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Application filed by Origin ElectricfiledCriticalOrigin Electric
Priority to MYPI20064073priorityCriticalpatent/MY142057A/en
Publication of MY142057ApublicationCriticalpatent/MY142057A/en
THIS DISC PRODUCTION METHOD INCLUDES A STEP OF FORMING A COATING (W) ON A DISC SUBSTRATE (0) BY DRYING THE COATING (W) AFTER COATING A COATING MATERIAL (W) WHILE THE DISC SUBSTRATE (D) IS SPINNING; A STEP OF DETECTING MOVING OF A BOUNDARY BETWEEN A DRIED AREA AND A WET AREA ON THE COATING (W) THAT IS SPINNING; A STEP OF MEASURING A DISTRIBUTION OF A COATING THICKNESS AFTER DRYING; AND A STEP OF CONTROLLING A SPINNING SPEED OF THE DISC SUBSTRATE (D) BASED ON A RELATIONSHIP BETWEEN THE MOVING OF THE BOUNDARY WHICH IS DETECTED AND THE DISTRIBUTION OF THE COATING THICKNESS.
MYPI200640732006-09-012006-09-01Production method and production apparatus of disc
MY142057A
(en)
method for calibrating a coating sensing device to measure the amount of coating material on a coated sheet substrate, coating sensing device, and method for controlling the formation of a coated sheet substrate
Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program