MXGT03000022A - Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects. - Google Patents
Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects.Info
- Publication number
- MXGT03000022A MXGT03000022A MXGT03000022A MXGT03000022A MX GT03000022 A MXGT03000022 A MX GT03000022A MX GT03000022 A MXGT03000022 A MX GT03000022A MX GT03000022 A MXGT03000022 A MX GT03000022A
- Authority
- MX
- Mexico
- Prior art keywords
- objects
- measuring
- optical system
- phase
- reflective
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention describes an optical system based on the principle of optical heterodyning, which measures microroughnesses of reflective materials by means of reflection and phase objects of transparent materials by means of transmission. The resolution of the system is increased upon reducing the light beam area in the plane of the detector; thereby the total resolution of the system may be measured in nanometers. The invention is a simple system that can be used in any type of objects without requiring a previous preparation. Moreover, is a cost effective system since the same uses the central part of the required optical components upon using a beam having a substantially small diameter, which does not affect the objects while measuring the same since there is no physical contact with the samples.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MXGT03000022 MXGT03000022A (en) | 2003-11-10 | 2003-11-10 | Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
MXGT03000022 MXGT03000022A (en) | 2003-11-10 | 2003-11-10 | Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects. |
Publications (1)
Publication Number | Publication Date |
---|---|
MXGT03000022A true MXGT03000022A (en) | 2005-05-12 |
Family
ID=35837327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
MXGT03000022 MXGT03000022A (en) | 2003-11-10 | 2003-11-10 | Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects. |
Country Status (1)
Country | Link |
---|---|
MX (1) | MXGT03000022A (en) |
-
2003
- 2003-11-10 MX MXGT03000022 patent/MXGT03000022A/en unknown
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