MY143881A - Fabrication method of a micromechanical device - Google Patents

Fabrication method of a micromechanical device

Info

Publication number
MY143881A
MY143881A MYPI20071932A MYPI20071932A MY143881A MY 143881 A MY143881 A MY 143881A MY PI20071932 A MYPI20071932 A MY PI20071932A MY PI20071932 A MYPI20071932 A MY PI20071932A MY 143881 A MY143881 A MY 143881A
Authority
MY
Malaysia
Prior art keywords
layer
dielectric layer
micromechanical device
conductive layer
fabrication method
Prior art date
Application number
MYPI20071932A
Inventor
Muhamad Ramdzan Buyong
Azlina Mohd Zain
Siti Aishah Mohamad
Mohd Ismahadi Syono
Lee Hing Wah
Shahrir Rizal Kasjoo
Original Assignee
Mimos Berhad
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mimos Berhad filed Critical Mimos Berhad
Priority to MYPI20071932A priority Critical patent/MY143881A/en
Priority to PCT/MY2008/000128 priority patent/WO2009061168A1/en
Publication of MY143881A publication Critical patent/MY143881A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

FABRICATION METHOD OF A MICROMECHANICAL DEVICE 5 A METHOD FOR FABRICATING A MICROMECHANICAL DEVICE COMPRISES THE STEPS OF PROVIDING A SUBSTRATE HAVING A FIRST DIELECTRIC LAYER ON TOP SURFACE OF SAID SUBSTRATE, A BOTTOM CONDUCTIVE LAYER ON TOP SURFACE OF SAID FIRST DIELECTRIC LAYER, A SECOND DIELECTRIC LAYER ON SAID BOTTOM CONDUCTIVE LAYER, A 0 SACRIFICIAL LAYER ON SAID SECOND DIELECTRIC LAYER, A THIRD DIELECTRIC LAYER ON SAID SACRIFICIAL LAYER, AND A TOP CONDUCTIVE LAYER ON SAID THIRD DIELECTRIC LAYER, ETCHING A PLURALITY OF HOLES AT SAID TOP CONDUCTIVE LAYER, THEN AT SAID THIRD DIELECTRIC LAYER AND SAID SACRIFICIAL LAYER, AND SEALING 5 SAID ETCHED HOLES OF SAID TOP CONDUCTIVE LAYER AND THIRD DIELECTRIC LAYER BY DEPOSITING A FOURTH DIELECTRIC LAYER ON TOP OF SAID TOP CONDUCTIVE LAYER. MOST ILLUSTRATIVE DIAGRAM:
MYPI20071932A 2007-11-07 2007-11-07 Fabrication method of a micromechanical device MY143881A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
MYPI20071932A MY143881A (en) 2007-11-07 2007-11-07 Fabrication method of a micromechanical device
PCT/MY2008/000128 WO2009061168A1 (en) 2007-11-07 2008-11-06 Fabrication method of a micromechanical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20071932A MY143881A (en) 2007-11-07 2007-11-07 Fabrication method of a micromechanical device

Publications (1)

Publication Number Publication Date
MY143881A true MY143881A (en) 2011-07-15

Family

ID=40625958

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20071932A MY143881A (en) 2007-11-07 2007-11-07 Fabrication method of a micromechanical device

Country Status (2)

Country Link
MY (1) MY143881A (en)
WO (1) WO2009061168A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2481425A (en) 2010-06-23 2011-12-28 Iti Scotland Ltd Method and device for assembling polynucleic acid sequences

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69922727T2 (en) * 1998-03-31 2005-12-15 Hitachi, Ltd. Capacitive pressure transducer
WO2004037711A2 (en) * 2002-10-23 2004-05-06 Rutgers, The State University Of New Jersey Processes for hermetically packaging wafer level microscopic structures
JP4724488B2 (en) * 2005-02-25 2011-07-13 日立オートモティブシステムズ株式会社 Integrated microelectromechanical system

Also Published As

Publication number Publication date
WO2009061168A1 (en) 2009-05-14

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