MY166716A - Polishing pad comprising transmissive region - Google Patents

Polishing pad comprising transmissive region

Info

Publication number
MY166716A
MY166716A MYPI2013001771A MYPI2013001771A MY166716A MY 166716 A MY166716 A MY 166716A MY PI2013001771 A MYPI2013001771 A MY PI2013001771A MY PI2013001771 A MYPI2013001771 A MY PI2013001771A MY 166716 A MY166716 A MY 166716A
Authority
MY
Malaysia
Prior art keywords
polishing pad
region
transmissive region
pad body
translucent window
Prior art date
Application number
MYPI2013001771A
Inventor
Abaneshwar Prasad
Kelly Newell
Original Assignee
Cabot Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cabot Microelectronics Corp filed Critical Cabot Microelectronics Corp
Publication of MY166716A publication Critical patent/MY166716A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

THE INVENTION PROVIDES A POLISHING PAD COMPRISING AN OPTICALLY TRANS MISSIVE REGION, WHEREIN THE POLISHING PAD COMPRISES A POLISHING PAD BODY COMPRISING AN OPAQUE FIRST REGION AND AN OPTICALLY TRANS MISSIVE SECOND REGION, WHEREIN THE SECOND REGION HAS AT LEAST ONE RECESS FORMED THEREIN OF AT LEAST ONE PART OF THE POLISHING PAD BODY, AND AT LEAST ONE TRANSLUCENT WINDOW INSERT IS INTEGRATED INTO THE AT LEAST ONE RECESSED AREA. THE POLISHING PAD BODY AND THE AT LEAST ONE TRANSLUCENT WINDOW INSERT COMPRISE DIFFERENT POROUS MATERIALS.
MYPI2013001771A 2010-11-18 2011-11-18 Polishing pad comprising transmissive region MY166716A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US41501510P 2010-11-18 2010-11-18

Publications (1)

Publication Number Publication Date
MY166716A true MY166716A (en) 2018-07-18

Family

ID=46084662

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2013001771A MY166716A (en) 2010-11-18 2011-11-18 Polishing pad comprising transmissive region

Country Status (8)

Country Link
US (1) US20130237136A1 (en)
EP (1) EP2641268A4 (en)
JP (1) JP5918254B2 (en)
KR (1) KR101602544B1 (en)
CN (1) CN103222034B (en)
MY (1) MY166716A (en)
SG (1) SG190249A1 (en)
WO (1) WO2012068428A2 (en)

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WO2013123105A2 (en) * 2012-02-14 2013-08-22 Innopad, Inc. Method of manufacturing a chemical mechanical planarization pad
US20140370788A1 (en) * 2013-06-13 2014-12-18 Cabot Microelectronics Corporation Low surface roughness polishing pad
CN106853610B (en) * 2015-12-08 2019-11-01 中芯国际集成电路制造(北京)有限公司 Polishing pad and its monitoring method and monitoring system
KR101829542B1 (en) * 2016-07-27 2018-02-23 신우유니온(주) Manufacturing method of buffer for nails
US9925637B2 (en) * 2016-08-04 2018-03-27 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Tapered poromeric polishing pad
US11325221B2 (en) * 2017-11-16 2022-05-10 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with multipurpose composite window
US11192215B2 (en) * 2017-11-16 2021-12-07 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Polishing pad with pad wear indicator
US11260495B2 (en) * 2018-07-27 2022-03-01 Taiwan Semiconductor Manufacturing Company Ltd. Apparatus and methods for chemical mechanical polishing
JP7317440B2 (en) * 2019-04-15 2023-07-31 株式会社ディスコ dressing tool
JP7220130B2 (en) * 2019-07-11 2023-02-09 株式会社クラレ Polishing pad and polishing pad manufacturing method
KR102593117B1 (en) * 2021-07-02 2023-10-24 에스케이엔펄스 주식회사 Polishing pad and preparing method of semiconductor device using the same

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US5433651A (en) * 1993-12-22 1995-07-18 International Business Machines Corporation In-situ endpoint detection and process monitoring method and apparatus for chemical-mechanical polishing
US5893796A (en) * 1995-03-28 1999-04-13 Applied Materials, Inc. Forming a transparent window in a polishing pad for a chemical mechanical polishing apparatus
US5605760A (en) * 1995-08-21 1997-02-25 Rodel, Inc. Polishing pads
US6146248A (en) * 1997-05-28 2000-11-14 Lam Research Corporation Method and apparatus for in-situ end-point detection and optimization of a chemical-mechanical polishing process using a linear polisher
US5888120A (en) * 1997-09-29 1999-03-30 Lsi Logic Corporation Method and apparatus for chemical mechanical polishing
US6068539A (en) * 1998-03-10 2000-05-30 Lam Research Corporation Wafer polishing device with movable window
US6248000B1 (en) * 1998-03-24 2001-06-19 Nikon Research Corporation Of America Polishing pad thinning to optically access a semiconductor wafer surface
US6280289B1 (en) * 1998-11-02 2001-08-28 Applied Materials, Inc. Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers
US6190234B1 (en) * 1999-01-25 2001-02-20 Applied Materials, Inc. Endpoint detection with light beams of different wavelengths
US6716085B2 (en) * 2001-12-28 2004-04-06 Applied Materials Inc. Polishing pad with transparent window
US6247998B1 (en) * 1999-01-25 2001-06-19 Applied Materials, Inc. Method and apparatus for determining substrate layer thickness during chemical mechanical polishing
US6071177A (en) * 1999-03-30 2000-06-06 Taiwan Semiconductor Manufacturing Co., Ltd Method and apparatus for determining end point in a polishing process
US6213845B1 (en) * 1999-04-26 2001-04-10 Micron Technology, Inc. Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies and methods for making and using same
US6135859A (en) * 1999-04-30 2000-10-24 Applied Materials, Inc. Chemical mechanical polishing with a polishing sheet and a support sheet
US6171181B1 (en) * 1999-08-17 2001-01-09 Rodel Holdings, Inc. Molded polishing pad having integral window
WO2001023141A1 (en) * 1999-09-29 2001-04-05 Rodel Holdings, Inc. Polishing pad
JP2001110762A (en) * 1999-10-04 2001-04-20 Asahi Kasei Corp Polishing pad
US8485862B2 (en) * 2000-05-19 2013-07-16 Applied Materials, Inc. Polishing pad for endpoint detection and related methods
US6840843B2 (en) * 2001-03-01 2005-01-11 Cabot Microelectronics Corporation Method for manufacturing a polishing pad having a compressed translucent region
JP4131632B2 (en) * 2001-06-15 2008-08-13 株式会社荏原製作所 Polishing apparatus and polishing pad
JP2003133270A (en) * 2001-10-26 2003-05-09 Jsr Corp Window material for chemical mechanical polishing and polishing pad
KR100541545B1 (en) * 2003-06-16 2006-01-11 삼성전자주식회사 Polishing table of a chemical mechanical polishing apparatus
US6884156B2 (en) * 2003-06-17 2005-04-26 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
US7435161B2 (en) * 2003-06-17 2008-10-14 Cabot Microelectronics Corporation Multi-layer polishing pad material for CMP
US7195539B2 (en) * 2003-09-19 2007-03-27 Cabot Microelectronics Coporation Polishing pad with recessed window
US7264536B2 (en) * 2003-09-23 2007-09-04 Applied Materials, Inc. Polishing pad with window
US8066552B2 (en) * 2003-10-03 2011-11-29 Applied Materials, Inc. Multi-layer polishing pad for low-pressure polishing
US8075372B2 (en) * 2004-09-01 2011-12-13 Cabot Microelectronics Corporation Polishing pad with microporous regions
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KR101324644B1 (en) * 2005-08-22 2013-11-01 어플라이드 머티어리얼스, 인코포레이티드 Apparatus and methods for spectrum based monitoring of chemical mechanical polishing
US7210980B2 (en) * 2005-08-26 2007-05-01 Applied Materials, Inc. Sealed polishing pad, system and methods
US20070197145A1 (en) * 2006-02-15 2007-08-23 Applied Materials, Inc. Polishing article with window stripe
JP5110677B2 (en) * 2006-05-17 2012-12-26 東洋ゴム工業株式会社 Polishing pad
US7942724B2 (en) * 2006-07-03 2011-05-17 Applied Materials, Inc. Polishing pad with window having multiple portions
JP2008226911A (en) * 2007-03-08 2008-09-25 Jsr Corp Chemical and mechanical polishing pad, lamination pad for chemical mechanical polishing, and chemical and mechanical polishing method
JP5363470B2 (en) * 2007-06-08 2013-12-11 アプライド マテリアルズ インコーポレイテッド Thin polishing pad with window and molding process
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Also Published As

Publication number Publication date
EP2641268A2 (en) 2013-09-25
KR101602544B1 (en) 2016-03-10
SG190249A1 (en) 2013-06-28
WO2012068428A2 (en) 2012-05-24
CN103222034B (en) 2016-03-09
EP2641268A4 (en) 2017-01-25
US20130237136A1 (en) 2013-09-12
WO2012068428A3 (en) 2012-08-16
JP5918254B2 (en) 2016-05-18
CN103222034A (en) 2013-07-24
JP2013542863A (en) 2013-11-28
KR20130116892A (en) 2013-10-24

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