MX2013003527A - Device and method for processing material by means of focused electromagnetic radiation. - Google Patents

Device and method for processing material by means of focused electromagnetic radiation.

Info

Publication number
MX2013003527A
MX2013003527A MX2013003527A MX2013003527A MX2013003527A MX 2013003527 A MX2013003527 A MX 2013003527A MX 2013003527 A MX2013003527 A MX 2013003527A MX 2013003527 A MX2013003527 A MX 2013003527A MX 2013003527 A MX2013003527 A MX 2013003527A
Authority
MX
Mexico
Prior art keywords
radiation
electromagnetic radiation
image
pattern
beam path
Prior art date
Application number
MX2013003527A
Other languages
Spanish (es)
Other versions
MX341543B (en
Inventor
Peter Riedel
Claudia Gorschboth
Franziska Woittennek
Berndt Warm
Original Assignee
Wavelight Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wavelight Gmbh filed Critical Wavelight Gmbh
Publication of MX2013003527A publication Critical patent/MX2013003527A/en
Publication of MX341543B publication Critical patent/MX341543B/en

Links

Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F9/00825Methods or devices for eye surgery using laser for photodisruption
    • A61F9/00836Flap cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • B23K26/046Automatically focusing the laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/04Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0622Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses
    • B23K26/0624Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam by shaping pulses using ultrashort pulses, i.e. pulses of 1ns or less
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F2009/00844Feedback systems
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F2009/00861Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872Cornea
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61FFILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007Methods or devices for eye surgery
    • A61F9/008Methods or devices for eye surgery using laser
    • A61F2009/00897Scanning mechanisms or algorithms

Abstract

The invention relates to a device for processing material (M) by means of focused electromagnetic radiation comprising: a source (10), which emits electromagnetic radiation (12), means (14, 16, 18, 22, 26) for directing the radiation at the material (M), means (28) for focusing the radiation on or in the material (M), an apparatus (20) for producing a pattern (32) in the beam path of the electromagnetic radiation, an at least partially reflective surface (30) in the beam path in front of the focus (F) of the focused radiation, wherein said pattern (32) is imaged on said at least partially reflective surface (30) by means of at least some of said means for directing the radiation and said means for focusing the radiation, at least one detector (D1, D2), onto which an image of the pattern (32) of said surface (30) is reflected and which produces electrical signals corresponding to said image, wherein the image contains a piece of information about the position of the focal point (F), a computer (C), which receives said electrical signals and which is programmed to process said image in order to generate an electrical signal (34) that depends on the position of the focal point, and a divergence setting element (18), which is arranged in said beam path and designed to receive said electrical signal (34) of the computer (10) in order to change a divergence of the electromagnetic radiation according to the signal.
MX2013003527A 2010-09-30 2010-09-30 Device and method for processing material by means of focused electromagnetic radiation. MX341543B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2010/005976 WO2012041351A1 (en) 2010-09-30 2010-09-30 Device and method for processing material by means of focused electromagnetic radiation

Publications (2)

Publication Number Publication Date
MX2013003527A true MX2013003527A (en) 2013-05-22
MX341543B MX341543B (en) 2016-08-23

Family

ID=44147910

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2013003527A MX341543B (en) 2010-09-30 2010-09-30 Device and method for processing material by means of focused electromagnetic radiation.

Country Status (14)

Country Link
EP (1) EP2621662B1 (en)
JP (1) JP5763771B2 (en)
KR (2) KR101629404B1 (en)
CN (1) CN103209798B (en)
AU (1) AU2010361365B2 (en)
BR (1) BR112013006408A2 (en)
CA (1) CA2809887C (en)
DK (1) DK2621662T3 (en)
ES (1) ES2731902T3 (en)
MX (1) MX341543B (en)
PL (1) PL2621662T3 (en)
PT (1) PT2621662T (en)
RU (1) RU2551921C2 (en)
WO (1) WO2012041351A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102017215975A1 (en) * 2017-09-11 2019-03-14 Robert Bosch Gmbh Method and apparatus for shaping a laser beam by a programmable beamformer
DE102020134317A1 (en) 2020-12-18 2022-06-23 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Device and method for determining the focal position
DE102020134109B3 (en) 2020-12-18 2022-05-25 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Device and method for determining the focal position
DE102022101043B3 (en) 2022-01-18 2023-07-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Methods and laser processing equipment for reducing the effects of thermal lens effects in laser material processing
CN115383287B (en) * 2022-05-24 2024-01-16 武汉松盛光电科技有限公司 Beam splitting type automatic focusing system and method

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5445146A (en) * 1995-03-31 1995-08-29 Bellinger; Gary J. Biological tissue stimulation by low level optical energy
JP3162254B2 (en) * 1995-01-17 2001-04-25 三菱電機株式会社 Laser processing equipment
JP2000357835A (en) * 1999-06-15 2000-12-26 Amada Eng Center Co Ltd Laser oscillator
JP2001070337A (en) * 1999-09-01 2001-03-21 Nidek Co Ltd Laser operating device
US6624913B1 (en) * 2000-03-27 2003-09-23 Eastman Kodak Company Method of electronic processing of exposed photographic material
DE10120251B4 (en) * 2001-04-25 2006-03-23 Precitec Kg Method and sensor device for monitoring a laser processing operation to be performed on a workpiece and laser processing head with such a sensor device
US6794625B2 (en) 2001-05-15 2004-09-21 Applied Materials Dynamic automatic focusing method and apparatus using interference patterns
US6666857B2 (en) 2002-01-29 2003-12-23 Robert F. Smith Integrated wavefront-directed topography-controlled photoablation
JP3918583B2 (en) * 2002-03-01 2007-05-23 株式会社デンソー High density energy processing apparatus and high density energy processing method
JP2004069314A (en) 2002-08-01 2004-03-04 Olympus Corp Focal distance measuring instrument
JP2005345328A (en) * 2004-06-04 2005-12-15 Sharp Corp Optical object discrimination device
JP4491446B2 (en) * 2005-11-04 2010-06-30 株式会社オーク製作所 Peripheral exposure apparatus and method
DE102006007750A1 (en) * 2006-02-20 2007-08-23 Wavelight Ag Method for laser material processing device or micro structuring device for biological and metallic materials, involves inserting specific optical elements in illuminating system around focal position for making possible beam product
DE102007060344A1 (en) * 2007-12-14 2009-06-18 Alpha Laser Gmbh Processing laser for a workpiece, comprises a laser rod, a plane output mirror, a telescope, and an output lens or a group of output lenses of the telescope to infinitively form a reduced geometrical representation of the laser rod end
DE102008015403A1 (en) * 2008-03-22 2009-09-24 Daimler Ag Laser surface finishing assembly for pre-drilled hole has rotating pump-action emitter on a hollow spindle
DE502008000337D1 (en) * 2008-04-22 2010-03-11 Wavelight Ag Device for laser-optical eye surgery
DE102009007769B4 (en) * 2009-02-05 2016-07-14 Jenoptik Automatisierungstechnik Gmbh Laser processing head with integrated sensor device for focus position monitoring

Also Published As

Publication number Publication date
BR112013006408A2 (en) 2016-07-05
KR101679330B1 (en) 2016-11-24
EP2621662A1 (en) 2013-08-07
KR101629404B1 (en) 2016-06-13
CA2809887C (en) 2015-04-07
JP2014501618A (en) 2014-01-23
PT2621662T (en) 2019-07-17
ES2731902T3 (en) 2019-11-19
EP2621662B1 (en) 2019-05-01
RU2551921C2 (en) 2015-06-10
WO2012041351A1 (en) 2012-04-05
CN103209798A (en) 2013-07-17
AU2010361365B2 (en) 2014-12-11
CA2809887A1 (en) 2012-04-05
RU2013117721A (en) 2014-11-10
MX341543B (en) 2016-08-23
CN103209798B (en) 2015-11-25
DK2621662T3 (en) 2019-07-22
PL2621662T3 (en) 2019-09-30
JP5763771B2 (en) 2015-08-12
KR20130091340A (en) 2013-08-16
KR20150110822A (en) 2015-10-02
AU2010361365A1 (en) 2013-03-21

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