NL180155C - DEVICE FOR DISPLAYING THE ENERGY DISTRIBUTION OF CHARGED PARTICLES. - Google Patents

DEVICE FOR DISPLAYING THE ENERGY DISTRIBUTION OF CHARGED PARTICLES.

Info

Publication number
NL180155C
NL180155C NLAANVRAGE7410276,A NL7410276A NL180155C NL 180155 C NL180155 C NL 180155C NL 7410276 A NL7410276 A NL 7410276A NL 180155 C NL180155 C NL 180155C
Authority
NL
Netherlands
Prior art keywords
displaying
charged particles
energy distribution
distribution
energy
Prior art date
Application number
NLAANVRAGE7410276,A
Other languages
Dutch (nl)
Other versions
NL180155B (en
NL7410276A (en
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Publication of NL7410276A publication Critical patent/NL7410276A/en
Publication of NL180155B publication Critical patent/NL180155B/en
Application granted granted Critical
Publication of NL180155C publication Critical patent/NL180155C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
NLAANVRAGE7410276,A 1973-08-22 1974-07-31 DEVICE FOR DISPLAYING THE ENERGY DISTRIBUTION OF CHARGED PARTICLES. NL180155C (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9417073A JPS532755B2 (en) 1973-08-22 1973-08-22

Publications (3)

Publication Number Publication Date
NL7410276A NL7410276A (en) 1975-02-25
NL180155B NL180155B (en) 1986-08-01
NL180155C true NL180155C (en) 1987-01-02

Family

ID=14102864

Family Applications (1)

Application Number Title Priority Date Filing Date
NLAANVRAGE7410276,A NL180155C (en) 1973-08-22 1974-07-31 DEVICE FOR DISPLAYING THE ENERGY DISTRIBUTION OF CHARGED PARTICLES.

Country Status (6)

Country Link
US (1) US3909610A (en)
JP (1) JPS532755B2 (en)
DE (1) DE2440120A1 (en)
FR (1) FR2241785B1 (en)
GB (1) GB1442507A (en)
NL (1) NL180155C (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3965351A (en) * 1974-10-30 1976-06-22 The United States Of America As Represented By The United States Energy Research And Development Administration Differential auger spectrometry
JPS5780649A (en) * 1980-11-10 1982-05-20 Hitachi Ltd Electron ray energy analyzer
NL8600685A (en) * 1986-03-18 1987-10-16 Philips Nv DEVICE FOR ENERGY SELECTIVE IMAGE.
DE3820549A1 (en) * 1988-06-16 1989-12-21 Fraunhofer Ges Forschung METHOD AND DEVICE FOR EXAMINING MEMBRANE SURFACES
JPH04264243A (en) * 1991-02-20 1992-09-21 Jeol Ltd Correction of peak energy shift in auger image measurement
JPH1097836A (en) * 1996-09-24 1998-04-14 Hitachi Keisokki Service Kk Scanning electron microscope
JP2002508065A (en) * 1997-07-04 2002-03-12 ドイチェス・クレプスフォルシュングスツェントルム・スチフトゥング・デス・エッフェントリヒェン・レヒツ How to detect elements in a sample
ES2687794T3 (en) * 2012-03-06 2018-10-29 Scienta Omicron Ab Analyzer arrangement for particle spectrometer

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3191028A (en) * 1963-04-22 1965-06-22 Albert V Crewe Scanning electron microscope
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3812288A (en) * 1972-11-21 1974-05-21 Edax Int Inc Television display system

Also Published As

Publication number Publication date
US3909610A (en) 1975-09-30
NL180155B (en) 1986-08-01
GB1442507A (en) 1976-07-14
FR2241785A1 (en) 1975-03-21
NL7410276A (en) 1975-02-25
FR2241785B1 (en) 1977-03-25
JPS5044889A (en) 1975-04-22
DE2440120A1 (en) 1975-03-27
JPS532755B2 (en) 1978-01-31

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Legal Events

Date Code Title Description
BC A request for examination has been filed
A85 Still pending on 85-01-01
V4 Lapsed because of reaching the maximum lifetime of a patent