NL1024886A1 - Trilling-isolatietafel. - Google Patents

Trilling-isolatietafel.

Info

Publication number
NL1024886A1
NL1024886A1 NL1024886A NL1024886A NL1024886A1 NL 1024886 A1 NL1024886 A1 NL 1024886A1 NL 1024886 A NL1024886 A NL 1024886A NL 1024886 A NL1024886 A NL 1024886A NL 1024886 A1 NL1024886 A1 NL 1024886A1
Authority
NL
Netherlands
Prior art keywords
vibration isolation
isolation table
vibration
isolation
Prior art date
Application number
NL1024886A
Other languages
English (en)
Other versions
NL1024886C2 (nl
Inventor
Masakuni Kainuma
Toshikazu Aoki
Keiji Tamaki
Katsuo Uematsu
Tomomasa Fujita
Hiroshi Chinda
Akihiro Hayashi
Original Assignee
Fujikura Rubber Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikura Rubber Ltd filed Critical Fujikura Rubber Ltd
Publication of NL1024886A1 publication Critical patent/NL1024886A1/nl
Application granted granted Critical
Publication of NL1024886C2 publication Critical patent/NL1024886C2/nl

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/023—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means
    • F16F15/027—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using fluid means comprising control arrangements
    • F16F15/0275—Control of stiffness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F2230/00—Purpose; Design features
    • F16F2230/14—Ball joints; Spherical support elements

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Vibration Prevention Devices (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Diaphragms And Bellows (AREA)
NL1024886A 2002-11-28 2003-11-26 Trilling-isolatietafel. NL1024886C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2002345870 2002-11-28
JP2002345870A JP3926255B2 (ja) 2002-11-28 2002-11-28 除振台

Publications (2)

Publication Number Publication Date
NL1024886A1 true NL1024886A1 (nl) 2004-06-02
NL1024886C2 NL1024886C2 (nl) 2005-12-14

Family

ID=32376034

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1024886A NL1024886C2 (nl) 2002-11-28 2003-11-26 Trilling-isolatietafel.

Country Status (4)

Country Link
US (1) US6877711B2 (nl)
JP (1) JP3926255B2 (nl)
CN (1) CN100365317C (nl)
NL (1) NL1024886C2 (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6842994B2 (en) * 2002-09-27 2005-01-18 University Of Wyoming Precision positioning device
JP2004176851A (ja) * 2002-11-28 2004-06-24 Fujikura Rubber Ltd 除振台
JP4463573B2 (ja) * 2004-01-22 2010-05-19 藤倉ゴム工業株式会社 除振装置
KR101445767B1 (ko) * 2013-03-18 2014-11-03 (주)에스엠텍 제진 테이블
CN106763463A (zh) * 2017-03-06 2017-05-31 北京华卓精科科技股份有限公司 并联阻尼油缸的隔振装置
JP6634122B1 (ja) * 2018-07-25 2020-01-22 倉敷化工株式会社 気体ばね式除振装置

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3589655A (en) * 1969-03-10 1971-06-29 Consolidated Kinetics Corp Apparatus for isolating vibrations
JPS5368364A (en) * 1976-11-29 1978-06-17 Ohbayashigumi Ltd Free-from-vibration device
US4360184A (en) * 1980-02-19 1982-11-23 Technical Manufacturing Corporation Pneumatic device for attenuation of vertical, horizontal and rotational dynamic forces
JPS61252928A (ja) * 1985-04-30 1986-11-10 Showa Electric Wire & Cable Co Ltd 防振ゴム併用空気ばねシステム
JPH01141243A (ja) * 1987-11-25 1989-06-02 Showa Electric Wire & Cable Co Ltd 空気ばね装置
JP2913064B2 (ja) * 1989-07-24 1999-06-28 特許機器 株式会社 能動制振台
US5549270A (en) * 1989-08-16 1996-08-27 Minus K Technology, Inc. Vibration isolation system
DE4204129A1 (de) * 1992-02-12 1993-08-19 Gerb Gmbh & Co Kg Horizontal und vertikal wirkender viskoser schwingungsdaempfer
DE69329936T2 (de) * 1992-12-04 2001-05-31 Minus K Technology, Inc. Schwingungsisolationssystem
JP3200282B2 (ja) * 1993-07-21 2001-08-20 キヤノン株式会社 処理システム及びこれを用いたデバイス製造方法
JPH11307633A (ja) * 1997-11-17 1999-11-05 Sony Corp 低誘電率膜を有する半導体装置、およびその製造方法
JP3611356B2 (ja) * 1994-12-19 2005-01-19 倉敷化工株式会社 除振装置
CN2236573Y (zh) * 1995-06-29 1996-10-02 江苏省地震局 专用于浮放设备的隔震装置
DE69631362T2 (de) * 1995-10-04 2004-11-04 Ebara Corp. Vorrichtung zur Schwingungsdämpfung
JPH10220527A (ja) * 1997-02-06 1998-08-21 Jeol Ltd 防振装置
JP3595439B2 (ja) * 1997-12-17 2004-12-02 核燃料サイクル開発機構 圧縮・引張荷重型鉛ダンパ
US6953109B2 (en) * 2002-10-08 2005-10-11 Nikon Corporation Vibration isolator with low lateral stiffness

Also Published As

Publication number Publication date
CN1512087A (zh) 2004-07-14
CN100365317C (zh) 2008-01-30
US20040104330A1 (en) 2004-06-03
JP2004176850A (ja) 2004-06-24
NL1024886C2 (nl) 2005-12-14
JP3926255B2 (ja) 2007-06-06
US6877711B2 (en) 2005-04-12

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Legal Events

Date Code Title Description
AD1A A request for search or an international type search has been filed
RD2N Patents in respect of which a decision has been taken or a report has been made (novelty report)

Effective date: 20051010

PD2B A search report has been drawn up
MM Lapsed because of non-payment of the annual fee

Effective date: 20161201