NL157387B - WHEEL FOR A TURBOMOLECULAR PUMP. - Google Patents
WHEEL FOR A TURBOMOLECULAR PUMP.Info
- Publication number
- NL157387B NL157387B NL7109533.A NL7109533A NL157387B NL 157387 B NL157387 B NL 157387B NL 7109533 A NL7109533 A NL 7109533A NL 157387 B NL157387 B NL 157387B
- Authority
- NL
- Netherlands
- Prior art keywords
- wheel
- turbomolecular pump
- turbomolecular
- pump
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/26—Rotors specially for elastic fluids
- F04D29/32—Rotors specially for elastic fluids for axial flow pumps
- F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
- F04D29/324—Blades
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
- F04D29/544—Blade shapes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE2035063A DE2035063C3 (en) | 1970-07-15 | 1970-07-15 | Impeller for a turbo molecular pump |
Publications (2)
Publication Number | Publication Date |
---|---|
NL7109533A NL7109533A (en) | 1972-01-18 |
NL157387B true NL157387B (en) | 1978-07-17 |
Family
ID=5776829
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL7109533.A NL157387B (en) | 1970-07-15 | 1971-07-09 | WHEEL FOR A TURBOMOLECULAR PUMP. |
Country Status (10)
Country | Link |
---|---|
US (1) | US3748055A (en) |
JP (1) | JPS5224683B1 (en) |
BE (1) | BE769932A (en) |
CA (1) | CA950872A (en) |
CH (1) | CH529927A (en) |
DE (1) | DE2035063C3 (en) |
FR (1) | FR2097945A5 (en) |
GB (1) | GB1308263A (en) |
NL (1) | NL157387B (en) |
SE (1) | SE371867B (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2229724B2 (en) * | 1972-06-19 | 1980-06-04 | Leybold-Heraeus Gmbh, 5000 Koeln | Turbo molecular pump |
DE2554995A1 (en) * | 1975-12-06 | 1977-06-16 | Pfeiffer Vakuumtechnik | TURBOMOLECULAR PUMP |
DE3317868A1 (en) * | 1983-05-17 | 1984-11-22 | Leybold-Heraeus GmbH, 5000 Köln | FRICTION PUMP |
DE3507274A1 (en) * | 1985-03-01 | 1986-09-04 | Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar | DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS |
US5052887A (en) * | 1988-02-26 | 1991-10-01 | Novikov Nikolai M | Turbomolecular vacuum pump |
IT1238201B (en) * | 1989-11-03 | 1993-07-09 | Varian Spa | METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED. |
DE10052637B4 (en) * | 2000-10-24 | 2021-03-11 | Pfeiffer Vacuum Gmbh | 02/16/2001 Discs for a turbo molecular pump |
DE10203648B4 (en) * | 2001-02-10 | 2016-05-25 | Pfeiffer Vacuum Gmbh | Rotor and stator disks for a turbomolecular pump |
EP1249613B1 (en) * | 2001-03-15 | 2004-01-28 | VARIAN S.p.A. | Turbine pump with a stator stage integrated with a spacer ring |
DE102004012713A1 (en) * | 2004-03-16 | 2005-10-06 | Pfeiffer Vacuum Gmbh | Turbo molecular pump |
DE102008056352A1 (en) * | 2008-11-07 | 2010-05-12 | Oerlikon Leybold Vacuum Gmbh | vacuum pump rotor |
CN205277504U (en) * | 2014-09-11 | 2016-06-01 | 摩尔动力(北京)技术股份有限公司 | Mechanism reaches device including it to rotary impeller |
CN205189965U (en) * | 2014-09-29 | 2016-04-27 | 摩尔动力(北京)技术股份有限公司 | Press and expand an organic whole to rotary impeller mechanism |
EP3734078B1 (en) * | 2020-03-05 | 2022-01-12 | Pfeiffer Vacuum Technology AG | Turbomolecular pump and method of manufacturing a stator disc for such a pump |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL281280A (en) * | ||||
FR519759A (en) * | 1919-12-24 | 1921-06-15 | Anciens Ets Sautter Harle | Metal wing propeller |
US1767786A (en) * | 1927-05-06 | 1930-06-24 | William Braat | Propeller |
US2011672A (en) * | 1933-06-07 | 1935-08-20 | Barker Auriol | Screw propeller |
US2500071A (en) * | 1948-03-12 | 1950-03-07 | Edmund E Hans | Fan |
DE1503704C3 (en) * | 1966-12-30 | 1972-03-23 | Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar | BLADE FOR A WHEEL AND OR GUIDE WHEEL OF A TURBOMOLECULAR PUMP |
BE757354A (en) * | 1969-10-27 | 1971-03-16 | Sargent Welch Scientific Co | TURBOMOLECULAR PUMP WITH ADVANCED STATORS AND ROTORS |
-
1970
- 1970-07-15 DE DE2035063A patent/DE2035063C3/en not_active Expired
-
1971
- 1971-06-17 FR FR7121957A patent/FR2097945A5/fr not_active Expired
- 1971-06-23 SE SE7108187A patent/SE371867B/xx unknown
- 1971-06-28 CH CH947471A patent/CH529927A/en not_active IP Right Cessation
- 1971-07-09 NL NL7109533.A patent/NL157387B/en not_active IP Right Cessation
- 1971-07-12 US US00161662A patent/US3748055A/en not_active Expired - Lifetime
- 1971-07-12 GB GB3257071A patent/GB1308263A/en not_active Expired
- 1971-07-13 BE BE769932A patent/BE769932A/en unknown
- 1971-07-13 CA CA118,A patent/CA950872A/en not_active Expired
- 1971-07-13 JP JP46051503A patent/JPS5224683B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US3748055A (en) | 1973-07-24 |
DE2035063A1 (en) | 1972-01-20 |
GB1308263A (en) | 1973-02-21 |
JPS5224683B1 (en) | 1977-07-02 |
DE2035063B2 (en) | 1973-10-31 |
SE371867B (en) | 1974-12-02 |
NL7109533A (en) | 1972-01-18 |
FR2097945A5 (en) | 1972-03-03 |
DE2035063C3 (en) | 1974-05-30 |
CH529927A (en) | 1972-10-31 |
BE769932A (en) | 1971-11-16 |
CA950872A (en) | 1974-07-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
NL80 | Abbreviated name of patent owner mentioned of already nullified patent |
Owner name: PFEIFFER |
|
V4 | Discontinued because of reaching the maximum lifetime of a patent |