NL110479C - - Google Patents

Info

Publication number
NL110479C
NL110479C NL110479DA NL110479C NL 110479 C NL110479 C NL 110479C NL 110479D A NL110479D A NL 110479DA NL 110479 C NL110479 C NL 110479C
Authority
NL
Netherlands
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of NL110479C publication Critical patent/NL110479C/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02524Group 14 semiconducting materials
    • H01L21/02532Silicon, silicon germanium, germanium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/34Gas-filled discharge tubes operating with cathodic sputtering
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/02631Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
NL110479D 1959-06-02 NL110479C (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL1276208X 1959-06-02

Publications (1)

Publication Number Publication Date
NL110479C true NL110479C (pt)

Family

ID=19872811

Family Applications (2)

Application Number Title Priority Date Filing Date
NL110479D NL110479C (pt) 1959-06-02
NL239786D NL239786A (pt) 1959-06-02

Family Applications After (1)

Application Number Title Priority Date Filing Date
NL239786D NL239786A (pt) 1959-06-02

Country Status (2)

Country Link
DE (1) DE1276208B (pt)
NL (2) NL239786A (pt)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE764927C (de) * 1939-02-22 1951-08-06 Bosch Gmbh Robert Verfahren zur Verdampfung im Vakuum
DE860973C (de) * 1944-08-21 1952-12-29 Siemens Ag Detektor
DE891113C (de) * 1951-09-08 1953-09-24 Licentia Gmbh Verfahren zur Herstellung elektrisch unsymmetrisch leitender Systeme
DE1011528B (de) * 1954-05-17 1957-07-04 Licentia Gmbh Verfahren zur Oberflaechenbehandlung eines Kristalles aus einer halbleitenden Verbindung
DE1030463B (de) * 1954-07-31 1958-05-22 Licentia Gmbh Verfahren zur Herstellung von Halbleiterkristallen mit p-n-UEbergaengen

Also Published As

Publication number Publication date
NL239786A (pt)
DE1276208B (de) 1968-08-29

Similar Documents

Publication Publication Date Title
AT221460B (pt)
AT227430B (pt)
AT219274B (pt)
AT213532B (pt)
AT218043B (pt)
AT219811B (pt)
BE575800A (pt)
SE198788C1 (pt)
BE584983A (pt)
SE302005B (pt)
BE586848A (pt)
BE585191A (pt)
NL120399C (pt)
BE578357A (pt)
BE584847A (pt)
NL247251A (pt)
BE584735A (pt)
NL248020A (pt)
BE585566A (pt)
BE578264A (pt)
BE577992A (pt)
BE584431A (pt)
BE577586A (pt)
BE577032A (pt)
BE576772A (pt)