MY171095A - Igbt and method of manufacturing the same - Google Patents

Igbt and method of manufacturing the same

Info

Publication number
MY171095A
MY171095A MYPI2014700738A MYPI2014700738A MY171095A MY 171095 A MY171095 A MY 171095A MY PI2014700738 A MYPI2014700738 A MY PI2014700738A MY PI2014700738 A MYPI2014700738 A MY PI2014700738A MY 171095 A MY171095 A MY 171095A
Authority
MY
Malaysia
Prior art keywords
region
top body
trench
body region
floating
Prior art date
Application number
MYPI2014700738A
Inventor
Masaru Senoo
Kyosuke Miyagi
Tsuyoshi Nishiwaki
Jun Saito
Original Assignee
Toyota Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Motor Co Ltd filed Critical Toyota Motor Co Ltd
Priority to MYPI2014700738A priority Critical patent/MY171095A/en
Priority claimed from PCT/JP2011/072274 external-priority patent/WO2013046378A1/en
Publication of MY171095A publication Critical patent/MY171095A/en

Links

Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)

Abstract

An IGBT (10) has an emitter region (20), a top body region (22) that is fonned below the emitter region (20), a floating region (24) that is formed below the top body region (22), a 5 bottom body region (26) that is fonned below the floating region (24), a trench ( 40), a gate insulating film (46) that covers an inner face of the trench (40), and a gate electrode (44) that is arranged inside the trench ( 40). When a distribution of a concentration of p-type impurities in the top body region (22) and the floating region (24), which are located below the emitter region (20), is viewed along a thickness direction of a semiconductor substrate (12), the 10 concentration of the p-type impurities decreases as a downward distance increases from an upper end of the top body region (22) that is located below the emitter region (20), and assumes a local minimum value at a predete1mined depth in the floating region (24).
MYPI2014700738A 2011-09-28 2011-09-28 Igbt and method of manufacturing the same MY171095A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI2014700738A MY171095A (en) 2011-09-28 2011-09-28 Igbt and method of manufacturing the same

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
MYPI2014700738A MY171095A (en) 2011-09-28 2011-09-28 Igbt and method of manufacturing the same
PCT/JP2011/072274 WO2013046378A1 (en) 2011-09-28 2011-09-28 Igbt and manufacturing method therefor

Publications (1)

Publication Number Publication Date
MY171095A true MY171095A (en) 2019-09-25

Family

ID=79259652

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2014700738A MY171095A (en) 2011-09-28 2011-09-28 Igbt and method of manufacturing the same

Country Status (1)

Country Link
MY (1) MY171095A (en)

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