LU64738A1 - - Google Patents
Info
- Publication number
- LU64738A1 LU64738A1 LU64738DA LU64738A1 LU 64738 A1 LU64738 A1 LU 64738A1 LU 64738D A LU64738D A LU 64738DA LU 64738 A1 LU64738 A1 LU 64738A1
- Authority
- LU
- Luxembourg
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| BE762681A BE762681A (nl) | 1971-02-09 | 1971-02-09 | Inrichting voor het opdampen van een metalen deklaag op een langwerpig substraat met behulp van tenminste een elektronenkanon. |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU64738A1 true LU64738A1 (https=) | 1972-07-03 |
Family
ID=3857695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU64738D LU64738A1 (https=) | 1971-02-09 | 1972-02-07 |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US3777704A (https=) |
| JP (1) | JPS5019519B1 (https=) |
| BE (1) | BE762681A (https=) |
| DE (1) | DE2204467A1 (https=) |
| FR (1) | FR2124467B1 (https=) |
| GB (1) | GB1344432A (https=) |
| IT (1) | IT948377B (https=) |
| LU (1) | LU64738A1 (https=) |
| NL (1) | NL151138B (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4153005A (en) * | 1977-07-06 | 1979-05-08 | United Technologies Corporation | Multiple electron beam vacuum vapor deposition apparatus |
| EP0241721B1 (en) * | 1986-03-18 | 1992-09-23 | Sumitomo Electric Industries, Ltd. | Conductor and method of producing the same |
| DE3634598C2 (de) * | 1986-10-10 | 1994-06-16 | Leybold Ag | Verfahren und Vorrichtung zum reaktiven Aufdampfen von Metallverbindungen |
| EP0392082B1 (en) * | 1989-04-14 | 1996-01-31 | Katayama Special Industries, Ltd. | Method for manufacturing a metallic porous sheet |
| JPH089774B2 (ja) * | 1990-06-25 | 1996-01-31 | 三菱電機株式会社 | 薄膜形成装置 |
| AT400040B (de) * | 1993-06-02 | 1995-09-25 | Andritz Patentverwaltung | Verfahren und vorrichtung zur beschichtung von metallsubstraten, insbesondere stahl- oder aluminiumbblechen in bandform |
| DE102013104086B3 (de) * | 2013-04-23 | 2014-10-23 | Von Ardenne Anlagentechnik Gmbh | Elektronenstrahl-Verdampfungsanordnung und Verfahren zum Elektronenstrahl-Verdampfen |
| DE102013107454B4 (de) * | 2013-07-15 | 2020-02-06 | VON ARDENNE Asset GmbH & Co. KG | Elektronenstrahlprozessanordnung, mobile Auswertevorrichtung, Verfahren zum Betreiben eines Elektronenstrahlverdampfers; und Verfahren zum Kalibrieren einer Elektronenstrahlprozessanordnung |
| JP7058499B2 (ja) * | 2017-12-08 | 2022-04-22 | 住友化学株式会社 | 蒸着源、電子ビーム真空蒸着装置及び電子デバイスの製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3046936A (en) * | 1958-06-04 | 1962-07-31 | Nat Res Corp | Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof |
| US3432335A (en) * | 1966-03-15 | 1969-03-11 | Lokomotivbau Elektrotech | Cyclically moving electron beam for uniform vapor deposited coating |
| US3502499A (en) * | 1967-05-22 | 1970-03-24 | Texas Instruments Inc | Cladding method and apparatus |
| US3576670A (en) * | 1969-02-19 | 1971-04-27 | Gulf Energy & Environ Systems | Method for making a superconducting material |
-
1971
- 1971-02-09 BE BE762681A patent/BE762681A/nl unknown
-
1972
- 1972-01-26 NL NL727201042A patent/NL151138B/xx unknown
- 1972-01-31 DE DE19722204467 patent/DE2204467A1/de active Pending
- 1972-01-31 IT IT48043/72A patent/IT948377B/it active
- 1972-02-03 US US00223215A patent/US3777704A/en not_active Expired - Lifetime
- 1972-02-04 FR FR7203739A patent/FR2124467B1/fr not_active Expired
- 1972-02-07 LU LU64738D patent/LU64738A1/xx unknown
- 1972-02-09 JP JP47013666A patent/JPS5019519B1/ja active Pending
- 1972-02-09 GB GB611572A patent/GB1344432A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| FR2124467B1 (https=) | 1977-04-01 |
| BE762681A (nl) | 1971-07-16 |
| GB1344432A (en) | 1974-01-23 |
| NL151138B (nl) | 1976-10-15 |
| JPS5019519B1 (https=) | 1975-07-08 |
| US3777704A (en) | 1973-12-11 |
| IT948377B (it) | 1973-05-30 |
| DE2204467A1 (de) | 1972-09-14 |
| FR2124467A1 (https=) | 1972-09-22 |
| NL7201042A (https=) | 1972-08-11 |