NL1011297A1 - Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging. - Google Patents

Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging.

Info

Publication number
NL1011297A1
NL1011297A1 NL1011297A NL1011297A NL1011297A1 NL 1011297 A1 NL1011297 A1 NL 1011297A1 NL 1011297 A NL1011297 A NL 1011297A NL 1011297 A NL1011297 A NL 1011297A NL 1011297 A1 NL1011297 A1 NL 1011297A1
Authority
NL
Netherlands
Prior art keywords
carrier table
photo mask
manufacturing device
drill holes
extrusions
Prior art date
Application number
NL1011297A
Other languages
English (en)
Other versions
NL1011297C2 (nl
Inventor
Volker Seibert
Ulf Schniering
Konrad Knapp
Original Assignee
Glas Schott
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Glas Schott filed Critical Glas Schott
Publication of NL1011297A1 publication Critical patent/NL1011297A1/nl
Application granted granted Critical
Publication of NL1011297C2 publication Critical patent/NL1011297C2/nl

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
NL1011297A 1998-02-13 1999-02-12 Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging. NL1011297C2 (nl)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19805875A DE19805875C1 (de) 1998-02-13 1998-02-13 Trägertisch für eine Photomaske in einer Vorrichtung zur Mikrochip-Herstellung
DE19805875 1998-02-13

Publications (2)

Publication Number Publication Date
NL1011297A1 true NL1011297A1 (nl) 1999-08-16
NL1011297C2 NL1011297C2 (nl) 1999-09-08

Family

ID=7857586

Family Applications (1)

Application Number Title Priority Date Filing Date
NL1011297A NL1011297C2 (nl) 1998-02-13 1999-02-12 Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging.

Country Status (2)

Country Link
DE (1) DE19805875C1 (nl)
NL (1) NL1011297C2 (nl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4136363B2 (ja) 2001-11-29 2008-08-20 キヤノン株式会社 位置決め装置及びそれを用いた露光装置
SG115678A1 (en) 2003-04-22 2005-10-28 Asml Netherlands Bv Substrate carrier and method for making a substrate carrier
EP1471388B1 (en) * 2003-04-22 2009-03-11 ASML Netherlands B.V. A carrier and method for making a carrier

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4516253A (en) * 1983-03-15 1985-05-07 Micronix Partners Lithography system
DE8800272U1 (de) * 1988-01-13 1988-02-25 Convac GmbH, 7135 Wiernsheim Träger für Fotomasken zur Herstellung von elektrischen intgegrierten Schaltungsbauelementen
NL9100421A (nl) * 1991-03-08 1992-10-01 Asm Lithography Bv Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting.

Also Published As

Publication number Publication date
NL1011297C2 (nl) 1999-09-08
DE19805875C1 (de) 1999-04-08

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Legal Events

Date Code Title Description
SD Assignments of patents

Owner name: SCHOTT AG

Effective date: 20060612

V1 Lapsed because of non-payment of the annual fee

Effective date: 20130901