LU67197A1 - - Google Patents

Info

Publication number
LU67197A1
LU67197A1 LU67197DA LU67197A1 LU 67197 A1 LU67197 A1 LU 67197A1 LU 67197D A LU67197D A LU 67197DA LU 67197 A1 LU67197 A1 LU 67197A1
Authority
LU
Luxembourg
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU67197A1 publication Critical patent/LU67197A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02518Deposited layers
    • H01L21/02521Materials
    • H01L21/02524Group 14 semiconducting materials
    • H01L21/02532Silicon, silicon germanium, germanium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02367Substrates
    • H01L21/0237Materials
    • H01L21/0242Crystalline insulating materials
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02436Intermediate layers between substrates and deposited layers
    • H01L21/02439Materials
    • H01L21/02441Group 14 semiconducting materials
    • H01L21/0245Silicon, silicon germanium, germanium
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104Forming layers
    • H01L21/02365Forming inorganic semiconducting materials on a substrate
    • H01L21/02612Formation types
    • H01L21/02617Deposition types
    • H01L21/0262Reduction or decomposition of gaseous compounds, e.g. CVD

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
LU67197D 1972-03-14 1973-03-12 LU67197A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722212295 DE2212295C3 (en) 1972-03-14 1972-03-14 Process for the production of silicon or germanium epitaxial layers

Publications (1)

Publication Number Publication Date
LU67197A1 true LU67197A1 (en) 1973-05-22

Family

ID=5838865

Family Applications (1)

Application Number Title Priority Date Filing Date
LU67197D LU67197A1 (en) 1972-03-14 1973-03-12

Country Status (8)

Country Link
JP (1) JPS5626137B2 (en)
BE (1) BE796757A (en)
DE (1) DE2212295C3 (en)
FR (1) FR2175840B1 (en)
GB (1) GB1386900A (en)
IT (1) IT981333B (en)
LU (1) LU67197A1 (en)
NL (1) NL7302014A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4477308A (en) * 1982-09-30 1984-10-16 At&T Bell Laboratories Heteroepitaxy of multiconstituent material by means of a _template layer
US7041170B2 (en) * 1999-09-20 2006-05-09 Amberwave Systems Corporation Method of producing high quality relaxed silicon germanium layers
JP4954448B2 (en) 2003-04-05 2012-06-13 ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. Organometallic compounds
JP4689969B2 (en) 2003-04-05 2011-06-01 ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. Preparation of Group IVA and Group VIA compounds
JP4714422B2 (en) 2003-04-05 2011-06-29 ローム・アンド・ハース・エレクトロニック・マテリアルズ,エル.エル.シー. Method for depositing germanium-containing film and vapor delivery device

Also Published As

Publication number Publication date
FR2175840A1 (en) 1973-10-26
FR2175840B1 (en) 1977-07-29
DE2212295C3 (en) 1975-04-17
NL7302014A (en) 1973-09-18
BE796757A (en) 1973-07-02
JPS494976A (en) 1974-01-17
DE2212295A1 (en) 1973-09-27
GB1386900A (en) 1975-03-12
JPS5626137B2 (en) 1981-06-17
DE2212295B2 (en) 1974-08-15
IT981333B (en) 1974-10-10

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