MY135978A - Polishing pad, conditioner and method for polishing the same - Google Patents
Polishing pad, conditioner and method for polishing the sameInfo
- Publication number
- MY135978A MY135978A MYPI20035022A MYPI20035022A MY135978A MY 135978 A MY135978 A MY 135978A MY PI20035022 A MYPI20035022 A MY PI20035022A MY PI20035022 A MYPI20035022 A MY PI20035022A MY 135978 A MY135978 A MY 135978A
- Authority
- MY
- Malaysia
- Prior art keywords
- polishing
- conditioner
- polishing pad
- same
- pad
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
Abstract
THE PRESENT INVENTION RELATES TO A POLISHING PAD FOR PERFORMING EFFECTIVE POLISHING AND CONDITIONING IN A CHEMICAL MECHANICAL POLISHING (HEREINAFTER REFERRED TO AS 'CMP'), A CONDITIONER SUITABLE FOR THE POLISHING PAD, AND A CMP PROCESS USING THE POLISHING PAD AND THE CONDITIONER.(FIG 2)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20020085855 | 2002-12-28 | ||
KR1020030095949A KR100666726B1 (en) | 2002-12-28 | 2003-12-24 | CMP Process Conditioner and methods for polishing using the same |
Publications (1)
Publication Number | Publication Date |
---|---|
MY135978A true MY135978A (en) | 2008-07-31 |
Family
ID=32677805
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI20035022A MY135978A (en) | 2002-12-28 | 2003-12-29 | Polishing pad, conditioner and method for polishing the same |
Country Status (4)
Country | Link |
---|---|
KR (1) | KR100666726B1 (en) |
AU (1) | AU2003289525A1 (en) |
MY (1) | MY135978A (en) |
WO (1) | WO2004059715A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1715980B1 (en) | 2004-02-17 | 2011-05-18 | SKC Co., Ltd. | Base pad polishing pad and multi-layer pad comprising the same |
CN115594823A (en) * | 2022-10-12 | 2023-01-13 | 中环领先半导体材料有限公司(Cn) | Novel formula of notch polishing pad |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4591980B2 (en) * | 2000-02-22 | 2010-12-01 | 東洋ゴム工業株式会社 | Polishing pad and manufacturing method thereof |
JP2001246552A (en) * | 2000-03-02 | 2001-09-11 | Jsr Corp | Abrasive pad |
DE60109601T2 (en) * | 2000-05-27 | 2006-02-09 | Rohm and Haas Electronic Materials CMP Holdings, Inc., Wilmington | RILLEN POLISHING PILLOWS FOR CHEMICAL-MECHANICAL PLANARIZATION |
CN1224499C (en) * | 2000-12-01 | 2005-10-26 | 东洋橡膠工业株式会社 | Polishing pad, method of mfg. polishing pad, and cushion layer polishing pad |
-
2003
- 2003-12-24 KR KR1020030095949A patent/KR100666726B1/en active IP Right Grant
- 2003-12-24 AU AU2003289525A patent/AU2003289525A1/en not_active Abandoned
- 2003-12-24 WO PCT/KR2003/002830 patent/WO2004059715A1/en not_active Application Discontinuation
- 2003-12-29 MY MYPI20035022A patent/MY135978A/en unknown
Also Published As
Publication number | Publication date |
---|---|
KR100666726B1 (en) | 2007-01-09 |
KR20040060754A (en) | 2004-07-06 |
WO2004059715A1 (en) | 2004-07-15 |
AU2003289525A1 (en) | 2004-07-22 |
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