LU63436A1 - - Google Patents

Info

Publication number
LU63436A1
LU63436A1 LU63436DA LU63436A1 LU 63436 A1 LU63436 A1 LU 63436A1 LU 63436D A LU63436D A LU 63436DA LU 63436 A1 LU63436 A1 LU 63436A1
Authority
LU
Luxembourg
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of LU63436A1 publication Critical patent/LU63436A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/08Ion sources; Ion guns using arc discharge
    • H01J27/10Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
LU63436D 1971-06-29 1971-06-29 LU63436A1 (en:Method)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU63436 1971-06-29

Publications (1)

Publication Number Publication Date
LU63436A1 true LU63436A1 (en:Method) 1972-08-23

Family

ID=19726750

Family Applications (1)

Application Number Title Priority Date Filing Date
LU63436D LU63436A1 (en:Method) 1971-06-29 1971-06-29

Country Status (7)

Country Link
BE (1) BE785307A (en:Method)
DE (1) DE2228117A1 (en:Method)
FR (1) FR2143800A1 (en:Method)
GB (1) GB1383128A (en:Method)
IT (1) IT960285B (en:Method)
LU (1) LU63436A1 (en:Method)
NL (1) NL7209031A (en:Method)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3739253A1 (de) * 1987-11-19 1989-06-01 Max Planck Gesellschaft Mit kontaktionisation arbeitende einrichtung zum erzeugen eines strahles beschleunigter ionen
US7342236B2 (en) * 2004-02-23 2008-03-11 Veeco Instruments, Inc. Fluid-cooled ion source
US7476869B2 (en) 2005-02-18 2009-01-13 Veeco Instruments, Inc. Gas distributor for ion source
US7566883B2 (en) 2005-02-18 2009-07-28 Veeco Instruments, Inc. Thermal transfer sheet for ion source
US7425711B2 (en) 2005-02-18 2008-09-16 Veeco Instruments, Inc. Thermal control plate for ion source

Also Published As

Publication number Publication date
BE785307A (en:Method) 1972-10-16
DE2228117A1 (de) 1973-01-11
GB1383128A (en) 1975-02-05
NL7209031A (en:Method) 1973-01-03
FR2143800A1 (en:Method) 1973-02-09
IT960285B (it) 1973-11-20

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