MY137625A - Wafer container with secondary wafer restraint system - Google Patents
Wafer container with secondary wafer restraint systemInfo
- Publication number
- MY137625A MY137625A MYPI20055448A MY137625A MY 137625 A MY137625 A MY 137625A MY PI20055448 A MYPI20055448 A MY PI20055448A MY 137625 A MY137625 A MY 137625A
- Authority
- MY
- Malaysia
- Prior art keywords
- wafer
- restraint
- container
- tile
- opposing
- Prior art date
Links
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
WAFER CONTAINER WITH SECONDARY WAFER RESTRAINT SYSTEM A WAFER CONTAINER PROVIDING IMPROVED IAFER RESTRAINT DURING PHYSICAL SHOCK EVENTS. IN EMBODIMENTS OF THE INVENTION, A SECONDARY WAFER RESTRAINT STRUCTURE DEFINING A 5 PLURALITY OF NOTCHES IS INTERPOSED BETWEEN OPPOSING WAFER RESTRAINT MEMBERS OIL THE DOOR OF TILE CONTAINER. TILE NOTCHES MAY BE DEFINED BY ONE OI MORE CONVERGING EDGES OR SIN FICES INECTING AT A JUNCTION. THE JUNCTIONS ARE POSITIONED SO AS TO ALIGN WITH (HE WAFER RECEIVING PORTIONS OFEACH OPPOSING PAIR OF WAFER RESTRAINT MEMBER SO THAT WHEN ILIC DOOR IS FULLY SEALINGLY ENGAGED WITH TILE ENCLOSURE OF TILE CONTAINER, THE EDGE OF THE VLT'CT IS 10 CONTACTING THE JUNCTION. IN THIS POSITION, ANY VERTICAL MOVEMENT OFTHE WAFER DUE TO SHOCK IMPARIED TO THE CONTAINER CAUSES (LIE WAFER TO CONTACT THE CONVERGMG SURFACES OR EDGES, THEIEBV HUNTING SUCH TNOVCMEN@. 'FHE POSITIONING OF THE SECONDARV WATER RESTRAINT STRUCTURE BCT@CEII AND PROXIMULE OPPOSING FINGERS OF (LIE PRINIARY IKAL`ER RESTRAINT LIMITS DEFLECTION OFILIC WAFER BET%CEN SUPPORT POINTS AND FLICIEBY FURTHER INHIBITS THE IAFCR FIONI 15 "JUMPING" OUT OF1HE SUPPORTS AND CROSS-SLOTTING.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US63054604P | 2004-11-23 | 2004-11-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
MY137625A true MY137625A (en) | 2009-02-27 |
Family
ID=39055562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20055448 MY137625A (en) | 2004-11-23 | 2005-11-22 | Wafer container with secondary wafer restraint system |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN101119912A (en) |
MY (1) | MY137625A (en) |
TW (1) | TWI363027B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4800155B2 (en) * | 2006-09-04 | 2011-10-26 | 信越ポリマー株式会社 | Substrate storage container and check valve |
CN101673696B (en) * | 2008-09-12 | 2011-09-28 | 家登精密工业股份有限公司 | Front-opening unified pod with wafer constraints arranged on door |
US9184077B2 (en) | 2013-09-30 | 2015-11-10 | Taiwan Semiconductor Manufacturing Co., Ltd | Wafer pod and wafer positioning mechanism thereof |
US10535541B2 (en) | 2015-12-29 | 2020-01-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Adaptive inset for wafer cassette system |
TWI628122B (en) * | 2016-03-15 | 2018-07-01 | 景碩科技股份有限公司 | Card with open and close frame |
-
2005
- 2005-11-22 MY MYPI20055448 patent/MY137625A/en unknown
- 2005-11-22 TW TW94140995A patent/TWI363027B/en active
- 2005-11-23 CN CNA2005800466994A patent/CN101119912A/en active Pending
Also Published As
Publication number | Publication date |
---|---|
TWI363027B (en) | 2012-05-01 |
CN101119912A (en) | 2008-02-06 |
TW200630280A (en) | 2006-09-01 |
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