MX173008B - Transductor de presion que emplea un resirtor de pelicula gruesa y metodo para medir la presion con el mismo - Google Patents

Transductor de presion que emplea un resirtor de pelicula gruesa y metodo para medir la presion con el mismo

Info

Publication number
MX173008B
MX173008B MX013992A MX1399288A MX173008B MX 173008 B MX173008 B MX 173008B MX 013992 A MX013992 A MX 013992A MX 1399288 A MX1399288 A MX 1399288A MX 173008 B MX173008 B MX 173008B
Authority
MX
Mexico
Prior art keywords
thick film
pressure
resirtor
same
pressure transducer
Prior art date
Application number
MX013992A
Other languages
English (en)
Spanish (es)
Inventor
Eugene Skuratovsky
Michael L Sturdevant
Original Assignee
Babcock & Wilcox Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Babcock & Wilcox Co filed Critical Babcock & Wilcox Co
Publication of MX173008B publication Critical patent/MX173008B/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
MX013992A 1987-12-11 1988-11-30 Transductor de presion que emplea un resirtor de pelicula gruesa y metodo para medir la presion con el mismo MX173008B (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US13187387A 1987-12-11 1987-12-11

Publications (1)

Publication Number Publication Date
MX173008B true MX173008B (es) 1994-01-28

Family

ID=22451387

Family Applications (1)

Application Number Title Priority Date Filing Date
MX013992A MX173008B (es) 1987-12-11 1988-11-30 Transductor de presion que emplea un resirtor de pelicula gruesa y metodo para medir la presion con el mismo

Country Status (17)

Country Link
EP (1) EP0320299B1 (2)
JP (1) JPH01196526A (2)
KR (1) KR890010545A (2)
CN (1) CN1033481A (2)
AU (1) AU617348B2 (2)
BG (1) BG49839A3 (2)
BR (1) BR8804324A (2)
CA (1) CA1309879C (2)
DD (1) DD276150A5 (2)
DE (1) DE3888118T2 (2)
ES (1) ES2050163T3 (2)
HK (1) HK96594A (2)
HU (1) HU210503B (2)
IN (1) IN169553B (2)
MX (1) MX173008B (2)
PL (1) PL159285B1 (2)
SU (1) SU1716979A3 (2)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR890010548A (ko) * 1987-12-16 1989-08-09 로버트 제이. 에드워즈 이중압력센서
EP0469336B1 (de) * 1990-07-28 1994-03-09 Endress + Hauser Gmbh + Co. Resistiver Drucksensor
US6341528B1 (en) 1999-11-12 2002-01-29 Measurement Specialties, Incorporated Strain sensing structure with improved reliability
WO2002061383A1 (en) * 2001-01-31 2002-08-08 Silicon Valley Sensors, Inc. Triangular chip strain sensing structure and corner,edge on a diaphragm
PL231259B1 (pl) 2015-12-31 2019-02-28 Przed Cimat Spolka Z Ograniczona Odpowiedzialnoscia Urządzenie do regulacji zmiennej geometrii turbosprężarek
CN112595394A (zh) * 2020-12-07 2021-04-02 锐马（福建）电气制造有限公司 切向弧形应变片、径向应变片及支脚称重传感器

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3830100A (en) * 1973-02-22 1974-08-20 Statham Instrument Inc Strain gauge transducer transient voltage protection
JPS5524273B2 (2) * 1974-03-15 1980-06-27
JPS54113379A (en) * 1978-02-23 1979-09-04 Nec Corp Pressure gauge
US4311980A (en) * 1978-10-12 1982-01-19 Fabrica Italiana Magneti Marelli, S.P.A. Device for pressure measurement using a resistor strain gauge
US4586018A (en) * 1983-09-19 1986-04-29 Ford Motor Company Combustion pressure sensor
JPS6073428A (ja) * 1983-09-19 1985-04-25 フオ−ド　モ−タ−　カンパニ− 燃焼圧力センサ
JPS6165126A (ja) * 1984-09-06 1986-04-03 Copal Denshi Kk 圧力センサ
WO1986006548A1 (en) * 1985-04-26 1986-11-06 Wisconsin Alumni Research Foundation Sealed cavity semiconductor pressure transducers and method

Also Published As

Publication number Publication date
EP0320299B1 (en) 1994-03-02
DD276150A5 (de) 1990-02-14
DE3888118D1 (de) 1994-04-07
PL276065A1 (en) 1989-07-10
BR8804324A (pt) 1989-07-25
JPH01196526A (ja) 1989-08-08
HUT50388A (en) 1990-01-29
PL159285B1 (pl) 1992-12-31
CN1033481A (zh) 1989-06-21
BG49839A3 (en) 1992-02-14
ES2050163T3 (es) 1994-05-16
DE3888118T2 (de) 1994-06-09
AU2103988A (en) 1989-06-15
EP0320299A2 (en) 1989-06-14
CA1309879C (en) 1992-11-10
HU210503B (en) 1995-04-28
IN169553B (2) 1991-11-09
KR890010545A (ko) 1989-08-09
AU617348B2 (en) 1991-11-28
EP0320299A3 (en) 1991-03-27
HK96594A (en) 1994-09-23
SU1716979A3 (ru) 1992-02-28

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