MY110030A - Device for coating substrates in semiconductor production - Google Patents

Device for coating substrates in semiconductor production

Info

Publication number
MY110030A
MY110030A MYPI93001932A MYPI19931932A MY110030A MY 110030 A MY110030 A MY 110030A MY PI93001932 A MYPI93001932 A MY PI93001932A MY PI19931932 A MYPI19931932 A MY PI19931932A MY 110030 A MY110030 A MY 110030A
Authority
MY
Malaysia
Prior art keywords
coating substrates
semiconductor production
substrate
spinning
lacquer
Prior art date
Application number
MYPI93001932A
Inventor
Karl Appich
Eberhard Muhlfriedel
Martin Kallis
Original Assignee
Steag Micro Tech Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from PCT/DE1993/000778 external-priority patent/WO1995005901A1/en
Application filed by Steag Micro Tech Gmbh filed Critical Steag Micro Tech Gmbh
Publication of MY110030A publication Critical patent/MY110030A/en

Links

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

A DEVICE FOR COATING SUBSTRATES HAS A CAPILLARY SLOT (21) WHICH IS USED IN A FIRST STEP TO APPLY LACQUER TO THE SUBSTRATE (20). IN A SECOND STEP, THE LACQUER LAYER THICKNESS OF THE SUBSTRATE (20) IS REDUCED AND MADE MORE UNIFORM BY SPINNING IN A SPINNING DEVICE (13). (FIGURE 1)
MYPI93001932A 1993-08-26 1993-09-23 Device for coating substrates in semiconductor production MY110030A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/DE1993/000778 WO1995005901A1 (en) 1993-08-26 1993-08-26 Device for coating substrates in semiconductor manufacture
SG1995001632A SG41944A1 (en) 1993-08-26 1993-08-26 Device for coating substrates in semiconductor production

Publications (1)

Publication Number Publication Date
MY110030A true MY110030A (en) 1997-11-29

Family

ID=20429138

Family Applications (1)

Application Number Title Priority Date Filing Date
MYPI93001932A MY110030A (en) 1993-08-26 1993-09-23 Device for coating substrates in semiconductor production

Country Status (4)

Country Link
EP (1) EP0711108B1 (en)
DE (2) DE59308233D1 (en)
MY (1) MY110030A (en)
SG (1) SG41944A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19906398B4 (en) 1999-02-16 2004-04-29 Steag Hamatech Ag Method and device for treating substrates

Also Published As

Publication number Publication date
DE4397539D2 (en) 1996-09-26
EP0711108A1 (en) 1996-05-15
EP0711108B1 (en) 1998-03-04
DE59308233D1 (en) 1998-04-09
SG41944A1 (en) 1999-04-27

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