MY155336A - Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed - Google Patents

Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Info

Publication number
MY155336A
MY155336A MYPI2014700910A MYPI2014700910A MY155336A MY 155336 A MY155336 A MY 155336A MY PI2014700910 A MYPI2014700910 A MY PI2014700910A MY PI2014700910 A MYPI2014700910 A MY PI2014700910A MY 155336 A MY155336 A MY 155336A
Authority
MY
Malaysia
Prior art keywords
carrier
film
horizontal
rod
forming apparatus
Prior art date
Application number
MYPI2014700910A
Inventor
Tomoya Utashiro
Original Assignee
Showa Denko Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Denko Kk filed Critical Showa Denko Kk
Publication of MY155336A publication Critical patent/MY155336A/en

Links

Landscapes

  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A carrier is stably transported while suppressing vibrations of the carrier generated in transporting the carrier. Since, of a first rod-like member (310), a first support surface (7X) supporting a carrier (25) from beneath is inclined 45° with respect to the horizontal direction, a first horizontal-direction load (7B) acting in the horizontal direction is imposed on the carrier (25). Moreover, since, of a second rod-like member (320), a second support surface (7Y) supporting the carrier (25) from beneath is inclined 45° with respect to the horizontal direction, a second horizontal-direction load (7C) acting in the horizontal direction is imposed on the carrier (25). In this case, the carrier (25) is pressed against the second rod-like member (320) by the first horizontal-direction (7B), and is pressed against the first rod-like member (310) by the second horizontal-direction load (7C). Consequently, vibrations of the carrier (25) in the thickness direction thereof are suppressed.
MYPI2014700910A 2013-12-27 2014-04-14 Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed MY155336A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2013273561 2013-12-27

Publications (1)

Publication Number Publication Date
MY155336A true MY155336A (en) 2015-10-01

Family

ID=51377212

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI2014700910A MY155336A (en) 2013-12-27 2014-04-14 Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Country Status (3)

Country Link
CN (2) CN203794979U (en)
MY (1) MY155336A (en)
SG (1) SG10201401376TA (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG10201401376TA (en) * 2013-12-27 2015-07-30 Showa Denko Kk Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009277275A (en) * 2008-05-13 2009-11-26 Showa Denko Kk Manufacturing method and apparatus for magnetic recording medium
JP5566669B2 (en) * 2009-11-19 2014-08-06 昭和電工株式会社 In-line film forming apparatus and method for manufacturing magnetic recording medium
SG10201401376TA (en) * 2013-12-27 2015-07-30 Showa Denko Kk Film-forming apparatus, carrier and method of manufacturing substrate on which film is formed

Also Published As

Publication number Publication date
CN104746032B (en) 2017-04-12
CN104746032A (en) 2015-07-01
SG10201401376TA (en) 2015-07-30
CN203794979U (en) 2014-08-27

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