NL1011297A1 - Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging. - Google Patents
Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging.Info
- Publication number
- NL1011297A1 NL1011297A1 NL1011297A NL1011297A NL1011297A1 NL 1011297 A1 NL1011297 A1 NL 1011297A1 NL 1011297 A NL1011297 A NL 1011297A NL 1011297 A NL1011297 A NL 1011297A NL 1011297 A1 NL1011297 A1 NL 1011297A1
- Authority
- NL
- Netherlands
- Prior art keywords
- carrier table
- photo mask
- manufacturing device
- drill holes
- extrusions
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19805875A DE19805875C1 (de) | 1998-02-13 | 1998-02-13 | Trägertisch für eine Photomaske in einer Vorrichtung zur Mikrochip-Herstellung |
DE19805875 | 1998-02-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
NL1011297A1 true NL1011297A1 (nl) | 1999-08-16 |
NL1011297C2 NL1011297C2 (nl) | 1999-09-08 |
Family
ID=7857586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NL1011297A NL1011297C2 (nl) | 1998-02-13 | 1999-02-12 | Dragertafel voor een fotomasker in een inrichting voor microchipvervaardiging. |
Country Status (2)
Country | Link |
---|---|
DE (1) | DE19805875C1 (nl) |
NL (1) | NL1011297C2 (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4136363B2 (ja) | 2001-11-29 | 2008-08-20 | キヤノン株式会社 | 位置決め装置及びそれを用いた露光装置 |
EP1471388B1 (en) * | 2003-04-22 | 2009-03-11 | ASML Netherlands B.V. | A carrier and method for making a carrier |
DE602004019835D1 (de) | 2003-04-22 | 2009-04-23 | Asml Netherlands Bv | Träger und Verfahren zur Herstellung eines Trägers |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4516253A (en) * | 1983-03-15 | 1985-05-07 | Micronix Partners | Lithography system |
DE8800272U1 (nl) * | 1988-01-13 | 1988-02-25 | Convac Gmbh, 7135 Wiernsheim, De | |
NL9100421A (nl) * | 1991-03-08 | 1992-10-01 | Asm Lithography Bv | Ondersteuningsinrichting met een kantelbare objecttafel alsmede optisch lithografische inrichting voorzien van een dergelijke ondersteuningsinrichting. |
-
1998
- 1998-02-13 DE DE19805875A patent/DE19805875C1/de not_active Expired - Fee Related
-
1999
- 1999-02-12 NL NL1011297A patent/NL1011297C2/nl not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
DE19805875C1 (de) | 1999-04-08 |
NL1011297C2 (nl) | 1999-09-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
SD | Assignments of patents |
Owner name: SCHOTT AG Effective date: 20060612 |
|
V1 | Lapsed because of non-payment of the annual fee |
Effective date: 20130901 |