NL1032193A1 - Method for improving transmission power of optical component and optical component, the transmission power of which is thereby improved. - Google Patents

Method for improving transmission power of optical component and optical component, the transmission power of which is thereby improved.

Info

Publication number
NL1032193A1
NL1032193A1 NL1032193A NL1032193A NL1032193A1 NL 1032193 A1 NL1032193 A1 NL 1032193A1 NL 1032193 A NL1032193 A NL 1032193A NL 1032193 A NL1032193 A NL 1032193A NL 1032193 A1 NL1032193 A1 NL 1032193A1
Authority
NL
Netherlands
Prior art keywords
transmission power
optical component
improved
improving
improving transmission
Prior art date
Application number
NL1032193A
Other languages
Dutch (nl)
Other versions
NL1032193C2 (en
Inventor
Susumu Saito
Takashi Takahashi
Shinsuke Motomiya
Original Assignee
Topcon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Topcon Corp filed Critical Topcon Corp
Publication of NL1032193A1 publication Critical patent/NL1032193A1/en
Application granted granted Critical
Publication of NL1032193C2 publication Critical patent/NL1032193C2/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
NL1032193A 2005-08-31 2006-07-18 Method for improving transmission power of optical component and optical component, the transmission power of which is thereby improved. NL1032193C2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005251093 2005-08-31
JP2005251093A JP2007065277A (en) 2005-08-31 2005-08-31 Method for improving transmittance of optical member and optical member with the transmittance improved by the method

Publications (2)

Publication Number Publication Date
NL1032193A1 true NL1032193A1 (en) 2007-03-01
NL1032193C2 NL1032193C2 (en) 2007-08-08

Family

ID=37704544

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1032193A NL1032193C2 (en) 2005-08-31 2006-07-18 Method for improving transmission power of optical component and optical component, the transmission power of which is thereby improved.

Country Status (3)

Country Link
JP (1) JP2007065277A (en)
DE (1) DE102006042634A1 (en)
NL (1) NL1032193C2 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW463238B (en) * 1997-04-18 2001-11-11 Nippon Kogaku Kk Method and device for exposure control, method and device for exposure, and method of manufacturing the device
JP2004331487A (en) * 2003-02-28 2004-11-25 Topcon Corp Optical member and its manufacturing method
JP2005064045A (en) * 2003-08-13 2005-03-10 Nikon Corp Optical device, aligner, and method of manufacturing device

Also Published As

Publication number Publication date
DE102006042634A1 (en) 2007-03-01
JP2007065277A (en) 2007-03-15
NL1032193C2 (en) 2007-08-08

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Legal Events

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RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)
PD2B A search report has been drawn up
V1 Lapsed because of non-payment of the annual fee

Effective date: 20110201