BE769932A - TURBO-MOLECULAR PUMP - Google Patents

TURBO-MOLECULAR PUMP

Info

Publication number
BE769932A
BE769932A BE769932A BE769932A BE769932A BE 769932 A BE769932 A BE 769932A BE 769932 A BE769932 A BE 769932A BE 769932 A BE769932 A BE 769932A BE 769932 A BE769932 A BE 769932A
Authority
BE
Belgium
Prior art keywords
turbo
molecular pump
molecular
pump
Prior art date
Application number
BE769932A
Other languages
French (fr)
Original Assignee
Pfeiffer Vakuumtechnik
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vakuumtechnik filed Critical Pfeiffer Vakuumtechnik
Publication of BE769932A publication Critical patent/BE769932A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
BE769932A 1970-07-15 1971-07-13 TURBO-MOLECULAR PUMP BE769932A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2035063A DE2035063C3 (en) 1970-07-15 1970-07-15 Impeller for a turbo molecular pump

Publications (1)

Publication Number Publication Date
BE769932A true BE769932A (en) 1971-11-16

Family

ID=5776829

Family Applications (1)

Application Number Title Priority Date Filing Date
BE769932A BE769932A (en) 1970-07-15 1971-07-13 TURBO-MOLECULAR PUMP

Country Status (10)

Country Link
US (1) US3748055A (en)
JP (1) JPS5224683B1 (en)
BE (1) BE769932A (en)
CA (1) CA950872A (en)
CH (1) CH529927A (en)
DE (1) DE2035063C3 (en)
FR (1) FR2097945A5 (en)
GB (1) GB1308263A (en)
NL (1) NL157387B (en)
SE (1) SE371867B (en)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2229724B2 (en) * 1972-06-19 1980-06-04 Leybold-Heraeus Gmbh, 5000 Koeln Turbo molecular pump
DE2554995A1 (en) * 1975-12-06 1977-06-16 Pfeiffer Vakuumtechnik TURBOMOLECULAR PUMP
DE3317868A1 (en) * 1983-05-17 1984-11-22 Leybold-Heraeus GmbH, 5000 Köln FRICTION PUMP
DE3507274A1 (en) * 1985-03-01 1986-09-04 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar DISC WITH SHOVELS HIGH STABILITY FOR TURBOMOLECULAR PUMPS
WO1989008192A1 (en) * 1988-02-26 1989-09-08 Nikolai Mikhailovich Novikov Turbomolecular vacuum pump
IT1238201B (en) * 1989-11-03 1993-07-09 Varian Spa METHOD OF MANUFACTURE BY ELECTROEROSION OF A IMPELLER OR A ROTOR TO ONE OR MORE IMPELLERS OF A TURBO PUMP, PARTICULARLY OF A TURBOMOLECULAR PUMP, AND PRODUCTS SO OBTAINED.
DE10052637B4 (en) * 2000-10-24 2021-03-11 Pfeiffer Vacuum Gmbh 02/16/2001 Discs for a turbo molecular pump
DE10203648B4 (en) * 2001-02-10 2016-05-25 Pfeiffer Vacuum Gmbh Rotor and stator disks for a turbomolecular pump
EP1249613B1 (en) * 2001-03-15 2004-01-28 VARIAN S.p.A. Turbine pump with a stator stage integrated with a spacer ring
DE102004012713A1 (en) * 2004-03-16 2005-10-06 Pfeiffer Vacuum Gmbh Turbo molecular pump
DE102008056352A1 (en) * 2008-11-07 2010-05-12 Oerlikon Leybold Vacuum Gmbh vacuum pump rotor
WO2016037452A1 (en) * 2014-09-11 2016-03-17 摩尔动力(北京)技术股份有限公司 Counter-rotation impeller mechanism and device comprising same
WO2016050006A1 (en) * 2014-09-29 2016-04-07 摩尔动力(北京)技术股份有限公司 Compression-expansion counter-rotating impeller mechanism
EP3734078B1 (en) * 2020-03-05 2022-01-12 Pfeiffer Vacuum Technology AG Turbomolecular pump and method of manufacturing a stator disc for such a pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL281280A (en) *
FR519759A (en) * 1919-12-24 1921-06-15 Anciens Ets Sautter Harle Metal wing propeller
US1767786A (en) * 1927-05-06 1930-06-24 William Braat Propeller
US2011672A (en) * 1933-06-07 1935-08-20 Barker Auriol Screw propeller
US2500071A (en) * 1948-03-12 1950-03-07 Edmund E Hans Fan
DE1503704C3 (en) * 1966-12-30 1972-03-23 Arthur Pfeiffer Hochvakuumtechnik Gmbh, 6330 Wetzlar BLADE FOR A WHEEL AND OR GUIDE WHEEL OF A TURBOMOLECULAR PUMP
BE757354A (en) * 1969-10-27 1971-03-16 Sargent Welch Scientific Co TURBOMOLECULAR PUMP WITH ADVANCED STATORS AND ROTORS

Also Published As

Publication number Publication date
GB1308263A (en) 1973-02-21
US3748055A (en) 1973-07-24
DE2035063B2 (en) 1973-10-31
NL7109533A (en) 1972-01-18
CA950872A (en) 1974-07-09
DE2035063A1 (en) 1972-01-20
JPS5224683B1 (en) 1977-07-02
NL157387B (en) 1978-07-17
SE371867B (en) 1974-12-02
FR2097945A5 (en) 1972-03-03
CH529927A (en) 1972-10-31
DE2035063C3 (en) 1974-05-30

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