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Priority to MYPI20031573priorityCriticalpatent/MY134393A/en
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Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals
(AREA)
Physical Vapour Deposition
(AREA)
Abstract
THE PRESENT INVENTION RELATES TO A PROCESS FOR DEPOSITING A CALCIUM GETTER THIN FILM INSIDE A SYSTEM OPERATING UNDER VACUUM. THE PROCESS COMPRISES THE STEPS OF INTRODUCING INTO THE SYSTEM UNDER VACUUM AT LEAST ONE EVAPORABLE GETTER DEVICE WITH AN AIR-STABLE CALCIUM COMPOUND. THE SYSTEM IS EVACUATED UNTIL A PRESSURE VALUE P1 IS REACHED. THE SYSTEM IS THEN HEATED UP TO THE CALCIUM EVAPORATION TEMPERATURE OF THE STABLE COMPOUND. THE SYSTEM EVACUATION CONTINUES UNTIL A PRESSURE VALUE P2, WHICH IS LOWER THAN P1, IS REACHED AND THE SYSTEM IS SEALED. IN A PREFERRED EMBODIMENT, THE HEATING STEP SEPARATES THE TWO EVACUATION STEPS.FIGURE 1.
MYPI200315732003-04-252003-04-25Process for depositing calcium getter thin film inside systems operating under vacuum
MY134393A
(en)