MX2018011669A - Metodo para reducir el impacto de la textura de superficie en un escaneo optico y dispositivos del mismo. - Google Patents

Metodo para reducir el impacto de la textura de superficie en un escaneo optico y dispositivos del mismo.

Info

Publication number
MX2018011669A
MX2018011669A MX2018011669A MX2018011669A MX2018011669A MX 2018011669 A MX2018011669 A MX 2018011669A MX 2018011669 A MX2018011669 A MX 2018011669A MX 2018011669 A MX2018011669 A MX 2018011669A MX 2018011669 A MX2018011669 A MX 2018011669A
Authority
MX
Mexico
Prior art keywords
test object
surface texture
devices
localization element
optical scan
Prior art date
Application number
MX2018011669A
Other languages
English (en)
Inventor
f munro James
R Olle Chase
Original Assignee
Adcole Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Adcole Corp filed Critical Adcole Corp
Publication of MX2018011669A publication Critical patent/MX2018011669A/es

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/40—Analysis of texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T11/00—2D [Two Dimensional] image generation
    • G06T11/60—Editing figures and text; Combining figures or text
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Métodos, medios legibles por computadora no transitorios y aparatos de personalización de contenido que proporcionan instrucciones a un dispositivo de escaneo óptico, configurado para que pueda producir un elemento de localización en la superficie del objeto de prueba, para escanear el elemento de localización en múltiples puntos a lo largo de la superficie del objeto de prueba en un patrón de escaneo bidimensional. Se obtienen datos de imagen de una imagen del elemento de localización en cada uno de los múltiples puntos a lo largo de la superficie del objeto de prueba. Los datos de imagen obtenidos se procesan para determinar un perfil de superficie para el objeto de prueba. El patrón de escaneo bidimensional reduce los errores de textura de superficie en el perfil de superficie.
MX2018011669A 2017-06-30 2018-06-29 Metodo para reducir el impacto de la textura de superficie en un escaneo optico y dispositivos del mismo. MX2018011669A (es)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US15/639,322 US20190005663A1 (en) 2017-06-30 2017-06-30 Method for reducing impact of surface texture in an optical scan and devices thereof
PCT/US2018/040323 WO2019006320A1 (en) 2017-06-30 2018-06-29 METHOD FOR REDUCING THE IMPACT OF SURFACE TEXTURE IN OPTICAL SCANNING AND RELATED DEVICES

Publications (1)

Publication Number Publication Date
MX2018011669A true MX2018011669A (es) 2019-08-14

Family

ID=64734852

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2018011669A MX2018011669A (es) 2017-06-30 2018-06-29 Metodo para reducir el impacto de la textura de superficie en un escaneo optico y dispositivos del mismo.

Country Status (7)

Country Link
US (1) US20190005663A1 (es)
JP (1) JP2020526734A (es)
CN (1) CN109477711A (es)
CA (1) CA3017123A1 (es)
DE (1) DE112018003380T5 (es)
MX (1) MX2018011669A (es)
WO (1) WO2019006320A1 (es)

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4971445A (en) * 1987-05-12 1990-11-20 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus
US5204531A (en) * 1992-02-14 1993-04-20 Digital Instruments, Inc. Method of adjusting the size of the area scanned by a scanning probe
US7053369B1 (en) * 2001-10-19 2006-05-30 Rave Llc Scan data collection for better overall data accuracy
US7403290B1 (en) * 2006-06-30 2008-07-22 Carl Zeiss Smt Ag Method and means for determining the shape of a rough surface of an object
US8194301B2 (en) * 2008-03-04 2012-06-05 Kla-Tencor Corporation Multi-spot scanning system and method
US20100113921A1 (en) * 2008-06-02 2010-05-06 Uti Limited Partnership Systems and Methods for Object Surface Estimation
US8107084B2 (en) * 2009-01-30 2012-01-31 Zygo Corporation Interference microscope with scan motion detection using fringe motion in monitor patterns
US8650939B2 (en) * 2009-10-13 2014-02-18 Mitutoyo Corporation Surface texture measuring machine and a surface texture measuring method
US9110282B2 (en) * 2011-03-30 2015-08-18 The Regents Of The University Of California Nanometer-scale optical imaging by the modulation tracking (MT) method
WO2012155267A1 (en) * 2011-05-13 2012-11-22 Fibics Incorporated Microscopy imaging method and system
JP2014115228A (ja) * 2012-12-11 2014-06-26 Canon Inc 干渉計測装置、および干渉計測方法
US10027928B2 (en) * 2014-10-28 2018-07-17 Exnodes Inc. Multiple camera computational wafer inspection
KR20170109004A (ko) * 2015-01-30 2017-09-27 애드콜 코포레이션 광학 3차원 스캐너 및 이의 사용 방법
US10620447B2 (en) * 2017-01-19 2020-04-14 Cognex Corporation System and method for reduced-speckle laser line generation

Also Published As

Publication number Publication date
WO2019006320A1 (en) 2019-01-03
DE112018003380T5 (de) 2020-03-05
CA3017123A1 (en) 2018-12-30
CN109477711A (zh) 2019-03-15
US20190005663A1 (en) 2019-01-03
JP2020526734A (ja) 2020-08-31

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