MY129438A - Semiconductor device and method of fabricating the same - Google Patents
Semiconductor device and method of fabricating the sameInfo
- Publication number
- MY129438A MY129438A MYPI97004289A MYPI9704289A MY129438A MY 129438 A MY129438 A MY 129438A MY PI97004289 A MYPI97004289 A MY PI97004289A MY PI9704289 A MYPI9704289 A MY PI9704289A MY 129438 A MY129438 A MY 129438A
- Authority
- MY
- Malaysia
- Prior art keywords
- semiconductor device
- trench
- fabricating
- same
- substrate
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
- H01L21/76232—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls
- H01L21/76235—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials of trenches having a shape other than rectangular or V-shape, e.g. rounded corners, oblique or rounded trench walls trench shape altered by a local oxidation of silicon process step, e.g. trench corner rounding by LOCOS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Element Separation (AREA)
Abstract
IN A SEMICONDUCTOR DEVICE HAVING A TRENCH ISOLATION STRUCTURE, AFTER A TRENCH SURFACE IS SELECTIVELY OXIDIZED BY A CONVENTIONAL METHOD, AND OXIDATION PREVENTION FILM (3) IS REMOVED, THE ENTIRE SURFACE OF THE SUBSTRATE (1) IS AGAIN OXIDIZED WHILE ONLY AN OXIDE FILM ON THE SUBSTRATE (1) OR TRENCH SURFACE IS EXPOSED, AND RADIUS CURVATURE IS PROVIDED TO THE SHAPE OF THE OXIDE FILM NEAR THE TRENCH UPPER END PORTION (12). (FIGURES 2A-214)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP24444596A JP3611226B2 (en) | 1996-09-17 | 1996-09-17 | Semiconductor device and manufacturing method thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
MY129438A true MY129438A (en) | 2007-04-30 |
Family
ID=17118766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI97004289A MY129438A (en) | 1996-09-17 | 1997-09-16 | Semiconductor device and method of fabricating the same |
Country Status (6)
Country | Link |
---|---|
JP (1) | JP3611226B2 (en) |
KR (1) | KR100425064B1 (en) |
CN (1) | CN1161837C (en) |
MY (1) | MY129438A (en) |
TW (1) | TW360945B (en) |
WO (1) | WO1998012742A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW388100B (en) * | 1997-02-18 | 2000-04-21 | Hitachi Ulsi Eng Corp | Semiconductor deivce and process for producing the same |
US5811346A (en) * | 1997-04-14 | 1998-09-22 | Vlsi Technology, Inc. | Silicon corner rounding in shallow trench isolation process |
WO1999044223A2 (en) * | 1998-02-27 | 1999-09-02 | Lsi Logic Corporation | Process of shallow trench isolating active devices to avoid sub-threshold kinks arising from corner effects without additional processing |
JP3917327B2 (en) | 1999-06-01 | 2007-05-23 | 株式会社ルネサステクノロジ | Method and apparatus for manufacturing semiconductor device |
JP2004095886A (en) | 2002-08-30 | 2004-03-25 | Fujitsu Ltd | Semiconductor device and its manufacturing method |
TWI253746B (en) * | 2003-10-24 | 2006-04-21 | Fujitsu Ltd | Semiconductor device group and method for fabricating the same, and semiconductor device and method for fabricating the same |
KR100584776B1 (en) * | 2004-03-05 | 2006-05-29 | 삼성전자주식회사 | Method of forming active structure, isolation and MOS transistor |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63234534A (en) * | 1987-03-24 | 1988-09-29 | Oki Electric Ind Co Ltd | Manufacture of semiconductor element |
KR960006714B1 (en) * | 1990-05-28 | 1996-05-22 | 가부시끼가이샤 도시바 | Semiconductor device fabrication process |
JP3208575B2 (en) * | 1991-08-16 | 2001-09-17 | ソニー株式会社 | Semiconductor device manufacturing method |
US5316965A (en) * | 1993-07-29 | 1994-05-31 | Digital Equipment Corporation | Method of decreasing the field oxide etch rate in isolation technology |
JP2955459B2 (en) * | 1993-12-20 | 1999-10-04 | 株式会社東芝 | Method for manufacturing semiconductor device |
US5536675A (en) * | 1993-12-30 | 1996-07-16 | Intel Corporation | Isolation structure formation for semiconductor circuit fabrication |
-
1996
- 1996-09-17 JP JP24444596A patent/JP3611226B2/en not_active Expired - Fee Related
-
1997
- 1997-09-15 TW TW086113393A patent/TW360945B/en not_active IP Right Cessation
- 1997-09-16 WO PCT/JP1997/003267 patent/WO1998012742A1/en active IP Right Grant
- 1997-09-16 CN CNB971980063A patent/CN1161837C/en not_active Expired - Fee Related
- 1997-09-16 KR KR10-1999-7002156A patent/KR100425064B1/en not_active IP Right Cessation
- 1997-09-16 MY MYPI97004289A patent/MY129438A/en unknown
Also Published As
Publication number | Publication date |
---|---|
CN1161837C (en) | 2004-08-11 |
KR100425064B1 (en) | 2004-03-30 |
KR20000036123A (en) | 2000-06-26 |
TW360945B (en) | 1999-06-11 |
JP3611226B2 (en) | 2005-01-19 |
JPH1092919A (en) | 1998-04-10 |
WO1998012742A1 (en) | 1998-03-26 |
CN1231064A (en) | 1999-10-06 |
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