LU47965A1LU47965ALU47965ALU47965A1LU 47965 A1LU47965 A1LU 47965A1LU 47965 ALU47965 ALU 47965ALU 47965 ALU47965 ALU 47965ALU 47965 A1LU47965 A1LU 47965A1
Authority
LU
Luxembourg
Application number
LU47965A
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Filing date
Publication date
Application filedfiledCritical
Publication of LU47965A1publicationCriticalpatent/LU47965A1/xx
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/16—Vessels; Containers
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/02—Details
H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
H01J37/15—External mechanical adjustment of electron or ion optical components
H—ELECTRICITY
H01—ELECTRIC ELEMENTS
H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof