NL146980B - Elektromagnetisch afbuigstelsel. - Google Patents

Elektromagnetisch afbuigstelsel.

Info

Publication number
NL146980B
NL146980B NL6701910A NL6701910A NL146980B NL 146980 B NL146980 B NL 146980B NL 6701910 A NL6701910 A NL 6701910A NL 6701910 A NL6701910 A NL 6701910A NL 146980 B NL146980 B NL 146980B
Authority
NL
Netherlands
Prior art keywords
deflection system
electromagnetic deflection
electromagnetic
deflection
Prior art date
Application number
NL6701910A
Other languages
English (en)
Other versions
NL6701910A (nl
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of NL6701910A publication Critical patent/NL6701910A/xx
Publication of NL146980B publication Critical patent/NL146980B/nl

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Particle Accelerators (AREA)
  • Electromagnets (AREA)
  • Radiation-Therapy Devices (AREA)
NL6701910A 1966-03-14 1967-02-08 Elektromagnetisch afbuigstelsel. NL146980B (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES0102503 1966-03-14
DES0106008 1966-09-22

Publications (2)

Publication Number Publication Date
NL6701910A NL6701910A (nl) 1967-09-15
NL146980B true NL146980B (nl) 1975-08-15

Family

ID=25998371

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6701910A NL146980B (nl) 1966-03-14 1967-02-08 Elektromagnetisch afbuigstelsel.

Country Status (2)

Country Link
DE (2) DE1514704B1 (nl)
NL (1) NL146980B (nl)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL280741A (nl) * 1961-08-02

Also Published As

Publication number Publication date
NL6701910A (nl) 1967-09-15
DE1564719C3 (de) 1973-09-27
DE1564719B2 (de) 1973-03-08
DE1514704B1 (de) 1971-01-14
DE1564719A1 (de) 1971-05-27

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