MD1587Y - Thermoelectric vacuum gauge - Google Patents

Thermoelectric vacuum gauge

Info

Publication number
MD1587Y
MD1587Y MDS20200063A MDS20200063A MD1587Y MD 1587 Y MD1587 Y MD 1587Y MD S20200063 A MDS20200063 A MD S20200063A MD S20200063 A MDS20200063 A MD S20200063A MD 1587 Y MD1587 Y MD 1587Y
Authority
MD
Moldova
Prior art keywords
sensitive element
vacuum gauge
measuring circuit
thermoelectric vacuum
thermoelectric
Prior art date
Application number
MDS20200063A
Other languages
Romanian (ro)
Russian (ru)
Inventor
Игорь БЕЛОЦЕРКОВСКИЙ
Анатолие СИДОРЕНКО
Елена КОНДРЯ
Роман МОРАРЬ
Original Assignee
ИНСТИТУТ ЭЛЕКТРОННОЙ ИНЖЕНЕРИИ И НАНОТЕХНОЛОГИЙ "D. Ghitu"
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ИНСТИТУТ ЭЛЕКТРОННОЙ ИНЖЕНЕРИИ И НАНОТЕХНОЛОГИЙ "D. Ghitu" filed Critical ИНСТИТУТ ЭЛЕКТРОННОЙ ИНЖЕНЕРИИ И НАНОТЕХНОЛОГИЙ "D. Ghitu"
Priority to MDS20200063A priority Critical patent/MD1587Z/en
Publication of MD1587Y publication Critical patent/MD1587Y/en
Publication of MD1587Z publication Critical patent/MD1587Z/en

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  • Measuring Fluid Pressure (AREA)

Abstract

The invention relates to the field of pressure measurement, and can be used for measuring low gas pressures.The thermoelectric vacuum gauge, according to the invention, comprises a hollow cylindrical body (2) of a heat-conducting material, inside which is fixed a sensitive element (1), made of a thin electrical insulating film, on the surface of which are applied a heating circuit and a measuring circuit, the latter being made in the form of a battery of thermocouples. On both sides of the sensitive element (1) is placed a flat heat-conducting screen (3 and 4) with through holes (7) and with a mirror surface (8), oriented towards the sensitive element (1). On the outer surface of the body (2), at the level of the measuring circuit, are wound a thermistor (5) and an ohmic heater (6).
MDS20200063A 2020-06-16 2020-06-16 Thermoelectric vacuum gauge MD1587Z (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
MDS20200063A MD1587Z (en) 2020-06-16 2020-06-16 Thermoelectric vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
MDS20200063A MD1587Z (en) 2020-06-16 2020-06-16 Thermoelectric vacuum gauge

Publications (2)

Publication Number Publication Date
MD1587Y true MD1587Y (en) 2021-12-31
MD1587Z MD1587Z (en) 2022-07-31

Family

ID=80053667

Family Applications (1)

Application Number Title Priority Date Filing Date
MDS20200063A MD1587Z (en) 2020-06-16 2020-06-16 Thermoelectric vacuum gauge

Country Status (1)

Country Link
MD (1) MD1587Z (en)

Also Published As

Publication number Publication date
MD1587Z (en) 2022-07-31

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Legal Events

Date Code Title Description
FG9Y Short term patent issued