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Publication of NL134392CpublicationCriticalpatent/NL134392C/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
Analysing Materials By The Use Of Radiation
(AREA)
Verfahren zur Materialanalyse in einem Sekundär-Elektronen-Emissionsmikroskop und Sekundär-Elektronen-Emissionsmikroskop zur Durchführung des Verfahrens
