MY198070A - Isfet integrated with a micro-heater and fabrication method thereof - Google Patents

Isfet integrated with a micro-heater and fabrication method thereof

Info

Publication number
MY198070A
MY198070A MYPI2014701279A MYPI2014701279A MY198070A MY 198070 A MY198070 A MY 198070A MY PI2014701279 A MYPI2014701279 A MY PI2014701279A MY PI2014701279 A MYPI2014701279 A MY PI2014701279A MY 198070 A MY198070 A MY 198070A
Authority
MY
Malaysia
Prior art keywords
heater
micro
isfet
integrated
present
Prior art date
Application number
MYPI2014701279A
Inventor
Bien Chia Sheng Daniel
Hing Wah Lee
Binti Md Razib Nadia
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI2014701279A priority Critical patent/MY198070A/en
Priority to PCT/MY2015/000032 priority patent/WO2015178754A1/en
Publication of MY198070A publication Critical patent/MY198070A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/414—Ion-sensitive or chemical field-effect transistors, i.e. ISFETS or CHEMFETS

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

The present invention relates to an ISFET integrated with a heating element, particularly a micro-heater (130), for gas sensing application. A method for fabricating the ISFET with the micro-heater (130) is also disclosed in the present invention. By using the method of the present invention, the ISFET with the micro-heater (130) has optimum performance and detection sensitivity to its environment changes, while reducing potential damage on the sensing membrane element (114) (123). Furthermore, the configuration of the ISFET which includes at least two silicon substrates (110) (120) enables the fabrication of the ISFET device with the micro-heater (130) to be more effective, leaves no air gap, and does not block the micro-heater (130) and the sensing membrane element (114) (123) during detection. Thus, the sensing membrane element (114) (123) and the micro-heater (130) are fully exposed to the change of its environment. (Figure 1J)
MYPI2014701279A 2014-05-20 2014-05-20 Isfet integrated with a micro-heater and fabrication method thereof MY198070A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI2014701279A MY198070A (en) 2014-05-20 2014-05-20 Isfet integrated with a micro-heater and fabrication method thereof
PCT/MY2015/000032 WO2015178754A1 (en) 2014-05-20 2015-05-13 Isfet integrated with a micro-heater and fabrication method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI2014701279A MY198070A (en) 2014-05-20 2014-05-20 Isfet integrated with a micro-heater and fabrication method thereof

Publications (1)

Publication Number Publication Date
MY198070A true MY198070A (en) 2023-07-31

Family

ID=54554332

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2014701279A MY198070A (en) 2014-05-20 2014-05-20 Isfet integrated with a micro-heater and fabrication method thereof

Country Status (2)

Country Link
MY (1) MY198070A (en)
WO (1) WO2015178754A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63101740A (en) * 1986-10-17 1988-05-06 Nippon Telegr & Teleph Corp <Ntt> Vertical fet type gas sensor
JP2706252B2 (en) * 1988-02-21 1998-01-28 科学技術振興事業団 Extended gate FET ion sensor
GB2321336B (en) * 1997-01-15 2001-07-25 Univ Warwick Gas-sensing semiconductor devices
JP4389031B2 (en) * 2006-12-06 2009-12-24 国立大学法人 岡山大学 Gas sensor
MY162299A (en) * 2009-10-20 2017-05-31 Mimos Berhad Inverted isfet and method of producing thereof
MY164424A (en) * 2011-03-03 2017-12-15 Mimos Berhad A sensor system and a method for fabricating thereof

Also Published As

Publication number Publication date
WO2015178754A1 (en) 2015-11-26

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