MY110030A - Device for coating substrates in semiconductor production - Google Patents
Device for coating substrates in semiconductor productionInfo
- Publication number
- MY110030A MY110030A MYPI93001932A MYPI19931932A MY110030A MY 110030 A MY110030 A MY 110030A MY PI93001932 A MYPI93001932 A MY PI93001932A MY PI19931932 A MYPI19931932 A MY PI19931932A MY 110030 A MY110030 A MY 110030A
- Authority
- MY
- Malaysia
- Prior art keywords
- coating substrates
- semiconductor production
- substrate
- spinning
- lacquer
- Prior art date
Links
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
A DEVICE FOR COATING SUBSTRATES HAS A CAPILLARY SLOT (21) WHICH IS USED IN A FIRST STEP TO APPLY LACQUER TO THE SUBSTRATE (20). IN A SECOND STEP, THE LACQUER LAYER THICKNESS OF THE SUBSTRATE (20) IS REDUCED AND MADE MORE UNIFORM BY SPINNING IN A SPINNING DEVICE (13). (FIGURE 1)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/DE1993/000778 WO1995005901A1 (en) | 1993-08-26 | 1993-08-26 | Device for coating substrates in semiconductor manufacture |
SG1995001632A SG41944A1 (en) | 1993-08-26 | 1993-08-26 | Device for coating substrates in semiconductor production |
Publications (1)
Publication Number | Publication Date |
---|---|
MY110030A true MY110030A (en) | 1997-11-29 |
Family
ID=20429138
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MYPI93001932A MY110030A (en) | 1993-08-26 | 1993-09-23 | Device for coating substrates in semiconductor production |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0711108B1 (en) |
DE (2) | DE59308233D1 (en) |
MY (1) | MY110030A (en) |
SG (1) | SG41944A1 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19906398B4 (en) | 1999-02-16 | 2004-04-29 | Steag Hamatech Ag | Method and device for treating substrates |
-
1993
- 1993-08-26 SG SG1995001632A patent/SG41944A1/en unknown
- 1993-08-26 DE DE59308233T patent/DE59308233D1/en not_active Expired - Lifetime
- 1993-08-26 DE DE4397539T patent/DE4397539D2/en not_active Expired - Fee Related
- 1993-08-26 EP EP93918919A patent/EP0711108B1/en not_active Expired - Lifetime
- 1993-09-23 MY MYPI93001932A patent/MY110030A/en unknown
Also Published As
Publication number | Publication date |
---|---|
DE4397539D2 (en) | 1996-09-26 |
EP0711108A1 (en) | 1996-05-15 |
EP0711108B1 (en) | 1998-03-04 |
DE59308233D1 (en) | 1998-04-09 |
SG41944A1 (en) | 1999-04-27 |
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