MY140331A - Wafer container with door actuated wafer restraint - Google Patents

Wafer container with door actuated wafer restraint

Info

Publication number
MY140331A
MY140331A MYPI20044761A MY140331A MY 140331 A MY140331 A MY 140331A MY PI20044761 A MYPI20044761 A MY PI20044761A MY 140331 A MY140331 A MY 140331A
Authority
MY
Malaysia
Prior art keywords
wafer
door
container
door frame
restraint means
Prior art date
Application number
Other languages
English (en)
Inventor
John Burns
Matthew A Fuller
Jeffery J King
Martin L Forbes
Mark V Smith
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of MY140331A publication Critical patent/MY140331A/en

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)
MYPI20044761 2003-11-16 2004-11-17 Wafer container with door actuated wafer restraint MY140331A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US52081703P 2003-11-16 2003-11-16

Publications (1)

Publication Number Publication Date
MY140331A true MY140331A (en) 2009-12-31

Family

ID=37674917

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI20044761 MY140331A (en) 2003-11-16 2004-11-17 Wafer container with door actuated wafer restraint

Country Status (3)

Country Link
CN (1) CN1906098A (zh)
MY (1) MY140331A (zh)
TW (2) TWI333923B (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150023941A (ko) 2008-01-13 2015-03-05 엔테그리스, 아이엔씨. 큰 지름의 웨이퍼를 취급하는 장치 및 방법
JP5374640B2 (ja) * 2010-04-20 2013-12-25 ミライアル株式会社 基板収納容器
WO2016046985A1 (ja) * 2014-09-26 2016-03-31 ミライアル株式会社 基板収納容器
TWI733345B (zh) * 2020-02-21 2021-07-11 迅得機械股份有限公司 自動閉鎖裝置

Also Published As

Publication number Publication date
TW200526485A (en) 2005-08-16
TW200523193A (en) 2005-07-16
TWI333923B (en) 2010-12-01
TWI366547B (en) 2012-06-21
CN1906098A (zh) 2007-01-31

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