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Application filed by Univ TexasfiledCriticalUniv Texas
Priority to MYPI20030077priorityCriticalpatent/MY135679A/en
Publication of MY135679ApublicationCriticalpatent/MY135679A/en
Application Of Or Painting With Fluid Materials
(AREA)
Abstract
DISCLOSED HEREIN IS AN AUTOMATIC FLUID DISPENSING METHOD AND SYSTEM FOR DISPENSING FLUID ON THE SURFACE OF PLATE-LIKE MATERIAL, OR SUBSTRATE(20), INCLUDING A SEMICONDUCTOR WAFER FOR IMPRINT LITHOGRAPHY PROCESSES. THE DISPENSING METHOD USES FLUID DISPENSER AND A SUBSTRATE STAGE THAT MAY GENERATE RELATIVE LATERAL MOTIONS BETWEEN A FLUID DISPENSER TIP (1001;1002) AND A SUBSTRATE. ALSO DESCRIBED HEREIN ARE METHODS AND DEVICES FOR CREATING A PLANAR SURFACE ON A SUBSTRATE(20) USING A SUBSTANTIALLY UNPATTERNED PLANAR TEMPLATE(12).FIG. 11
MYPI200300772003-01-102003-01-10Method and system of automatic fluid dispensing for imprint lithography processes
MY135679A
(en)