MD1865Y - Process for obtaining In2O3:Sn ceramics at low temperatures - Google Patents

Process for obtaining In2O3:Sn ceramics at low temperatures

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Publication number
MD1865Y
MD1865Y MDS20240068A MDS20240068A MD1865Y MD 1865 Y MD1865 Y MD 1865Y MD S20240068 A MDS20240068 A MD S20240068A MD S20240068 A MDS20240068 A MD S20240068A MD 1865 Y MD1865 Y MD 1865Y
Authority
MD
Moldova
Prior art keywords
in2o3
ceramics
low temperatures
obtaining
mol
Prior art date
Application number
MDS20240068A
Other languages
Romanian (ro)
Russian (ru)
Inventor
Глеб КОЛИБАБА
Думитру РУСНАК
Original Assignee
Публичное Учреждение Государственный Университет Молдовы
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Публичное Учреждение Государственный Университет Молдовы filed Critical Публичное Учреждение Государственный Университет Молдовы
Priority to MDS20240068A priority Critical patent/MD1865Z/en
Publication of MD1865Y publication Critical patent/MD1865Y/en
Publication of MD1865Z publication Critical patent/MD1865Z/en

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  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

Изобретение относится к способам получения полупроводниковых материалов и может быть использовано в полупроводниковой технологии.Способ получения керамики In2O3:Sn при низких температурах заключается в спекании порошков In2O3, SnO2или Sn с концентрацией 1÷15 моль. %, и InOCl с концентрацией 0,01÷10 mol. % в квази-замкнутом объеме при температуре 400…1000°С, путем химической транспортной реакции, с участием Cl2в качестве транспортного агента.The invention relates to methods for producing semiconductor materials and can be used in semiconductor technology. The method for producing In2O3:Sn ceramics at low temperatures consists of sintering In2O3, SnO2 or Sn powders with a concentration of 1÷15 mol. %, and InOCl with a concentration of 0.01÷10 mol. % in a quasi-closed volume at a temperature of 400…1000°C, by means of a chemical transport reaction, with the participation of Cl2 as a transport agent.

MDS20240068A 2024-06-27 2024-06-27 Method for producing In2O3:Sn ceramics at low temperatures MD1865Z (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20240068A MD1865Z (en) 2024-06-27 2024-06-27 Method for producing In2O3:Sn ceramics at low temperatures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20240068A MD1865Z (en) 2024-06-27 2024-06-27 Method for producing In2O3:Sn ceramics at low temperatures

Publications (2)

Publication Number Publication Date
MD1865Y true MD1865Y (en) 2025-07-31
MD1865Z MD1865Z (en) 2026-02-28

Family

ID=96585051

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20240068A MD1865Z (en) 2024-06-27 2024-06-27 Method for producing In2O3:Sn ceramics at low temperatures

Country Status (1)

Country Link
MD (1) MD1865Z (en)

Also Published As

Publication number Publication date
MD1865Z (en) 2026-02-28

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