LU501048B1 - Multi-scale flexible photosensitive mechanical pressure sensor - Google Patents
Multi-scale flexible photosensitive mechanical pressure sensor Download PDFInfo
- Publication number
- LU501048B1 LU501048B1 LU501048A LU501048A LU501048B1 LU 501048 B1 LU501048 B1 LU 501048B1 LU 501048 A LU501048 A LU 501048A LU 501048 A LU501048 A LU 501048A LU 501048 B1 LU501048 B1 LU 501048B1
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- Prior art keywords
- sensing
- flexible
- optical fiber
- optical
- pressure sensor
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- 239000013307 optical fiber Substances 0.000 claims abstract description 62
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 238000012544 monitoring process Methods 0.000 claims abstract description 4
- 239000000835 fiber Substances 0.000 claims description 31
- 238000005516 engineering process Methods 0.000 abstract description 16
- 238000009530 blood pressure measurement Methods 0.000 abstract description 12
- 239000000463 material Substances 0.000 abstract description 11
- 238000005259 measurement Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 8
- 230000007613 environmental effect Effects 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 230000003044 adaptive effect Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000003205 muscle Anatomy 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/247—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet using distributed sensing elements, e.g. microcapsules
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/165—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by means of a grating deformed by the object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/04—Measuring force or stress, in general by measuring elastic deformation of gauges, e.g. of springs
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/243—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using means for applying force perpendicular to the fibre axis
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention belongs to the field of pressure sensing, discloses a multi- scale flexible optical sensing mechanical pressure sensor, including a flexible sensing layer, an optical fiber group and an optical fiber terminal, the flexible sensing layer includes a flexible support layer, a sensing unit group set on the flexible support layer, the sensing unit group includes a plurality of sensing units, the optical fiber group includes a plurality of optical fibers corresponding to the sensing units, the optical fiber is connected to the optical fiber terminal at one end, and the other end is sequentially The optical fiber group includes a plurality of sensing units, the optical fiber group includes a plurality of optical fibers corresponding to the sensing units, one end of the optical fiber is connected to the optical fiber terminal and the other end is sequentially wound on the sensing units, the optical fiber terminal is provided with an optical fiber power supply module and an optical fiber status monitoring module. The present invention innovatively applies flexible materials to pressure sensors, realizing the self-adaptability of complex environment for pressure measurement; the present invention innovatively combines flexible materials with optical fiber sensing technology, realizing the pressure measurement technology of flexible optical sensing for the first time.
Description
1 001870P-WOLU MULTI-SCALE FLEXIBLE PHOTOSENSITIVE MECHANICAL PRESSURE SENSOR LU501048 Technical Field The present invention belongs to the field of pressure sensing, and specifically relates to a multi-scale flexible optical-sensitive mechanical pressure sensor.
Background Technology Pressure sensors are a class of signal sensing devices that convert mechanical signals into electrical signals, and they are also the most widely used class of sensors. Pressure sensors can be divided into traditional mechanical pressure sensors and semiconductor pressure sensors: traditional mechanical pressure sensors have the disadvantages of heavy mass, large size and no electrical signal output; semiconductor pressure sensors have the advantages of high accuracy, small size and electrical signal output than traditional mechanical pressure sensors, but because they are not bendable, when the application environment is more complex (such as irregular placement plane, uneven pressure, or subjected to multiple directions at the same time), they can be used in a variety of applications. However, because they are not bendable, semiconductor pressure sensors cannot be used in more complex application environments (e.g., irregular placement planes, uneven pressure, or simultaneous multi-directional pressure). The performance of existing pressure sensors in sensing multi-scale mechanical signals varies greatly, and sensor designs that can sense large-scale mechanical signals (e.g., buildings, bridges, and roads) cannot be applied to the sensing of small-scale mechanical signals (e.g., muscle movements or small vibrations). At the same time, most of the existing pressure sensors require continuous electrical power support, which greatly limits the continuous application and collection frequency of pressure sensors. Thus, it is clear that the sensing flexibility, sensitivity, energy dependence and environmental adaptiveness of pressure sensors have become influential factors limiting the applicability of pressure sensors, and this issue has become a key technical problem that needs to be solved in the field. Flexible materials have become an excellent alternative to traditional rigid sensor housings due to their light weight, high flexibility and environmental adaptability. Sensors with flexible materials as housing can adapt to complex measurement
2 001870P-WOLU terrains and can perform real-time shape adaptation with the deformation of the LU501048 measurement object (e.g., human motion). It is thus clear that the design of flexible materials as the sensor body can solve the technical problems of multi-scale signal sensing and environmental adaptability.
Fiber optic sensing technology is a sensing technology with excellent sensitivity. The optical wave information in the fiber optic is changed by the external signal, and the change of optical wave information is sensed and processed by the optical detector, and then the sensing of external physical signals is realized. The application of optical fiber sensing technology in the field of pressure sensing can greatly improve the sensitivity and accuracy of pressure measurement, while the advantages of easy bending, low energy consumption and strong resistance to external interference of optical fiber can greatly improve the environmental adaptability and measurement durability of pressure sensors.
Compared with the existing technology, the mechanical pressure sensor designed by applying flexible material and optical fiber sensing technology has the advantages of excellent environmental adaptability, sensing sensitivity and measurement accuracy, and the technology can meet the pressure measurement needs of different scales without energy supply, which can solve the existing pressure sensor can not be achieved without energy supply measurement, uneven pressure measurement, multi- directional pressure measurement, and adapt to the measurement target The technology can solve the industry challenges such as energy-free measurement, uneven pressure measurement, multi-directional pressure measurement, and adapting to real-time deformation of measurement targets, which cannot be achieved by existing pressure sensors. Content of the Invention In response to the problems of the prior art, it is an object of the present invention to provide a technical solution for a multi-scale flexible optical-sensing mechanical pressure sensor. The said multi-scale flexible optical mechanical pressure sensor includes a flexible sensing layer, an optical fiber group and an optical fiber terminal, characterized in
3 001870P-WOLU that the flexible sensing layer includes a flexible support layer, a sensing unit group ~~ LU501048 set on the flexible support layer, the sensing unit group includes a plurality of sensing units, the optical fiber group includes a plurality of optical fibers corresponding to the sensing units, one end of the optical fiber is connected to the optical fiber terminal, andthe other end is sequentially wound on the sensing units. The optical fiber terminal is provided with an optical fiber power supply module and an optical fiber status monitoring module.
The said multi-scale flexible optical mechanical pressure sensor is characterized in that the flexible support layer is provided with a flexible sensing surface, the sensing unit group is placed in the space covered by the flexible support layer and the flexible sensing surface, the flexible sensing surface is provided with a plurality of flexible pressure receiving units corresponding to the sensing units one by one, and the flexible pressure receiving units are located at the upper end of the sensing units.
Said a multi-scale flexible optical sensing mechanical pressure sensor, characterized in that a plurality of unit mounting cavities corresponding to the sensing units one by one are provided inside the flexible support layer, and the sensing units are provided inside the unit mounting cavities.
Said a multi-scale flexible optical mechanical pressure sensor, characterized in that the unit mounting cavity is provided with an optical fiber through-hole, and the flexible support layer is provided with an optical fiber group interface.
Said a multi-scale flexible optical mechanical pressure sensor, characterized in that the part of the optical fiber wrapped around the sensing unit has an optical fiber inlet end and an optical fiber outlet end.
Said a multi-scale flexible optical mechanical pressure sensor, characterized in that the sensing unit undergoes predictable deformation when receiving pressure.
A multi-scale flexible optical rod mechanical pressure sensor as described, characterized in that each fiber of the fiber group is set to consist of a grating and a fiber sheath.
4 001870P-WOLU LU501048 The present invention innovatively applies the flexible material in the pressure sensor, realizing the complex environment self-adaptability of pressure measurement; the present invention innovatively combines the flexible material with the optical fiber sensing technology, realizing the pressure measurement technology of flexible optical sensing for the first time; the present invention innovatively combines the mechanical pressure measurement technology with the flexible material and the optical fiber sensing technology, realizing the pressure measurement technology of multiple measurement scales for the first time The invention has more excellent environmental adaptability, measurement sensitivity, accuracy and energy saving than other pressure sensing technologies. Brief Description of the drawings FIG. 1 shows a schematic diagram of the structure of the present invention.
FIG. 2 shows one of the schematic diagrams of the structure of the fiber optic group connected to the flexible sensing layer in the present invention. FIG. 3 shows a schematic diagram of the structure of the fiber optic group connected to the flexible sensing layer in the present invention bis. FIG. 4 is a schematic diagram of the structure of the flexible support layer in the present invention when the sensing unit is installed on the flexible support layer FIG. 5 is a schematic diagram of the structure of the flexible support layer in the present invention when the sensing unit is not installed on it FIG. 6 is a schematic diagram of the structure of the sensing unit in the present invention when it is not subjected to force FIG. 7 is a schematic diagram of the structure of the sensing unit in the present invention when it is subjected to force; and FIG. 8 shows a schematic diagram of the structure of the optical fiber in the present invention.
Inthe figure: 1-flexible sensing layer; 2-fiber optic group; 3-fiber optic terminal; 101- flexible support layer; 102-flexible sensing surface; 103-flexible pressure receiving unit; 104-sensing unit; 105-unit mounting cavity; 106-fiber optic through-port; 107- fiber optic group interface; 108-fiber optic inlet end; 109-fiber optic outlet end; 201- grating; 202-fiber optic sheath.
001870P-WOLU LU501048 Detailed description of the embodiments As shown in the figure, a multi-scale flexible optical sensing mechanical pressure sensor, including a flexible sensing layer 1, an optical fiber group 2 and an optical 5 fiber terminal 3, the flexible sensing layer 1 includes a flexible support layer 101, a sensing unit group set on the flexible support layer 101, the sensing unit group includes a plurality of sensing units 104 arranged in an array, the optical fiber group 2 includes a plurality of optical fibers corresponding to the sensing units 104, one end of the optical fiber is connected to the optical fiber The fiber optic group 2 includes a plurality of optical fibers corresponding to the sensing units 104, one end of which is connected to the fiber optic terminal 2, and the other end is tightly wound on the sensing units 104 in sequence, and the fiber optic terminal 3 is provided with a fiber optic power supply module and a fiber optic status monitoring module.
As an optimized structure of the present invention: the flexible support layer 101 is provided with a flexible sensing surface 102, and the sensing unit group is placed in the space covered by the flexible support layer 101 and the flexible sensing surface 102, and a plurality of flexible pressure receiving units 103 corresponding to the sensing units 104 are provided on the flexible sensing surface 102, and the flexible pressure receiving units 103 are located at the upper end of the sensing units 104. As an optimized structure of the present invention: a plurality of unit mounting cavities 105 corresponding to the sensing units 104 one by one are provided inside the flexible support layer 101, and the sensing units 104 are provided inside the unit mounting cavities 105.
As an optimized structure of the present invention: the unit mounting cavity 105 is provided with an optical fiber pass-through 106, and the flexible support layer 101 is provided with an optical fiber group interface 107.
As an optimized structure of the present invention: the part of the optical fiber wrapped around the sensing unit 104 has an optical fiber inlet end 108 and an optical fiber outlet end 109.
6 001870P-WOLU As an optimized structure of the present invention: the sensing unit 104 undergoes ~~ LU501048 predictable deformation when receiving pressure.
As an optimized structure of the present invention: each fiber of the fiber group 2 consists of a grating 201 and a fiber sheath 202. The flexible material of the present invention can be silicone, rubber, etc.
The operation principle of a multi-scale flexible optical sensing mechanical pressure sensor is explained in Figs. 6 and 7 as an example.
For example, if part of the flexible sensing layer 1 is under pressure, the pressure first acts on part of the flexible pressure receiving unit 103 set on the flexible sensing surface 102, and the lower surface of the flexible pressure receiving unit 103 is in close contact with the upper surface of the sensing unit 104, and when the flexible pressure receiving unit 103 is deformed downward under pressure, the pressure is directly transmitted to the sensing unit 104, and the sensing unit 104 under pressure The deformation of the sensing unit 104 occurs as shown in Figure 7, and the deformation causes the optical fiber tightly wound in the sensing unit 104 to respond quickly and its optical wave signal changes, and the optical wave signal is transmitted through the optical fiber outlet 109, the The optical wave signal is transmitted to the fiber optic terminal 3 for information processing and transformation through the fiber optic outlet 109, fiber optic through-port 106 and fiber optic group interface 107. If the flexible sensing layer 1 is placed on an uneven measuring surface, the flexible sensing layer 1 can be arbitrarily bent according to the shape of the measuring surface because it is made of flexible material, and when the force is uneven or when the force is applied in multiple directions simultaneously, the flexible pressure receiving cell 103 set on the flexible sensing surface 102 can receive the pressure signal in the cell corresponding to the force direction according to the different force directions, and then according to the described A multi-scale flexible optical sensing mechanical pressure sensor operates according to the same working process, so that the sensing cells 104 with different forces simultaneously send information to the fiber optic terminal 3 to achieve synchronous processing of complex mechanical signals, and then achieve the working expectation of adaptive complex environment.
7 001870P-WOLU LU501048
Finally, it should be noted that the above embodiments are used only to illustrate the technical solution of the present invention, not to limit it; despite the detailed description of the invention with reference to the preceding embodiments, it should be understood by those of ordinary skill in the art that it is still possible to modify the technical solution recorded in the preceding embodiments, or to make equivalent substitutions of some or all of the technical features thereof; and that these modifications or substitutions does not make the essence of the corresponding technical solutions out of the scope of the technical solutions of the embodiments of the present invention.
Claims (7)
1. A multi-scale flexible optical sensing mechanical pressure sensor, including its features are flexible sensing layer (1), optical fiber group (2) and optical fiber terminal (3), the flexible sensing layer (1) includes a flexible support layer (101), a sensing unit group set on the flexible support layer (101), the sensing unit group includes a plurality of sensing units (104), the optical fiber group (2) includes a plurality of optical fibers corresponding to the sensing units (104), one end of the optical fiber is connected to the optical fiber terminal (2), and the other end is sequentially wound on the sensing units (104), the optical fiber terminal (3) is set with an optical fiber power supply module and an optical fiber status monitoring module.
2. The multi-scale flexible optical sensing mechanical pressure sensor as claimed in claim 1, characterized in that the flexible support layer (101) is provided with a flexible sensing surface (102), the sensing unit group is accommodated in the space covered by the flexible support layer (101) and the flexible sensing surface (102), the flexible sensing surface (102) is provided with a plurality of flexible pressure receiving units (103) corresponding to the sensing unit (104) one by one, and the flexible pressure receiving unit (103) is located at the upper end of the sensing unit (104).
3.The multi-scale flexible optical sensing mechanical pressure sensor as claimed in claim 2, characterized in that a plurality of unit mounting cavities (105) corresponding to the sensing unit (104) one by one are provided inside the flexible support layer (101), and the sensing unit (104) is provided inside the unit mounting cavity (105).
4. The multi-scale flexible optical sensing mechanical pressure sensor as claimed in claim 3, characterized in that the unit mounting cavity (105) is provided with an optical fiber pass-through (106), and the flexible support layer (101) is provided with an optical fiber group interface (107).
5. The multi-scale flexible optical sensing mechanical pressure sensor as claimed in any one of claims 1-4, characterized in that the portion of the optical fiber wrapped around the sensing unit (104) has an optical fiber inlet end (108) and an optical fiber outlet end (109).
9 001870P-WOLU LU501048
6. The multi-scale flexible optical sensing mechanical pressure sensor as claimed in any one of claims 1-4, characterized in that the sensing unit (104) undergoes predictable deformation when receiving pressure.
7. The multi-scale flexible optical rod mechanical pressure sensor as claimed in any one of claims 1-4, characterized in that each fiber of the fiber group (2) comprises a grating (201) and a fiber sheath (202).
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010393360.8A CN111426411A (en) | 2020-05-11 | 2020-05-11 | Multi-scale flexible light-sensitive mechanical pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU501048B1 true LU501048B1 (en) | 2022-01-24 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU501048A LU501048B1 (en) | 2020-05-11 | 2020-09-29 | Multi-scale flexible photosensitive mechanical pressure sensor |
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| Country | Link |
|---|---|
| CN (1) | CN111426411A (en) |
| LU (1) | LU501048B1 (en) |
| WO (1) | WO2021227339A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111426411A (en) * | 2020-05-11 | 2020-07-17 | 浙江大学 | Multi-scale flexible light-sensitive mechanical pressure sensor |
| CN112600460B (en) * | 2020-12-04 | 2022-03-25 | 浙江大学 | Self-powered pressure sensor based on post-flexion phenomenon |
| CN114964604B (en) * | 2022-06-10 | 2023-07-18 | 长春理工大学 | Optical fiber pressure sensor and manufacturing method of spiral sensing optical fiber pressure probe |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4408829A (en) * | 1981-01-30 | 1983-10-11 | Schlumberger Technology Corporation | Fiber optic transducers |
| IL99773A (en) * | 1991-10-17 | 1995-11-27 | Israel State | Pressure sensor |
| GB2421075A (en) * | 2004-12-09 | 2006-06-14 | Insensys Ltd | Optical-fibre interstice displacement sensor |
| CN102221374B (en) * | 2010-04-19 | 2015-07-15 | 西安金和光学科技有限公司 | Fiber sensing device for sensing torque parameters |
| CN201926539U (en) * | 2010-12-06 | 2011-08-10 | 沈阳航空航天大学 | Optical fiber pressure sensor |
| CN203772461U (en) * | 2014-02-27 | 2014-08-13 | 中国电子科技集团公司第八研究所 | Stress monitoring device |
| CN103968980B (en) * | 2014-05-20 | 2016-02-03 | 山东大学 | Novel optical fiber tactile array sensor and method for making |
| CN204649334U (en) * | 2015-04-30 | 2015-09-16 | 武汉理工大学 | A kind of optical fiber optical grating array sensor |
| CN206943194U (en) * | 2017-06-30 | 2018-01-30 | 大连理工大学 | A kind of intelligent gasket device for being used for monitoring bolt loosening based on fiber grating |
| CN108663145B (en) * | 2018-08-01 | 2024-05-28 | 桂林电子科技大学 | Sensitization type quasi-distribution optical fiber pressure sensor |
| CN111426411A (en) * | 2020-05-11 | 2020-07-17 | 浙江大学 | Multi-scale flexible light-sensitive mechanical pressure sensor |
-
2020
- 2020-05-11 CN CN202010393360.8A patent/CN111426411A/en active Pending
- 2020-09-29 WO PCT/CN2020/118677 patent/WO2021227339A1/en active Application Filing
- 2020-09-29 LU LU501048A patent/LU501048B1/en active IP Right Grant
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| Publication number | Publication date |
|---|---|
| CN111426411A (en) | 2020-07-17 |
| WO2021227339A1 (en) | 2021-11-18 |
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