NL141245B - VACUUE OVEN INSTALLATION. - Google Patents

VACUUE OVEN INSTALLATION.

Info

Publication number
NL141245B
NL141245B NL6813290A NL6813290A NL141245B NL 141245 B NL141245 B NL 141245B NL 6813290 A NL6813290 A NL 6813290A NL 6813290 A NL6813290 A NL 6813290A NL 141245 B NL141245 B NL 141245B
Authority
NL
Netherlands
Prior art keywords
vacuue
oven installation
oven
installation
vacuue oven
Prior art date
Application number
NL6813290A
Other languages
Dutch (nl)
Other versions
NL6813290A (en
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Publication of NL6813290A publication Critical patent/NL6813290A/xx
Publication of NL141245B publication Critical patent/NL141245B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0087—Bypass or safety valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/20—High temperature filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/28—Making use of vacuum or underpressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
NL6813290A 1968-08-05 1968-09-17 VACUUE OVEN INSTALLATION. NL141245B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1205668A CH469239A (en) 1968-08-05 1968-08-05 Vacuum furnace system

Publications (2)

Publication Number Publication Date
NL6813290A NL6813290A (en) 1970-02-09
NL141245B true NL141245B (en) 1974-02-15

Family

ID=4379428

Family Applications (1)

Application Number Title Priority Date Filing Date
NL6813290A NL141245B (en) 1968-08-05 1968-09-17 VACUUE OVEN INSTALLATION.

Country Status (5)

Country Link
CH (1) CH469239A (en)
DE (1) DE1934939C3 (en)
FR (1) FR2015057A1 (en)
GB (1) GB1201018A (en)
NL (1) NL141245B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3881638T2 (en) * 1987-09-25 1993-09-23 Ebara Corp METHOD AND APPARATUS FOR TREATING EXHAUST GAS FROM SEMICONDUCTOR PRODUCTION METHODS.

Also Published As

Publication number Publication date
FR2015057A1 (en) 1970-04-24
NL6813290A (en) 1970-02-09
DE1934939A1 (en) 1970-02-12
CH469239A (en) 1969-02-28
DE1934939C3 (en) 1974-02-21
DE1934939B2 (en) 1973-07-26
GB1201018A (en) 1970-08-05

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Legal Events

Date Code Title Description
VJC Lapsed due to non-payment of the due maintenance fee for the patent or patent application