CN208206352U - A kind of three-dimensional force flexible sensor - Google Patents
A kind of three-dimensional force flexible sensor Download PDFInfo
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- CN208206352U CN208206352U CN201820611677.2U CN201820611677U CN208206352U CN 208206352 U CN208206352 U CN 208206352U CN 201820611677 U CN201820611677 U CN 201820611677U CN 208206352 U CN208206352 U CN 208206352U
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Abstract
The utility model discloses a kind of three-dimensional force flexible sensors; belong to sensor technical field; including flexible substrates and micro-structure; wherein flexible substrates include at least three pressure-sensitive units protected interlayer and be placed in protection interlayer and be in array distribution, are connected between the ranks of pressure-sensitive unit by conducting wire；Micro-structure includes support plate, and the upper surface of support plate is equipped with stress convex block, lower surface is equipped with support column identical with pressure-sensitive element number, is inclination installation between support column and support plate, and the lower end surface of support column is concordant and corresponding with pressure-sensitive unit respectively arranges.When stress, it is transferred to pressure-sensitive unit by four support columns, force direction suffered by pressure-sensitive unit is inclined direction, and pressure-sensitive cell resistance is caused to generate the only normal pressure of variation.The resistance of variation can by scanning obtain, according to theory deduction can acquire flexible sensor unit suffered by three-dimensional force size and Orientation, so reduce retinoic acid syndrome degree, reduce decoupling difficulty.
Description
Technical field
The utility model relates to sensor technical field, in particular to a kind of three-dimensional force flexible sensor.
Background technique
During precise operation, tactile is the important component of the mankind and the perception of intelligent robot environmental information.Touching
Feel to include the main sensible forms such as contact force, size, vibration, temperature, texture, reflects the state of ambient enviroment and effective object
Information, thus the necessary medium that touch sensor becomes robot and objects outside directly acts on.Especially flexible multidimensional tactile
Sensor, the flexible flexible sensitive skin at various molded non-planars as robot, in the non-knot such as medical treatment, space flight, agricultural
Have in structure environment and is widely applied.
China Patent Publication No. is flexibility multi-dimension force sensor disclosed in CN106017752A, by detecting pressure sensing list
The changing value of voltage after first stress obtains the three-dimensional force that flexible multi-dimension force sensor surface receives.But in the sensor structure
It can not be fitted closely between metal connecting piece and main body silica gel, structure not enough optimizes, and precision is inadequate.
China Patent Publication No. is a kind of change medium-type capacitor flexible 3 D force tactile sensing disclosed in CN103954382A
Meet changeable dielectric layer stress in device and generate deformation, is realized by the changing value of four effective capacitances in measurement sensor pair
The detection of three-dimensional force.The capacitance sensor has certain flexibility, and range and the sensitivity of three-dimensional force, but capacitance is adjusted
It is easy to be interfered by parasitic capacitance, extraneous environmental noise etc., three-dimensional force testing result inaccuracy.
A kind of three-dimensional force flexible touch sensation sensor array that the Sun Xin etc. of Hefei Institute Of Intelligent Machines Chinese Academy Of Sciences is developed,
Rank scanning measures the resistance value of conductive rubber cylindrical body in micro-structure, by decoupling the three-dimensional of the effect of obtaining on a sensor
Power.But the flexible sensor structure is more demanding to decoupling algorithm, decouples latitude and difficulty is big, reduce decoupling efficiency and essence
It spends not high.
Utility model content
The purpose of this utility model is to provide a kind of three-dimensional force flexible sensors, reduce retinoic acid syndrome degree, reduce decoupling
Difficulty.
In order to achieve the above object, the utility model uses a kind of three-dimensional force flexible sensor, including flexible substrates and micro- knot
Structure, wherein flexible substrates include protecting interlayer and being placed in protection interlayer and in at least three pressure-sensitive of array distribution
Unit is connected by conducting wire between the ranks of pressure-sensitive unit；Micro-structure includes support plate, and it is convex that the upper surface of support plate is equipped with stress
Block, lower surface are equipped with support column identical with pressure-sensitive element number, are inclination installation between support column and support plate, support column
Lower end surface is concordant and corresponding with pressure-sensitive unit respectively arranges.
Preferably, the shaft of the support column is inclined outwardly along the support plate plate face, and each support column shaft with
Inclined angle is identical between the support plate plate face.
Preferably, the support column identical with pressure-sensitive element number is centrosymmetric.
Preferably, the support column is quadrangular.
Preferably, the stress convex block is arc bump.
Preferably, described at least three pressure-sensitive units are triangular in shape, rectangular matrix or ring quasi array distribution, each pressure-sensitive unit
Ranks between connect by the conducting wire being distributed with pressure-sensitive unit identical array.
Preferably, the protection interlayer includes upper film and lower film, and it is thin under that the pressure-sensitive unit is arranged in film
Between film.
Preferably, the pressure-sensitive unit is prepared by the flexible strain gauge material with piezoresistive effect.
Preferably, the material of the upper film and lower film is PET or PVC or silicon rubber, and thickness is 5 μm~50 μ
m。
Preferably, the total height of the micro-structure is 0.1mm~1mm, total side length is 0.5mm~5mm, and micro-structure uses
Rubber material preparation.
Compared with prior art, there are following technical effects for the utility model: three-dimensional force provided by the utility model is flexible
Sensor is transferred to the pressure in flexible substrates when being acted on by external stress, through multiple inclined support columns in micro-structure
Quick unit, force direction suffered by pressure-sensitive unit are the inclined direction of support column, therefore, pressure-sensitive cell resistance are caused to generate
The only normal pressure of variation.Wherein, the variation of pressure-sensitive cell resistance can be obtained by scanning, according to the pressure drag side of pressure-sensitive unit
The size of normal pressure suffered by pressure-sensitive unit can be obtained in journey, then derives X-axis and Y-axis side according to the normal pressure of pressure-sensitive unit
To component, reduce retinoic acid syndrome degree, reduce decoupling difficulty.
Detailed description of the invention
With reference to the accompanying drawing, specific embodiment of the present utility model is described in detail:
Fig. 1 is a kind of structural schematic diagram of three-dimensional force flexible sensor；
Fig. 2 is a kind of top view of three-dimension flexible sensor；
Fig. 3 is that there are three the structural schematic diagrams of the three-dimensional force flexible sensor of pressure-sensitive unit for tool；
Fig. 4 is the structural schematic diagram that pressure-sensitive unit is arranged in a ring；
Fig. 5 is the force analysis figure to unit a pressure-sensitive in Fig. 1；
Fig. 6 is the force analysis figure of pressure-sensitive unit a in Fig. 3；
Fig. 7 is the force analysis figure of pressure-sensitive unit a in Fig. 4.
In figure:
11: protection interlayer；12: conducting wire；21: support plate；22: stress convex block；23: support column；1: pressure-sensitive unit a；2: pressure
Quick unit b；3: pressure-sensitive unit c；4: pressure-sensitive unit d；5: upper film；6: lower film.
Specific embodiment
In order to further explain the feature of the utility model, please refer to detailed description below in connection with the utility model with
Attached drawing.Institute's attached drawing is only for reference and purposes of discussion, is not used to limit the protection scope of the utility model.
As shown in Figure 1 to Figure 2, present embodiment discloses a kind of three-dimensional force flexible sensors, comprising: flexible substrates and micro- knot
Structure, wherein flexible substrates include protecting interlayer 11 and being placed in protection interlayer 11 and in at least three of array distribution
Pressure-sensitive unit is connected by conducting wire 12 between the ranks of pressure-sensitive unit, and each pressure-sensitive unit is external by two conducting wires accesses of ranks
Circuit, in order to measure the resistance value of pressure-sensitive unit；Micro-structure includes support plate 21, and it is convex that the upper surface of support plate 21 is equipped with stress
Block 22, lower surface are equipped with support column 23 identical with pressure-sensitive element number, are inclination installation between support column 23 and support plate 21,
The lower end surface of support column 23 is concordant and corresponding with pressure-sensitive unit respectively arranges.
It should be noted that pressure-sensitive unit in the present embodiment changes with the changes in resistance value of stress, use
Flexibility strain material preparation, pressure-sensitive unit is placed in protection interlayer, and protection interlayer shields to pressure-sensitive unit, prevents from pressing
Quick unit is by abrasion, corrosion.Pressure-sensitive unit can facilitate three-dimensional force flexible sensor to carry out array in point column branch's formula distribution
Distribution.Pressure-sensitive cellular array formula distribution, can facilitate and increase three-dimensional force flexible sensor element number, according to actual forces distribution
Demand, by array manner placement sensor unit.The upper surface of stress convex block 22 and support plate 21 is Hard link, support plate 21
It is Hard link between lower surface and the upper surface of support column 23, the area of 23 lower end surface of support column is less than pressure-sensitive unit upper surface
Area, as shown in Figure 1, the lower end surface of four support columns 23 respectively with pressure-sensitive unit a1, pressure-sensitive unit b2, pressure-sensitive unit c3, pressure
The upper surface of quick unit d4 corresponds arrangement, so that the lower end surface of support column 23 contacts with protective layer and is located exactly at pressure-sensitive list
In member.
In practical application, the protection interlayer of flexible substrates is prepared using flexible material, can be very good to be attached to actuator
End surface, stress convex block 22 are transferred to pressure-sensitive list in the effect by external stress, through four inclined support columns 23
Member, the force direction that pressure-sensitive unit is subject to are the inclined direction of support column 23, cause pressure-sensitive cell resistance changed
There is normal pressure, by scan line column wire, first connects the first row conductor, detect the electricity between all column wires and the first row conductor
Resistance, then the second row conductor is connected, the resistance between all column wires and the second row conductor is detected, pressure-sensitive cell resistance is thus obtained
Changing value, thus the size of the normal pressure according to suffered by the pressure drag equation varistor of pressure-sensitive unit, and according to suffered by pressure-sensitive unit
Normal pressure, derive the separation of other both directions, reduce retinoic acid syndrome degree, reduce decoupling difficulty.
As further preferred scheme, the shaft of support column 23 is inclined outwardly along 21 plate face of support plate, and every
Inclined angle is identical between a 23 shaft of support column and 21 plate face of support plate.Wherein, the shaft of support column 23 is along support
21 plate face of plate is tilted to plate face side, inclined angular range are as follows: the range of tilt angles between support column and x-axis and y-axis is 20 °
~70 °, so that preferably the direction x, the y and z component of active force suffered by pressure-sensitive unit is separated.
As further preferred scheme, between multiple support columns 23 for being arranged in the present embodiment centered on be arranged symmetrically.
As shown in Figure 1, four support columns 23 are centrosymmetrically arranged with the center of support plate 21.By multiple supports in the present embodiment
Column is set as being centrosymmetrically arranged, and according to the space angle of one of support column, can derive the Space Angle of other support columns
Degree reduces the difficulty of parsing decoupling formula.
Quadrangular is chosen as further preferred scheme, in the present embodiment as support column 23, can by pressure-sensitive unit by
To force direction be fixed as incline direction.It should be noted that those skilled in the art can also select according to the actual situation
Select the other forms such as cylinder, triangular prism.
As further preferred scheme, stress convex block 22 is arc bump, and in stress convex block 22 and support column 23
The corresponding arrangement of heart symmetric points.Wherein, stress convex block 22 is designed as ellipsoid by the present embodiment, preferably to transmit three-dimensional force.Such as
The center of ellipsoid convex block shown in Fig. 1 arrangement corresponding with the center of 21 plate face of support plate, may make micro-structure uniform force, avoids
Generate torque.
As further preferred scheme, as shown in figure 1, figure 3 and figure 4, at least three pressure-sensitive unit is triangular in shape,
Rectangular matrix or ring quasi array are distributed, and are connected between the ranks of each pressure-sensitive unit by the conducting wire of array distribution.
As further preferred scheme, as shown in Figure 1, protection interlayer 11 includes upper film 5 and lower film 6, the pressure
Quick unit is arranged between film 5 and lower film 6.The material of upper film 5 and lower film 6 be PET or PVC or silicon rubber, and
Thickness is 5 μm~50 μm, it is ensured that cost will not be too high while film has flexible characteristic.Upper film 5 and lower film 6 are adopted
It is prepared with flexible material, has good flexibility, it can be achieved that bending deformation, is attached to executor tail end surface well.
As further preferred scheme, pressure-sensitive unit is prepared by the strain resistor with piezoresistive effect.Strain resistor can
It prints or is pasted on film.
As further preferred scheme, the total height of micro-structure is 0.1mm~1mm, if too high influence is arranged in height
Sensor is flexible, and the transmitting of too low influence power is arranged in height；Total side length is 0.5mm~5mm, and side length setting is too long to will increase sensing
Device unit size, side length setting is too small to will affect contact of the sensor unit with environmental objects.Micro-structure uses in the present embodiment
Rubber material preparation, user can also select other materials to prepare according to specific requirements.
It should be noted that as shown in Figure 1 to Figure 2, pressure-sensitive unit, support plate 21, upper film 5 in the present embodiment and under
Film 6 all refers to be rectangular, and in practical applications, those skilled in the art are also designed to triangle, circle or other shapes
Shape.
As shown in figure 5, illustrating the theoretical calculation process of its three-dimensional force for the pressure-sensitive unit a in Fig. 1:
When three-dimensional force flexible sensor unit is acted on by external stress, transmitted by four support columns 23 in micro-structure
To four pressure-sensitive units, the force direction that pressure-sensitive unit a1 is subject to is incline direction, causes pressure-sensitive unit a1 resistance R1It generates
Only the normal pressure F1, the resistance R of variation of variation1It can be obtained by scanning, according to the pressure drag equation F of pressure-sensitive unit a11=f
(R1) size of normal pressure can be obtained, wherein f is determined by the piezoresistive characteristic of pressure-sensitive unit material.
Direction pressure-sensitive unit a1 affected is oblique quadrangular incline direction, the z-axis direction as suffered by pressure-sensitive unit a1
Normal pressure is F1, can derive that x-axis direction component suffered by pressure-sensitive unit a1 isY-axis direction component isDue to four oblique quadrangular central symmetries, the three-dimensional force of the three-dimensional force flexible sensor unit can
It is parsed and is obtained by following formula:
Fz=-(F1+F2+F3+F4)
Wherein, Fx、FyAnd FzRespectively indicate the power on the direction x, y and z suffered by three-dimensional force flexible sensor unit；F1、
F2、F3And F4Respectively indicate pressure-sensitive unit a1, pressure-sensitive unit b2, normal pressure suffered by pressure-sensitive unit c3 and pressure-sensitive unit d4；θ
Indicate the incline of quadrangular and the angle of z-axis；Indicate the angle of projection and x-axis of the incline of quadrangular in xOy plane.F1、
F2、F3And F4According to the pressure drag equation F of pressure-sensitive uniti=f (Ri), i=1,2,3,4 obtain, RiRespectively indicate the electricity of pressure-sensitive unit
Resistance.
As shown in fig. 6, being illustrated to the theoretical calculation process of the pressure-sensitive unit a three-dimensional force in Fig. 3:
Direction pressure-sensitive unit a1 affected is oblique triangular prism incline direction, the z-axis direction as suffered by pressure-sensitive unit a1
Normal pressure is F1, can derive that x-axis direction component suffered by pressure-sensitive unit a1 isY-axis direction component isDue to three oblique quadrangular central symmetries, the folder of projection and x-axis of the incline of triangular prism in xOy plane
Angle is 60 °, the three-dimensional force of the three-dimensional force flexible sensor unit, can be parsed and be obtained by following formula:
Fz=-(F1+F2+F3)
Wherein, Fx、FyAnd FzRespectively indicate the power on the direction x, y and z suffered by three-dimensional force flexible sensor unit；F1、
F2And F3Respectively indicate normal pressure suffered by pressure-sensitive unit a1, pressure-sensitive unit b2 and pressure-sensitive unit c3；The side of θ expression triangular prism
The angle of rib and z-axis.
As shown in fig. 7, being illustrated to the theoretical calculation process of the pressure-sensitive unit a three-dimensional force in Fig. 4:
Direction pressure-sensitive unit a1 affected is oblique circular cylinder inclined direction, y-axis by the center of pressure-sensitive cell array,
The z-axis direction normal pressure as suffered by pressure-sensitive unit a1 is F1, can derive that x-axis direction component suffered by pressure-sensitive unit a1 is 0, y-axis side
It is F to component1Sec θ sin θ, due to the central symmetry of the pressure-sensitive unit of annular, the three-dimensional of the three-dimensional force flexible sensor unit
Power can be parsed by following formula and be obtained:
Wherein, Fx、FyAnd FzRespectively indicate the power on the direction x, y and z suffered by three-dimensional force flexible sensor unit；Fi
Respectively indicate normal pressure suffered by pressure-sensitive unit i；θ indicates the incline of quadrangular and the angle of z-axis；FiAccording to pressure-sensitive unit
Pressure drag equation Fi=f (Ri), i=1,2 ..., 6 is obtained, RiRespectively indicate the resistance of pressure-sensitive unit.
The above is only the preferred embodiment of the present invention, is not intended to limit the utility model, all practical at this
Within novel spirit and principle, any modification, equivalent replacement, improvement and so on should be included in the guarantor of the utility model
Within the scope of shield.
Claims (10)
1. a kind of three-dimensional force flexible sensor characterized by comprising flexible substrates and micro-structure, wherein flexible substrates include
Protection interlayer and at least three pressure-sensitive units for being placed in protection interlayer and be in array distribution, the ranks of pressure-sensitive unit
Between connected by conducting wire；Micro-structure includes support plate, and the upper surface of support plate is equipped with stress convex block, lower surface is equipped with and pressure-sensitive list
First quantity identical support column is inclination installation between support column and support plate, the lower end surface of support column it is concordant and respectively with pressure
The corresponding arrangement of quick unit.
2. three-dimensional force flexible sensor as described in claim 1, which is characterized in that the shaft of the support column is along the branch
Fagging plate face is inclined outwardly, and inclined angle is identical between each support column shaft and the support plate plate face.
3. three-dimensional force flexible sensor as claimed in claim 2, which is characterized in that the branch identical with pressure-sensitive element number
Dagger is centrosymmetric.
4. three-dimensional force flexible sensor as claimed in claim 2, which is characterized in that the support column is quadrangular.
5. three-dimensional force flexible sensor as claimed in claim 2, which is characterized in that the stress convex block is arc bump, and
Stress convex block arrangement corresponding with the central symmetry of support column point.
6. three-dimensional force flexible sensor as described in claim 1, which is characterized in that at least three pressure-sensitive unit is in triangle
Shape, rectangular matrix or ring quasi array are distributed, by leading with what pressure-sensitive unit identical array was distributed between the ranks of each pressure-sensitive unit
Line connection.
7. three-dimensional force flexible sensor as described in claim 1, which is characterized in that the protection interlayer includes upper film under
Film, the pressure-sensitive unit are arranged between film and lower film.
8. three-dimensional force flexible sensor as described in claim 1, which is characterized in that the pressure-sensitive unit is by with piezoresistive effect
Flexible strain gauge material preparation.
9. three-dimensional force flexible sensor as described in claim 1, which is characterized in that the material of the upper film and lower film is
PET or PVC or silicon rubber, and thickness is 5 μm~50 μm.
10. three-dimensional force flexible sensor as described in claim 1, which is characterized in that the total height of the micro-structure is 0.1mm
~1mm, total side length are 0.5mm~5mm.
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| CN201820611677.2U CN208206352U (en) | 2018-04-26 | 2018-04-26 | A kind of three-dimensional force flexible sensor |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110196125A (en) * | 2019-04-19 | 2019-09-03 | 浙江大学 | A kind of island bridge type flexible sensing array apparatus based on porous structure |
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- 2018-04-26 CN CN201820611677.2U patent/CN208206352U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110196125A (en) * | 2019-04-19 | 2019-09-03 | 浙江大学 | A kind of island bridge type flexible sensing array apparatus based on porous structure |
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