MY142057A - Production method and production apparatus of disc - Google Patents

Production method and production apparatus of disc

Info

Publication number
MY142057A
MY142057A MYPI20064073A MY142057A MY 142057 A MY142057 A MY 142057A MY PI20064073 A MYPI20064073 A MY PI20064073A MY 142057 A MY142057 A MY 142057A
Authority
MY
Malaysia
Prior art keywords
coating
disc
production
spinning
disc substrate
Prior art date
Application number
Inventor
Naoto Ozawa
Takayuki Suzuki
Tomoyuki Saitou
Hideo Kobayashi
Kosuke Inaya
Original Assignee
Origin Electric
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Origin Electric filed Critical Origin Electric
Priority to MYPI20064073 priority Critical patent/MY142057A/en
Publication of MY142057A publication Critical patent/MY142057A/en

Links

Abstract

THIS DISC PRODUCTION METHOD INCLUDES A STEP OF FORMING A COATING (W) ON A DISC SUBSTRATE (0) BY DRYING THE COATING (W) AFTER COATING A COATING MATERIAL (W) WHILE THE DISC SUBSTRATE (D) IS SPINNING; A STEP OF DETECTING MOVING OF A BOUNDARY BETWEEN A DRIED AREA AND A WET AREA ON THE COATING (W) THAT IS SPINNING; A STEP OF MEASURING A DISTRIBUTION OF A COATING THICKNESS AFTER DRYING; AND A STEP OF CONTROLLING A SPINNING SPEED OF THE DISC SUBSTRATE (D) BASED ON A RELATIONSHIP BETWEEN THE MOVING OF THE BOUNDARY WHICH IS DETECTED AND THE DISTRIBUTION OF THE COATING THICKNESS.
MYPI20064073 2006-09-01 2006-09-01 Production method and production apparatus of disc MY142057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MYPI20064073 MY142057A (en) 2006-09-01 2006-09-01 Production method and production apparatus of disc

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MYPI20064073 MY142057A (en) 2006-09-01 2006-09-01 Production method and production apparatus of disc

Publications (1)

Publication Number Publication Date
MY142057A true MY142057A (en) 2010-08-30

Family

ID=44256669

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20064073 MY142057A (en) 2006-09-01 2006-09-01 Production method and production apparatus of disc

Country Status (1)

Country Link
MY (1) MY142057A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160086864A1 (en) * 2014-09-24 2016-03-24 Lam Research Corporation Movable gas nozzle in drying module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160086864A1 (en) * 2014-09-24 2016-03-24 Lam Research Corporation Movable gas nozzle in drying module

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