NL193765B - Process for the manufacture of stacked slot capacitors for DRAMs. - Google Patents
Process for the manufacture of stacked slot capacitors for DRAMs.Info
- Publication number
- NL193765B NL193765B NL9001849A NL9001849A NL193765B NL 193765 B NL193765 B NL 193765B NL 9001849 A NL9001849 A NL 9001849A NL 9001849 A NL9001849 A NL 9001849A NL 193765 B NL193765 B NL 193765B
- Authority
- NL
- Netherlands
- Prior art keywords
- drams
- manufacture
- stacked slot
- capacitors
- slot capacitors
- Prior art date
Links
- 239000003990 capacitor Substances 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/30—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells
- H10B12/37—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate
- H10B12/377—DRAM devices comprising one-transistor - one-capacitor [1T-1C] memory cells the capacitor being at least partially in a trench in the substrate having a storage electrode extension located over the transistor
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
- H10B12/01—Manufacture or treatment
- H10B12/02—Manufacture or treatment for one transistor one-capacitor [1T-1C] memory cells
- H10B12/03—Making the capacitor or connections thereto
- H10B12/038—Making the capacitor or connections thereto the capacitor being in a trench in the substrate
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR890012019 | 1989-08-23 | ||
| KR1019890012019A KR930006973B1 (en) | 1989-08-23 | 1989-08-23 | Method for fabricating of stacked trench capacitor |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| NL9001849A NL9001849A (en) | 1991-03-18 |
| NL193765B true NL193765B (en) | 2000-05-01 |
| NL193765C NL193765C (en) | 2000-09-04 |
Family
ID=19289171
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| NL9001849A NL193765C (en) | 1989-08-23 | 1990-08-21 | Process for the manufacture of stacked slot capacitors for DRAMs. |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPH0724282B2 (en) |
| KR (1) | KR930006973B1 (en) |
| DE (1) | DE4010720C2 (en) |
| FR (1) | FR2651368B1 (en) |
| GB (1) | GB2235335B (en) |
| NL (1) | NL193765C (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000058506A (en) * | 2000-06-07 | 2000-10-05 | 이순환 | Brass pin inserted into heat engine compression ring to increase thermal efficiency |
| GB201617276D0 (en) | 2016-10-11 | 2016-11-23 | Big Solar Limited | Energy storage |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62120070A (en) * | 1985-11-20 | 1987-06-01 | Toshiba Corp | Semiconductor memory |
| JPH01101664A (en) * | 1987-10-15 | 1989-04-19 | Nec Corp | Semiconductor integrated circuit device |
| JPH01179450A (en) * | 1988-01-08 | 1989-07-17 | Oki Electric Ind Co Ltd | Mos dynamic memory integrated circuit and manufacture thereof |
| US4951175A (en) * | 1988-05-18 | 1990-08-21 | Kabushiki Kaisha Toshiba | Semiconductor memory device with stacked capacitor structure and the manufacturing method thereof |
| JPH02177359A (en) * | 1988-12-27 | 1990-07-10 | Nec Corp | Semiconductor storage device |
| JP4093614B2 (en) * | 1997-06-11 | 2008-06-04 | 旭化成ケミカルズ株式会社 | Adhesive composition |
| JPH1179450A (en) * | 1997-09-12 | 1999-03-23 | Mita Ind Co Ltd | Document separating mechanism of automatic document feeding device |
-
1989
- 1989-08-23 KR KR1019890012019A patent/KR930006973B1/en not_active IP Right Cessation
-
1990
- 1990-04-03 DE DE4010720A patent/DE4010720C2/en not_active Expired - Fee Related
- 1990-04-27 JP JP2110678A patent/JPH0724282B2/en not_active Expired - Fee Related
- 1990-05-30 FR FR909006733A patent/FR2651368B1/en not_active Expired - Lifetime
- 1990-08-03 GB GB9017025A patent/GB2235335B/en not_active Expired - Fee Related
- 1990-08-21 NL NL9001849A patent/NL193765C/en not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0724282B2 (en) | 1995-03-15 |
| NL193765C (en) | 2000-09-04 |
| GB9017025D0 (en) | 1990-09-19 |
| FR2651368B1 (en) | 1991-11-29 |
| DE4010720A1 (en) | 1991-02-28 |
| KR930006973B1 (en) | 1993-07-24 |
| FR2651368A1 (en) | 1991-03-01 |
| DE4010720C2 (en) | 1994-05-05 |
| KR910005297A (en) | 1991-03-30 |
| GB2235335A (en) | 1991-02-27 |
| GB2235335B (en) | 1994-03-02 |
| JPH0385757A (en) | 1991-04-10 |
| NL9001849A (en) | 1991-03-18 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| BA | A request for search or an international-type search has been filed | ||
| BB | A search report has been drawn up | ||
| BC | A request for examination has been filed | ||
| V1 | Lapsed because of non-payment of the annual fee |
Effective date: 20070301 |