CN218994599U

CN218994599U - Flexible touch sensor

Info

Publication number: CN218994599U
Application number: CN202222554676.8U
Authority: CN
Inventors: 王勇; 袁妍; 吕仲明; 穆景颂; 肖慧; 陈品; 陈恩伟; 刘正士
Original assignee: Hefei University of Technology
Current assignee: Hefei University of Technology
Priority date: 2022-09-26
Filing date: 2022-09-26
Publication date: 2023-05-09
Anticipated expiration: 2032-09-26

Abstract

The utility model proposes a flexible tactile sensor comprising: the base plate is provided with a plurality of flexible bulge structures which are hollow cavity structures; the signal acquisition module comprises a plurality of sensitive unit sensing modules, and each flexible convex structure is correspondingly provided with the sensitive unit sensing module; the signal processing module is used for receiving the pressure signal, converting the pressure signal and transmitting the pressure signal; the flexible protective layer is arranged above and/or below the sensing module of the sensitive unit; and a substrate disposed under the base plate, in which at least one wiring layer and a pipe are disposed. The utility model has the advantages of simple structure, low manufacturing cost, reliable measurement, convenient operation and long service life; fluid can be filled into the cavity of the flexible bulge structure through the pipeline, so that the air pressure of the flexible bulge structure is changed, the bearing capacity of the flexible bulge structure is changed, and the measuring range is changed.

Description

Flexible touch sensor

Technical Field

The utility model belongs to the technical field of sensor equipment, and particularly relates to a flexible touch sensor.

Background

With the development of intelligent sensing and communication technologies, intelligent wearable devices have been widely applied to human motion tracking, environment sensing and interaction, etc., wherein intelligent insoles, intelligent shoes, intelligent cushions, etc. are also layered endlessly and additional functions are increasingly expanded.

In recent years, with the development of science and technology, people have more imagination and greater expectations for the application scene of intelligent robots. The next generation robots are different from the traditional industrial robots, and are expected to be greatly developed in the fields of wearable equipment, outer space exploration, advanced medical detection and the like. They rely on a wide variety of sensors to sense and analyze the environment and thus possess a human-like feel.

The flexible tactile sensor array is an important medium for the robot to perceive the external environment, which is extremely important for the robot to properly operate the target object. On the premise that the robot flexibly and freely moves, the flexible touch sensor array is required to accurately sense the external environment so as to realize various accurate operations on the target object.

Despite the recent developments in the field of tactile sensing, many challenges remain in practical applications, such as performance degradation of the sensor during repeated deformations, cross-talk decoupling from simultaneous detection of multiple dimensions and multiple stimuli, force, thermal, electrical performance matching between internal components of the integrated sensing system, etc. These challenges have created new development opportunities that indicate future development for related material fabrication, device processing, and system integration. Undoubtedly, the flexible touch sensor array will be developed towards more flexibility, miniaturization, intelligence, multifunction and humanization, and the application boundary of the flexible touch sensor array will be greatly widened, so that the flexible touch sensor array plays a more irreplaceable role in more fields. The flexible touch sensor array can be divided into a flexible touch sensor array, a moment sensor and the like according to functions, and the conventional flexible touch sensor array has the following defects:

1. the existing flexible touch sensor array mostly adopts a rigid matrix, and lacks of flexibility, so that the sensitivity of the flexible touch sensor array is low, and the detection of information is not facilitated;

2. the existing sensor has small contact area between the dielectric layer and the metal electrode and high processing difficulty, so that improvement is needed.

Disclosure of Invention

In view of the above drawbacks of the prior art, an object of the present utility model is to provide a flexible touch sensor, so as to improve the problems that the existing flexible touch sensor array mostly adopts a rigid substrate, and the existing flexible touch sensor array has low sensitivity and is unfavorable for information detection due to lack of flexibility, and the existing sensor has small contact area between a dielectric layer and a metal electrode and is difficult to process.

To achieve the above and other related objects, the present utility model provides a flexible tactile sensor comprising:

the base plate is provided with a plurality of flexible bulge structures which are hollow cavity structures;

the signal acquisition module comprises a plurality of sensitive unit sensing modules, and each flexible convex structure is correspondingly provided with the sensitive unit sensing module;

the signal processing module is used for receiving the pressure signal, converting the pressure signal and transmitting the pressure signal;

the flexible protective layer is arranged above and/or below the sensing module of the sensitive unit;

and a substrate disposed under the base plate, in which at least one wiring layer and a pipe are disposed.

In one embodiment of the present utility model, the sensing unit sensing module includes two sensing units, and the two sensing units are arranged in front and back;

or three sensitive units which are arranged in an equilateral triangle;

or comprises four sensitive units which are uniformly arranged in the front-back and left-right directions.

In one embodiment of the present utility model, the base plate may be divided into a plurality of load-bearing measurement areas, and the sensing units at the same positions of the plurality of flexible bump structures on the same load-bearing measurement area are connected in series or parallel with each other.

In one embodiment of the utility model, the sensing unit is a resistive sensing unit and/or a capacitive sensing unit.

In one embodiment of the present utility model, if the sensing unit corresponding to each flexible bump structure is a resistive sensing unit, the sensing unit is disposed on an outer surface of the flexible bump structure; and if the flexible convex structure is a capacitive sensitive unit, the capacitive sensitive unit is arranged on the flexible convex structure and/or at the bottom of the flexible convex structure.

In one embodiment of the present utility model, if the sensing units at the same position of the plurality of flexible bump structures on the same load-bearing measurement area are connected in parallel, two ends of the sensing unit at the same position of the flexible bump structure are led into the same wiring layer or different wiring layers through leads to perform circuit arrangement.

In one embodiment of the utility model, the capacitive sensing cell comprises an upper electrode, a lower electrode, wherein the upper electrode or the lower electrode may be provided as a common electrode.

In one embodiment of the present utility model, if the sensing units at the same position of the plurality of flexible bump structures on the same load-bearing measurement area are connected in series, two ends of the sensing unit at the same side of the flexible bump structure are led into the same wiring layer through a lead wire to perform circuit arrangement.

In one embodiment of the utility model, a conduit is disposed on the substrate through which fluid may be filled into the chambers of the flexible raised structures.

In one embodiment of the present utility model, the middle portion of the flexible protrusion structure protrudes outwards, and the flexible protrusion is a hemispherical structure, a semi-ellipsoidal structure or a columnar structure.

According to the flexible touch sensor provided by the utility model, the flexible bulge structure is of a cavity structure, and fluid can be filled into the cavity of the flexible bulge structure through the pipeline, so that the air pressure of the flexible bulge structure is changed, the bearing capacity of the flexible bulge structure is changed, and the measuring range is further changed.

The utility model provides a flexible touch sensor, wherein a flexible bulge is correspondingly deformed under the action of forces in different directions and sizes, so that a signal acquisition module senses different signals, and the magnitude and the direction of the force can be measured.

The utility model provides a flexible touch sensor, a sensing unit in a bulge adopts a resistor or a capacitor, the connection mode of wires for connecting the sensing units at the same position in the same bearing measurement area is serial or parallel, the wiring is simpler, the measurement circuit is simple, the measured multidimensional force information is convenient to process, and the main information of the bearing measurement area is quickly obtained.

According to the flexible touch sensor provided by the utility model, the two ends of the sensitive unit at the same side position of the flexible bulge structure of the bearing measurement area are led into the same wiring layer or different wiring layers through the pins by combining the conductive material with the threading holes, so that the arrangement of the circuits is simple, and the circuit arrangement is not affected.

The flexible touch sensor provided by the utility model can be connected in series or in parallel with capacitive sensing units which are arranged at the same position in flexible bulges of n multiplied by m rows and columns in a flexible bulge array according to requirements; wherein n, m is greater than or equal to 1, n, m is an integer, and n, m does not exceed the number of rows and columns of the flexible bump array.

The utility model has the advantages of simple structure, low manufacturing cost, reliable measurement, convenient operation and long service life, and efficiently and reasonably solves the measurement of the magnitude and the direction of multidimensional force.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed for the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a flexible touch sensor according to an embodiment of the utility model.

FIG. 2 is a schematic diagram illustrating a sensing unit of a flexible touch sensor according to an embodiment of the utility model.

FIG. 3 is a schematic diagram illustrating a sensing unit of a flexible touch sensor according to an embodiment of the utility model.

Fig. 4 is a schematic structural diagram of a capacitive sensing cell with a common electrode according to an embodiment of the utility model.

Fig. 5 is a schematic structural diagram of a capacitive sensing unit as a sensing unit in a flexible touch sensor according to another embodiment of the utility model.

FIG. 6 is a schematic view of the shape of a flexible bump structure in a flexible tactile sensor according to one embodiment of the utility model.

FIG. 7 is a block diagram illustrating a signal processing module of a flexible touch sensor according to an embodiment of the utility model.

FIG. 8 is a schematic diagram of a series connection of resistive sense cells according to an embodiment of the present utility model.

FIG. 9 is a schematic diagram of a capacitive sensing cell series connection in accordance with an embodiment of the present utility model.

FIG. 10 is a schematic diagram of parallel connection of capacitive sensing cells according to an embodiment of the utility model.

FIG. 11 is a schematic diagram of a capacitive sensing cell with a common electrode according to an embodiment of the utility model.

Description of the reference numerals:

a bottom plate 10; a sensitive unit 20; a signal processing module 30; a substrate 40; a flexible bump structure 101; a wiring layer 41; a conduit 42; a through hole 421; a solid medium 1011; a first sensitive unit 201; a second sensing unit 202; a third sensitive unit 203; a fourth sensing unit 204; an upper electrode 2001; a lower electrode 2002; a common electrode 2003; a flexible protective layer 51; a wire guide 401; a conditioning unit 301; an analog-to-digital conversion unit 302; a communication unit 303.

Detailed Description

Other advantages and effects of the present utility model will become apparent to those skilled in the art from the following disclosure, which describes the embodiments of the present utility model with reference to specific examples. The utility model may be practiced or carried out in other embodiments that depart from the specific details, and the details of the present description may be modified or varied from the spirit and scope of the present utility model.

It should be noted that, the illustrations provided in the present embodiment merely illustrate the basic concept of the present utility model by way of illustration, and only the components related to the present utility model are shown in the drawings and are not drawn according to the number, shape and size of the components in actual implementation, and the form, number and proportion of the components in actual implementation may be arbitrarily changed, and the layout of the components may be more complex.

Referring to fig. 1 to 10, the present utility model proposes a flexible touch sensor to solve the problems that the existing flexible touch sensor array mostly adopts a rigid substrate, the lack of flexibility of the existing flexible touch sensor array results in lower sensitivity of the flexible touch sensor array, which is not beneficial to information detection, and the existing sensor has small contact area between a dielectric layer and a metal electrode and large processing difficulty. Specifically, in this embodiment, the flexible touch sensor includes a base plate 10, a signal acquisition module, a signal processing module 30 and a substrate 40, where a plurality of flexible protrusion structures 101 are disposed on the base plate 10, and the signal acquisition module is disposed on the base plate 10, for example, the signal acquisition module includes a plurality of sensing unit sensing modules, each of the flexible protrusion structures 101 is correspondingly disposed with the sensing unit sensing module, the sensing unit sensing module is used for detecting multidimensional forces acting on the flexible protrusion structures 101 and generating an electrical signal, the signal processing module 30 is connected with the sensing unit sensing module through a wire, so as to receive a pressure signal and condition the electrical signal into a useful signal, and the substrate 40 is disposed under the base plate 10, and at least one wiring layer 41 and a pipe 42 are disposed therein, so as to connect the plurality of sensing unit sensing modules with the signal processing module 30.

Referring to fig. 1 and 2, it should be further noted that the base plate 10 may be divided into a plurality of carrying and measuring areas, and the sensing units 20 at the same position of the plurality of flexible bump structures 101 on the same carrying and measuring area are connected in series or in parallel, i.e. the flexible bump structures 101 at different areas on the base plate 10 are divided into different measuring areas.

Referring to fig. 1 and fig. 2, it should be further noted that the flexible protrusion structure 101 has a certain elasticity, for example, a silica gel structure is provided, and the plurality of flexible protrusion structures 101 in each bearing measurement area are arranged in an array manner, so that the array of flexible protrusion structures 101 has a good buffering effect and a certain buffering protection effect on the object to be measured. Capacitive sensing units placed in the same position in n x m rows and columns of flexible protrusions in the flexible protrusion array can be connected in series or in parallel as required; wherein n, m is greater than or equal to 1, n, m is an integer, and n, m does not exceed the number of rows and columns of the flexible bump array.

Referring to fig. 1, 2 and 6, in the present embodiment, the flexible protrusion structure 101 is disposed on the bottom plate 10 and is in sealing connection with the bottom plate 10, the middle portion of the flexible protrusion structure 101 protrudes outwards, and the flexible protrusion structure 101 is in a hemispherical structure or a semi-ellipsoidal structure or a columnar structure, so as to adapt to different usage situations. Because the flexible protrusion structure 101 on the base plate 10 is deformed under force, the sensing unit 20 in the protrusion generates a change of an electrical signal, a known corresponding relationship between the pressure change and the output electrical signal change is obtained through calibration, and the data size of the multidimensional force of the object to be measured can be obtained through measuring the electrical signal.

Referring to fig. 1 and 2, in this embodiment, the flexible protrusion structures 101 are correspondingly provided with a plurality of sensing units 20, and the plurality of flexible protrusion structures 101 can contact and support different areas of the object to be tested, so that the sensing units 20 have different sensitivity to forces from different directions, and can detect deformation of the insoles in multiple directions so as to sense multidimensional force distribution of pressure and tangential acting force, thereby solving the defect that some devices can only measure one-dimensional force distribution.

Referring to fig. 1 and 2, in the present embodiment, each sensing unit sensing module includes a plurality of sensing units 20, for example, the sensing unit sensing module includes two sensing units 20, and the two sensing units 20 are disposed in front and back on the flexible bump structure 101; or three sensing units 20, wherein the three sensing units 20 are arranged on the flexible convex structure 101 in an equilateral triangle; or comprises four sensitive units 20, and the four sensitive units 20 are uniformly arranged on the flexible convex structure 101 in a front-back left-right manner. I.e. the flexible protrusion 101 is provided with a plurality of sensitive units 20, and the sensitive units 20 at the same position on the plurality of flexible protrusion 101 on the same load-bearing measurement area are connected in series or in parallel with each other. In this embodiment, the sensing units 20 are, for example, resistive sensing units or capacitive sensing units, that is, the sensing units 20 corresponding to the flexible bump structures 101 adopt resistors or capacitors, the connection mode of the wires connected to the sensing units 20 at the same position in the same bearing area is serial or parallel, the wiring is simpler, the measuring circuit is simple, the measured multidimensional force information is convenient to process, and the main information of the bearing measuring area is quickly obtained.

The sensing units 20 in the bump structures of fig. 2 are resistive sensing units, the sensing units 20 in the bump structures of fig. 3, 4 and 5 are capacitive sensing units, the positive and negative electrodes of the sensing units 20 are led into the same wiring layer or different wiring layers on the substrate to perform circuit arrangement by combining conductive materials with the threading holes, for example, if the sensing units 20 at the same positions of the plurality of flexible bump structures 101 on the same base plate 10 are connected in parallel, two ends of the sensing units 20 at the same positions of the flexible bump structures 101 are led into the same wiring layer or different wiring layers to perform circuit arrangement by leads. If the sensing units 20 at the same position of the plurality of flexible bump structures 101 on the same base plate 10 are connected in series, two ends of the sensing unit 20 at the same side of the flexible bump structures 101 are led into the same wiring layer through leads to perform circuit arrangement.

The flexible protrusion structures of fig. 2 to 5 are all hollow, in this embodiment, a through hole 421 is provided on the substrate 40, so that the through hole 421 is communicated with the hollow of the flexible protrusion structure 101, and through the communication with the pipe 42, the fluid is filled into the hollow through the pipe 42 via the through hole 421, so as to change the air pressure of the flexible protrusion structure, change the bearing capacity of the protrusion structure, and further change the measurement range. In the present embodiment of the present utility model, in the present embodiment,

it should be noted that, the sensing units 20 are, for example, resistive sensing units or capacitive sensing units, and the sensing units 20 at the same position of the plurality of flexible bump structures 101 on the same load-bearing measurement area may be connected in series or parallel, where if the sensing units are connected in parallel, two ends of the sensing unit 20 at the same position of the flexible bump structures 101 are led into the same wiring layer 41 or different wiring layers 41 through leads to perform circuit arrangement; if the two ends of the sensitive units 20 at the same side of the flexible bump structure 101 are connected in series, the two ends of the sensitive units are led into the same wiring layer 41 through leads to perform wiring arrangement. If the sensing units 20 corresponding to each flexible bump structure 101 are resistive sensing units, they are disposed on the bump structures 101; in the case of capacitive sensing elements, they are provided on the flexible protrusion 101 and/or at the bottom of the flexible protrusion 101.

Referring to fig. 5, in this embodiment, the capacitive sensing unit is disposed in the cavity of the flexible protrusion structure 101 and is located at the bottom of the flexible protrusion structure 101, and a solid medium 1011 is disposed at the top of the inner side of the flexible protrusion structure 101, so that when the flexible protrusion structure 101 is pressed down by force, the solid medium 1011 is located between two electrodes of the capacitive sensing unit, and the electrodes are deformed by force, so as to generate an electrical signal.

Referring to fig. 1, 2 and 8, in this embodiment, the resistive sensing units at the same position of the plurality of bump structures 101 on the same load-bearing measurement area are illustrated as being connected in series, and the number of the resistive sensing units is, for example, four sensing units 20, which are respectively a first sensing unit 201, a second sensing unit 202, a third sensing unit 203 and a fourth sensing unit 204, which are respectively disposed on the front, rear, left and right sides of the flexible bump structures 101.

Referring to fig. 1, 2 and 8, in this embodiment, the resistive sensing units on the plurality of bump structures in the same load-bearing measurement area are connected in series, for example, the first sensing units 201 on the same load-bearing measurement area on the front side of the bump structure 101 are connected in series by wires, and the wires are disposed in the wiring layer 41, and correspondingly, the second sensing units 202 on the same load-bearing measurement area on the rear side of the flexible bump structure 101 are connected in series by wires, and the wires are disposed in the wiring layer 41.

Referring to fig. 1, 3, 9 and 10, the flexible bump structure 101 in fig. 9 and 10 is divided into 4 3×3 bump arrays, and the four 3×3 bump arrays respectively represent a series connection and a series wiring schematic diagram of the first sensing unit 201, the second sensing unit 202, the third sensing unit 203 and the fourth sensing unit 204. In another embodiment, the capacitive sensing cells at the same position of the plurality of flexible bump structures 101 on the base plate 10 are described as being connected in parallel, and each capacitive sensing cell includes two parts, namely an upper electrode 2001 and a lower electrode 2002, where the upper electrode 2001 and the lower electrode 2002 are disposed on the inner layer of the flexible bump structures 101, and the capacitive sensing cells at the same position of the plurality of flexible bump structures 101 on the base plate are connected in series or in parallel.

For example, when they are connected in series, the leads of the upper electrode 2001 and the lower electrode 2002 of the capacitive sensing cell at the same position thereof may be arranged in the same layer, and 4 wiring layers 41 in total.

For example, when they are connected in parallel, the leads of the upper electrode 2001 and the lower electrode 2002 at the same position thereof may be arranged in the same layer, and 4 wiring layers 41 in total.

For example, when they are connected in parallel, the leads of the upper electrode 2001 and the lower electrode 2002 at the same position are not arranged at the same layer; while the leads of the upper electrodes 2001 of the two sensitive units 20 at opposite positions are arranged in the same layer, and the leads of the lower electrodes 2002 are arranged in the same layer, 4 wiring layers 41 in total.

Referring to fig. 1, fig. 4, and fig. 11, in this embodiment, the upper electrode 2001 or the lower electrode 2002 of the capacitive sensing unit may be set as a common electrode, where the connection mode is parallel, for example, in fig. 11, the sensing unit sensing module has 4 sensing units, namely, a first sensing unit 201, a second sensing unit 202, a third sensing unit 203, and a fourth sensing unit 204, where the lower electrode of the first sensing unit 201, the second sensing unit 202, the third sensing unit 203, and the fourth sensing unit 204 is set as a common electrode 2003, the wires of the upper electrode 2001 in the first sensing unit 201 and the upper electrode 2001 of the third sensing unit 203 are arranged on the same layer, the wires of the upper electrode 2001 of the second sensing unit 202 and the upper electrode 2001 of the fourth sensing unit 204 are arranged on the same layer, and the common electrode 2003 is separately arranged on one layer, and there are 3 wiring layers 41.

For example, the wires of the upper electrode 2001 in the first sensing unit 201 and the upper electrode 2001 of the third sensing unit 203 are arranged in the same layer, and the wires of the upper electrode 2001 of the second sensing unit 202 and the upper electrode 2001 of the fourth sensing unit 204 and the common electrode 2003 are arranged in the same layer, at this time, 2 wiring layers 41 are in total.

Referring to fig. 1, 2 and 3, in the present embodiment, flexible protection layers 51 are further disposed on two sides of the sensing module of the sensing unit, for example, the flexible protection layers 51 are disposed above and below the sensing unit 20 and respectively contact with air and/or liquid, for example, the flexible protection layers 51 disposed above the sensing unit 20 contact with air, and the flexible protection layers 51 disposed below the sensing unit 20 contact with air or liquid in the air of the flexible protrusion structure to protect the sensing unit 20 therein.

Referring to fig. 1 to 4, in this embodiment, a wire guide is further provided at the connection between the wiring layer 41 and the bump structure 101, for accommodating wires to pass through, so as to introduce the wires connected to the sensing unit 20 into different wire layers in the wiring layer 41 for wiring, and a temperature sensor may be placed in the bump, so as to analyze the influence of temperature on the sensing unit 20.

Referring to fig. 1 and 7, in the present embodiment, the signal processing module 30 includes: the device comprises a signal conditioning unit 301, an analog-to-digital conversion unit 302 and a communication unit 303, wherein the signal conditioning unit 301 is used for acquiring the multi-dimensional force signal and converting the multi-dimensional force signal into a conditioning signal, the analog-to-digital conversion unit 302 is used for acquiring the conditioning signal and converting the conditioning signal into a digital signal, the communication unit 303 is used for acquiring the digital signal and sending the digital signal to a processing module, and the processing module is provided with relevant shaping for processing the digital signal, and can process data through relevant programs and feed back valuable analysis results to a wearer.

The foregoing description is only illustrative of the preferred embodiments of the present application and the technical principles employed, and it should be understood by those skilled in the art that the scope of the present application is not limited to the specific combination of the above technical features, but encompasses other technical features which may be combined with any combination of the above technical features or their equivalents without departing from the inventive concept, such as the technical features disclosed in the present application (but not limited to) and the technical features having similar functions are substituted for each other.

Other technical features besides those described in the specification are known to those skilled in the art, and are not described herein in detail to highlight the innovative features of the present utility model.

Claims

1. A flexible tactile sensor comprising:

2. The flexible touch sensor of claim 1, wherein the sensing unit sensing module comprises two sensing units, the two sensing units being arranged in tandem;

or three sensitive units which are arranged in an equilateral triangle;

3. The flexible touch sensor of claim 2, wherein the base plate is divided into a plurality of load-bearing measurement areas, and the sensing units at the same positions of the plurality of flexible bump structures on the same load-bearing measurement area are connected in series or in parallel with each other.

4. The flexible tactile sensor according to claim 2, wherein the sensitive unit is a resistive sensitive unit and/or a capacitive sensitive unit.

5. The flexible touch sensor of claim 2, wherein each of the sensing elements of the flexible protrusion structure is a resistive sensing element, and is disposed on an outer surface of the flexible protrusion structure; and if the flexible convex structure is a capacitive sensitive unit, the capacitive sensitive unit is arranged on the flexible convex structure and/or at the bottom of the flexible convex structure.

6. A flexible touch sensor as recited in claim 3, wherein if the sensing units at the same location of the plurality of flexible bump structures on the same load-bearing measurement area are connected in parallel with each other, two ends of the sensing unit at the same location of the flexible bump structures are led into the same wiring layer or different wiring layers through leads to perform wiring arrangement.

7. The flexible touch sensor of claim 4, wherein the capacitive sensing element comprises an upper electrode, a lower electrode, wherein the upper electrode or the lower electrode is configured as a common electrode.

8. A flexible touch sensor as recited in claim 3, wherein if the sensing units at the same location of the plurality of flexible bump structures on the same load-bearing measurement area are connected in series, two ends of the sensing unit at the same side of the flexible bump structures are led into the same wiring layer through leads for wiring arrangement.

9. The flexible tactile sensor according to claim 1, wherein a conduit is arranged on the substrate through which fluid can be filled into the chamber of the flexible protrusion structure.

10. The flexible tactile sensor of claim 1 wherein a central portion of said flexible protrusion structure protrudes outwardly and said flexible protrusion is a hemispherical structure, a semi-ellipsoidal structure, or a columnar structure.