CH469239A - Vacuum furnace system - Google Patents

Vacuum furnace system

Info

Publication number
CH469239A
CH469239A CH1205668A CH1205668A CH469239A CH 469239 A CH469239 A CH 469239A CH 1205668 A CH1205668 A CH 1205668A CH 1205668 A CH1205668 A CH 1205668A CH 469239 A CH469239 A CH 469239A
Authority
CH
Switzerland
Prior art keywords
vacuum furnace
furnace system
vacuum
furnace
Prior art date
Application number
CH1205668A
Other languages
German (de)
Inventor
Helmut Dipl Ing Vollmer
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1205668A priority Critical patent/CH469239A/en
Priority to NL6813290A priority patent/NL141245B/en
Publication of CH469239A publication Critical patent/CH469239A/en
Priority to DE19691934939 priority patent/DE1934939C3/en
Priority to GB3704969A priority patent/GB1201018A/en
Priority to FR6926004A priority patent/FR2015057A1/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/0084—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours provided with safety means
    • B01D46/0087—Bypass or safety valves
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
    • B01D46/24—Particle separators, e.g. dust precipitators, using rigid hollow filter bodies
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/20—High temperature filtration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2273/00—Operation of filters specially adapted for separating dispersed particles from gases or vapours
    • B01D2273/28—Making use of vacuum or underpressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)
CH1205668A 1968-08-05 1968-08-05 Vacuum furnace system CH469239A (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CH1205668A CH469239A (en) 1968-08-05 1968-08-05 Vacuum furnace system
NL6813290A NL141245B (en) 1968-08-05 1968-09-17 VACUUE OVEN INSTALLATION.
DE19691934939 DE1934939C3 (en) 1968-08-05 1969-07-10 Process for evacuating a vacuum furnace and vacuum furnace system for carrying out the process
GB3704969A GB1201018A (en) 1968-08-05 1969-07-23 Improvements in and relating to vacuum furnace plants
FR6926004A FR2015057A1 (en) 1968-08-05 1969-07-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1205668A CH469239A (en) 1968-08-05 1968-08-05 Vacuum furnace system

Publications (1)

Publication Number Publication Date
CH469239A true CH469239A (en) 1969-02-28

Family

ID=4379428

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1205668A CH469239A (en) 1968-08-05 1968-08-05 Vacuum furnace system

Country Status (5)

Country Link
CH (1) CH469239A (en)
DE (1) DE1934939C3 (en)
FR (1) FR2015057A1 (en)
GB (1) GB1201018A (en)
NL (1) NL141245B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0314299B1 (en) * 1987-09-25 1993-06-09 Ebara Corporation Method of and apparatus for treating waste gas from semiconductor manufacturing process

Also Published As

Publication number Publication date
DE1934939C3 (en) 1974-02-21
NL6813290A (en) 1970-02-09
DE1934939B2 (en) 1973-07-26
NL141245B (en) 1974-02-15
GB1201018A (en) 1970-08-05
FR2015057A1 (en) 1970-04-24
DE1934939A1 (en) 1970-02-12

Similar Documents

Publication Publication Date Title
SE383816B (en) TRADRADIO SYSTEM
BR6911817D0 (en) BENZOTIAZINE DI-OXIDES
AT318109B (en) Fog-proof object
BR6909774D0 (en) 3 - (- 4) -AROYL-PIPERIDINES 1-REPLACED
BR6913635D0 (en) HYDROXYphenylALCOYLENOIL ISOCIANURATES
CH510572A (en) Conveyor system
BR6915185D0 (en) 3-PHENOXY-PYRROLIDINES 1-REPLACED
FI47812C (en) Exhaust system
FI54593B (en) NYA CEMENTBLANDNINGAR
BR6915184D0 (en) PHENOXY-PYRROLIDINES 1-REPLACED 3-REPLACED
AT294984B (en) oven
BE751027A (en) SCHEEPSSCHROEFASKOKERAFDICHTING
BR6910255D0 (en) IMIDAZOLIDINE-QUINAZOLINS
CH512042A (en) Heating system
CH507495A (en) Furnace system
BR6908258D0 (en) SILOXAMA-AMINO-HYDROXISULPHONATES
BR6909930D0 (en) 1-CARBAMOIL-3-AROIL-PIRROLIDINES
BE748797A (en) WERKANKER
CH506760A (en) Heating system
BR6910136D0 (en) 1-ALCOIL-LOWER 3-AZETIDINOIS
CH469239A (en) Vacuum furnace system
CH496605A (en) Conveyor system
CH492622A (en) Conveyor system
AT289562B (en) Skibob
CH507489A (en) Heating system