MY155336A - Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed - Google Patents
Film-forming apparatus, carrier and method of manufacturing substrate on which film is formedInfo
- Publication number
- MY155336A MY155336A MYPI2014700910A MYPI2014700910A MY155336A MY 155336 A MY155336 A MY 155336A MY PI2014700910 A MYPI2014700910 A MY PI2014700910A MY PI2014700910 A MYPI2014700910 A MY PI2014700910A MY 155336 A MY155336 A MY 155336A
- Authority
- MY
- Malaysia
- Prior art keywords
- carrier
- film
- horizontal
- rod
- forming apparatus
- Prior art date
Links
Landscapes
- Manufacturing Of Magnetic Record Carriers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A carrier is stably transported while suppressing vibrations of the carrier generated in transporting the carrier. Since, of a first rod-like member (310), a first support surface (7X) supporting a carrier (25) from beneath is inclined 45° with respect to the horizontal direction, a first horizontal-direction load (7B) acting in the horizontal direction is imposed on the carrier (25). Moreover, since, of a second rod-like member (320), a second support surface (7Y) supporting the carrier (25) from beneath is inclined 45° with respect to the horizontal direction, a second horizontal-direction load (7C) acting in the horizontal direction is imposed on the carrier (25). In this case, the carrier (25) is pressed against the second rod-like member (320) by the first horizontal-direction (7B), and is pressed against the first rod-like member (310) by the second horizontal-direction load (7C). Consequently, vibrations of the carrier (25) in the thickness direction thereof are suppressed.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2013273561 | 2013-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY155336A true MY155336A (en) | 2015-10-01 |
Family
ID=51377212
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI2014700910A MY155336A (en) | 2013-12-27 | 2014-04-14 | Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed |
Country Status (3)
Country | Link |
---|---|
CN (2) | CN203794979U (en) |
MY (1) | MY155336A (en) |
SG (1) | SG10201401376TA (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG10201401376TA (en) * | 2013-12-27 | 2015-07-30 | Showa Denko Kk | Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009277275A (en) * | 2008-05-13 | 2009-11-26 | Showa Denko Kk | Manufacturing method and apparatus for magnetic recording medium |
JP5566669B2 (en) * | 2009-11-19 | 2014-08-06 | 昭和電工株式会社 | In-line film forming apparatus and method for manufacturing magnetic recording medium |
SG10201401376TA (en) * | 2013-12-27 | 2015-07-30 | Showa Denko Kk | Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed |
-
2014
- 2014-04-09 SG SG10201401376TA patent/SG10201401376TA/en unknown
- 2014-04-14 MY MYPI2014700910A patent/MY155336A/en unknown
- 2014-04-15 CN CN201420182418.4U patent/CN203794979U/en not_active Expired - Fee Related
- 2014-04-15 CN CN201410150985.6A patent/CN104746032B/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN104746032B (en) | 2017-04-12 |
CN104746032A (en) | 2015-07-01 |
SG10201401376TA (en) | 2015-07-30 |
CN203794979U (en) | 2014-08-27 |
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