LU47965A1 - - Google Patents
Info
- Publication number
- LU47965A1 LU47965A1 LU47965A LU47965A LU47965A1 LU 47965 A1 LU47965 A1 LU 47965A1 LU 47965 A LU47965 A LU 47965A LU 47965 A LU47965 A LU 47965A LU 47965 A1 LU47965 A1 LU 47965A1
- Authority
- LU
- Luxembourg
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/16—Vessels; Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
- H01J37/15—External mechanical adjustment of electron or ion optical components
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/21—Means for adjusting the focus
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6401328A NL6401328A (en:Method) | 1964-02-14 | 1964-02-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| LU47965A1 true LU47965A1 (en:Method) | 1966-08-11 |
Family
ID=19789292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| LU47965A LU47965A1 (en:Method) | 1964-02-14 | 1965-02-11 |
Country Status (5)
| Country | Link |
|---|---|
| BE (1) | BE659687A (en:Method) |
| DE (1) | DE1224853B (en:Method) |
| GB (1) | GB1096261A (en:Method) |
| LU (1) | LU47965A1 (en:Method) |
| NL (1) | NL6401328A (en:Method) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2793882A (en) * | 1955-10-21 | 1957-05-28 | Charles L Keck | Manifolding device |
| NL255393A (en:Method) * | 1960-07-12 | |||
| LU34882A1 (en:Method) * | 1964-04-15 |
-
1964
- 1964-02-14 NL NL6401328A patent/NL6401328A/xx unknown
-
1965
- 1965-02-11 LU LU47965A patent/LU47965A1/xx unknown
- 1965-02-12 DE DEE28693A patent/DE1224853B/de active Pending
- 1965-02-12 BE BE659687A patent/BE659687A/xx unknown
- 1965-02-12 GB GB625565A patent/GB1096261A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6401328A (en:Method) | 1965-08-16 |
| BE659687A (en:Method) | 1965-05-28 |
| DE1224853B (de) | 1966-09-15 |
| GB1096261A (en) | 1967-12-20 |