NL177955C - Corpusculaire stralenmicroscoop. - Google Patents

Corpusculaire stralenmicroscoop.

Info

Publication number
NL177955C
NL177955C NL7217724A NL7217724A NL177955C NL 177955 C NL177955 C NL 177955C NL 7217724 A NL7217724 A NL 7217724A NL 7217724 A NL7217724 A NL 7217724A NL 177955 C NL177955 C NL 177955C
Authority
NL
Netherlands
Prior art keywords
ray microscope
corpuscular ray
corpuscular
microscope
ray
Prior art date
Application number
NL7217724A
Other languages
English (en)
Other versions
NL7217724A (nl
NL177955B (nl
Original Assignee
Max Planck Gesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Max Planck Gesellschaft filed Critical Max Planck Gesellschaft
Publication of NL7217724A publication Critical patent/NL7217724A/xx
Publication of NL177955B publication Critical patent/NL177955B/nl
Application granted granted Critical
Publication of NL177955C publication Critical patent/NL177955C/nl

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10Lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)
NL7217724A 1971-12-28 1972-12-28 Corpusculaire stralenmicroscoop. NL177955C (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19712165089 DE2165089C2 (de) 1971-12-28 1971-12-28 Korpuskularstrahlenmikroskop zur dreidimensionale Darstellung räumlicher Objekte

Publications (3)

Publication Number Publication Date
NL7217724A NL7217724A (nl) 1973-07-02
NL177955B NL177955B (nl) 1985-07-16
NL177955C true NL177955C (nl) 1985-12-16

Family

ID=5829490

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7217724A NL177955C (nl) 1971-12-28 1972-12-28 Corpusculaire stralenmicroscoop.

Country Status (5)

Country Link
JP (1) JPS5623545B2 (nl)
DE (1) DE2165089C2 (nl)
FR (1) FR2166161B1 (nl)
GB (1) GB1421159A (nl)
NL (1) NL177955C (nl)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60141850U (ja) * 1984-02-21 1985-09-19 マ−ケテイング株式会社 磁石付きパンツ
DE602004026463D1 (de) 2004-12-30 2010-05-20 Integrated Circuit Testing Mehrfach-Linsenanordnung und Teilchenstrahlgerät mit selbiger

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2436676A (en) * 1945-01-27 1948-02-24 Rca Corp Apparatus for stereoscopic work
CH295230A (de) * 1949-07-07 1953-12-15 Sueddeutsche Lab Gmbh Elektrostatisches Elektronenmikroskop zum Herstellen stereoskopischer Bilder bzw. Aufnahmen.

Also Published As

Publication number Publication date
JPS5623545B2 (nl) 1981-06-01
JPS4874972A (nl) 1973-10-09
GB1421159A (en) 1976-01-14
DE2165089A1 (de) 1973-07-12
FR2166161B1 (nl) 1978-09-29
NL7217724A (nl) 1973-07-02
NL177955B (nl) 1985-07-16
DE2165089C2 (de) 1985-08-29
FR2166161A1 (nl) 1973-08-10

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Legal Events

Date Code Title Description
BA A request for search or an international-type search has been filed
BB A search report has been drawn up
BC A request for examination has been filed
A85 Still pending on 85-01-01
V1 Lapsed because of non-payment of the annual fee