MX147361A - Mejoras en aparato electro-optico para un sistema de alineamiento - Google Patents

Mejoras en aparato electro-optico para un sistema de alineamiento

Info

Publication number
MX147361A
MX147361A MX181436A MX18143680A MX147361A MX 147361 A MX147361 A MX 147361A MX 181436 A MX181436 A MX 181436A MX 18143680 A MX18143680 A MX 18143680A MX 147361 A MX147361 A MX 147361A
Authority
MX
Mexico
Prior art keywords
electro
alignment system
optical apparatus
alignment
optical
Prior art date
Application number
MX181436A
Other languages
English (en)
Inventor
Jose C Cruz
Original Assignee
Cummins Engine Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cummins Engine Co Inc filed Critical Cummins Engine Co Inc
Publication of MX147361A publication Critical patent/MX147361A/es

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/10—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void
    • G01J1/20—Photometry, e.g. photographic exposure meter by comparison with reference light or electric value provisionally void intensity of the measured or reference value being varied to equalise their effects at the detectors, e.g. by varying incidence angle
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/74—Systems using reradiation of electromagnetic waves other than radio waves, e.g. IFF, i.e. identification of friend or foe
MX181436A 1979-03-05 1980-03-05 Mejoras en aparato electro-optico para un sistema de alineamiento MX147361A (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US06/017,434 US4243877A (en) 1979-03-05 1979-03-05 Electro-optical target for an optical alignment system

Publications (1)

Publication Number Publication Date
MX147361A true MX147361A (es) 1982-11-22

Family

ID=21782566

Family Applications (1)

Application Number Title Priority Date Filing Date
MX181436A MX147361A (es) 1979-03-05 1980-03-05 Mejoras en aparato electro-optico para un sistema de alineamiento

Country Status (7)

Country Link
US (1) US4243877A (es)
JP (1) JPS55126804A (es)
KR (1) KR830001843B1 (es)
BR (1) BR8001292A (es)
GB (1) GB2049335B (es)
IN (1) IN152646B (es)
MX (1) MX147361A (es)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4636626A (en) * 1983-01-14 1987-01-13 Nippon Kogaku K.K. Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication
US4547662A (en) * 1983-03-16 1985-10-15 United Technologies Corporation Noninterference optical error sensing system
JPS60237307A (ja) * 1984-05-11 1985-11-26 Yokogawa Hewlett Packard Ltd レ−ザ測長器
US4679940A (en) * 1984-08-01 1987-07-14 Hamar M R Control system for a continuous cell target readout in a laser measurement system
US4690563A (en) * 1985-08-16 1987-09-01 Grumman Aerospace Corporation Hole centration gage
WO1989000675A1 (en) * 1985-08-16 1989-01-26 Grumman Aerospace Corporation Hole centration gage
US4738531A (en) * 1986-01-23 1988-04-19 Westinghouse Electric Corp. Distributed antenna array location apparatus
US5060632A (en) * 1989-09-05 1991-10-29 Olympus Optical Co., Ltd. Endoscope apparatus
US5302835A (en) * 1993-03-22 1994-04-12 Imra America, Inc. Light detection system having a polarization plane rotating means and a polarizing beamsplitter
US5513000A (en) * 1993-07-26 1996-04-30 Princeton Scientific Instruments Inc. Autocollimator
US5517016A (en) * 1994-03-31 1996-05-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Lasercom system architecture with reduced complexity
FR2769085B1 (fr) * 1997-09-26 1999-12-03 Thomson Csf Dispositif de reglage de l'alignement d'un radar pour automobiles
US6788726B2 (en) * 2002-02-26 2004-09-07 New Focus, Inc. External cavity laser with high spectral purity output
DE10239940A1 (de) * 2002-08-30 2004-03-25 Sick Ag Lichtschranke oder Lichtgitter
DE102004020406A1 (de) * 2004-04-23 2005-11-10 Prüftechnik Dieter Busch AG Messvorrichtung und Verfahren zum Ermitteln der Geradheit hohlzylindrischer oder hohlkegeliger Körper bzw. deren Orientierung relativ zueinander
ATE420337T1 (de) * 2005-03-04 2009-01-15 Busch Dieter & Co Prueftech Verfahren zum ausrichten von maschinen oder maschinenteilen
US20080189072A1 (en) * 2007-02-01 2008-08-07 Nescom Inc. High resolution encoder within a swivel
US20110133726A1 (en) * 2009-12-09 2011-06-09 Alexander Ballantyne Precision alignment system
CN105737765A (zh) * 2016-04-06 2016-07-06 合肥工业大学 基于半导体激光器组件的四自由度光学测头
DE102017202652A1 (de) * 2017-02-20 2018-08-23 Siemens Aktiengesellschaft Vorrichtung und Verfahren zur Kalibrierung mittels projizierter Muster

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3323408A (en) * 1962-09-04 1967-06-06 Bishop Robert Edward Optical alignment system
US3470377A (en) * 1966-11-04 1969-09-30 Texas Instruments Inc Two-axis automatic autocollimator
GB1196781A (en) * 1967-01-26 1970-07-01 Thring Advanced Developments L Walking Machine.
US3603691A (en) * 1969-07-25 1971-09-07 Lockheed Aircraft Corp Laser control for automatic alignment of structures
US3790276A (en) * 1971-04-07 1974-02-05 Us Navy Direct measurement of ship body distortion using a laser beam
US4105339A (en) * 1977-01-24 1978-08-08 The United States Of America As Represented By The Secretary Of The Air Force Azimuth monitoring system

Also Published As

Publication number Publication date
JPS6126601B2 (es) 1986-06-21
JPS55126804A (en) 1980-10-01
KR830002219A (ko) 1983-05-23
GB2049335B (en) 1983-06-15
US4243877A (en) 1981-01-06
BR8001292A (pt) 1980-11-04
KR830001843B1 (ko) 1983-09-14
GB2049335A (en) 1980-12-17
IN152646B (es) 1984-03-03

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