
NL2001066A1 (nl) Deeltjesbundelinrichting met verbeterd Wien-filter.
FR2965196B1 (fr) Dispositif ameliore de soudage.
ITTO20110489A1 (it) Dispositivo di innesto.
BR112012000565A2 (pt) ensaio de vírus.
ITTO20110824A1 (it) Veicolo di piccole dimensioni.
IT1396642B1 (it) Statore.
BRPI0914616A2 (pt) herbicidas
BRPI1007268A2 (pt) Combinações pesticidas.
IT1402606B1 (it) Dispositivo emettitore di luce.

Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
MM Lapsed because of non-payment of the annual fee

Effective date: 20190901