MY140331A - Wafer container with door actuated wafer restraint - Google Patents
Wafer container with door actuated wafer restraintInfo
- Publication number
- MY140331A MY140331A MYPI20044761A MY140331A MY 140331 A MY140331 A MY 140331A MY PI20044761 A MYPI20044761 A MY PI20044761A MY 140331 A MY140331 A MY 140331A
- Authority
- MY
- Malaysia
- Prior art keywords
- wafer
- door
- container
- door frame
- restraint means
- Prior art date
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US52081703P | 2003-11-16 | 2003-11-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY140331A true MY140331A (en) | 2009-12-31 |
Family
ID=37674917
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20044761 MY140331A (en) | 2003-11-16 | 2004-11-17 | Wafer container with door actuated wafer restraint |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN1906098A (zh) |
MY (1) | MY140331A (zh) |
TW (2) | TWI333923B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150023941A (ko) | 2008-01-13 | 2015-03-05 | 엔테그리스, 아이엔씨. | 큰 지름의 웨이퍼를 취급하는 장치 및 방법 |
JP5374640B2 (ja) * | 2010-04-20 | 2013-12-25 | ミライアル株式会社 | 基板収納容器 |
WO2016046985A1 (ja) * | 2014-09-26 | 2016-03-31 | ミライアル株式会社 | 基板収納容器 |
TWI733345B (zh) * | 2020-02-21 | 2021-07-11 | 迅得機械股份有限公司 | 自動閉鎖裝置 |
-
2004
- 2004-11-16 TW TW93135026A patent/TWI333923B/zh not_active IP Right Cessation
- 2004-11-16 TW TW093135027A patent/TWI366547B/zh active
- 2004-11-16 CN CN 200480040448 patent/CN1906098A/zh active Pending
- 2004-11-17 MY MYPI20044761 patent/MY140331A/en unknown
Also Published As
Publication number | Publication date |
---|---|
TW200526485A (en) | 2005-08-16 |
TW200523193A (en) | 2005-07-16 |
TWI333923B (en) | 2010-12-01 |
TWI366547B (en) | 2012-06-21 |
CN1906098A (zh) | 2007-01-31 |
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