MXGT03000022A - Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects. - Google Patents

Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects.

Info

Publication number
MXGT03000022A
MXGT03000022A MXGT03000022A MXGT03000022A MX GT03000022 A MXGT03000022 A MX GT03000022A MX GT03000022 A MXGT03000022 A MX GT03000022A MX GT03000022 A MXGT03000022 A MX GT03000022A
Authority
MX
Mexico
Prior art keywords
objects
measuring
optical system
phase
reflective
Prior art date
Application number
Other languages
Spanish (es)
Inventor
Alma Adriana Camacho Perez Dra
Original Assignee
Ct De Investigaciones En Optic
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ct De Investigaciones En Optic filed Critical Ct De Investigaciones En Optic
Priority to MXGT03000022 priority Critical patent/MXGT03000022A/en
Publication of MXGT03000022A publication Critical patent/MXGT03000022A/en

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention describes an optical system based on the principle of optical heterodyning, which measures microroughnesses of reflective materials by means of reflection and phase objects of transparent materials by means of transmission. The resolution of the system is increased upon reducing the light beam area in the plane of the detector; thereby the total resolution of the system may be measured in nanometers. The invention is a simple system that can be used in any type of objects without requiring a previous preparation. Moreover, is a cost effective system since the same uses the central part of the required optical components upon using a beam having a substantially small diameter, which does not affect the objects while measuring the same since there is no physical contact with the samples.
MXGT03000022 2003-11-10 2003-11-10 Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects. MXGT03000022A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MXGT03000022 MXGT03000022A (en) 2003-11-10 2003-11-10 Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MXGT03000022 MXGT03000022A (en) 2003-11-10 2003-11-10 Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects.

Publications (1)

Publication Number Publication Date
MXGT03000022A true MXGT03000022A (en) 2005-05-12

Family

ID=35837327

Family Applications (1)

Application Number Title Priority Date Filing Date
MXGT03000022 MXGT03000022A (en) 2003-11-10 2003-11-10 Heterodyne optical system for measuring both small roughnesses of reflective objects and phase objects.

Country Status (1)

Country Link
MX (1) MXGT03000022A (en)

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