LT3631835T - Grįžtamojo ryšio sistema, su ja naudojama vakuuminio nusodinimo sistema ir susijęs būdas - Google Patents

Grįžtamojo ryšio sistema, su ja naudojama vakuuminio nusodinimo sistema ir susijęs būdas

Info

Publication number
LT3631835T
LT3631835T LTEPPCT/EP2018/062836T LT18062836T LT3631835T LT 3631835 T LT3631835 T LT 3631835T LT 18062836 T LT18062836 T LT 18062836T LT 3631835 T LT3631835 T LT 3631835T
Authority
LT
Lithuania
Prior art keywords
same
vacuum deposition
associated method
feedback system
deposition system
Prior art date
Application number
LTEPPCT/EP2018/062836T
Other languages
English (en)
Inventor
Wilmert De Bosscher
Ivan Van De Putte
Original Assignee
Soleras Advanced Coatings Bv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soleras Advanced Coatings Bv filed Critical Soleras Advanced Coatings Bv
Publication of LT3631835T publication Critical patent/LT3631835T/lt

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32733—Means for moving the material to be treated
    • H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
    • H01J37/32761—Continuous moving
    • H01J37/3277—Continuous moving of continuous material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32926—Software, data control or modelling
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/32935—Monitoring and controlling tubes by information coming from the object and/or discharge
    • H01J37/32972—Spectral analysis
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3464—Operating strategies
    • H01J37/347—Thickness uniformity of coated layers or desired profile of target erosion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3476—Testing and control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1884—Manufacture of transparent electrodes, e.g. TCO, ITO
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Plasma & Fusion (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
LTEPPCT/EP2018/062836T 2017-05-22 2018-05-17 Grįžtamojo ryšio sistema, su ja naudojama vakuuminio nusodinimo sistema ir susijęs būdas LT3631835T (lt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BE2017/5374A BE1025251B1 (nl) 2017-05-22 2017-05-22 Feedback systeem
PCT/EP2018/062836 WO2018215274A1 (en) 2017-05-22 2018-05-17 Feedback system

Publications (1)

Publication Number Publication Date
LT3631835T true LT3631835T (lt) 2022-04-25

Family

ID=59686690

Family Applications (1)

Application Number Title Priority Date Filing Date
LTEPPCT/EP2018/062836T LT3631835T (lt) 2017-05-22 2018-05-17 Grįžtamojo ryšio sistema, su ja naudojama vakuuminio nusodinimo sistema ir susijęs būdas

Country Status (9)

Country Link
US (1) US11875979B2 (lt)
EP (1) EP3631835B1 (lt)
KR (1) KR102432518B1 (lt)
CN (1) CN110651353B (lt)
BE (1) BE1025251B1 (lt)
ES (1) ES2915224T3 (lt)
LT (1) LT3631835T (lt)
TW (1) TWI753166B (lt)
WO (1) WO2018215274A1 (lt)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11542596B2 (en) * 2019-07-01 2023-01-03 Viavi Solutions Inc. Optical monitor
MX2022014805A (es) 2020-05-26 2023-01-18 Saint Gobain Metodo para estimar una funcion de calidad de un sustrato transparente de mono o multiples capas.
EP3944030A1 (en) 2020-07-21 2022-01-26 Saint-Gobain Glass France Method to assist an operator in controlling a coating process
EP4105746A1 (en) 2021-06-17 2022-12-21 Saint-Gobain Glass France Method for adjusting parameters of a coating process to manufacture a coated transparent substrate
WO2023131710A1 (en) * 2022-01-09 2023-07-13 TRUMPF Hüttinger GmbH + Co. KG Plasma power supply system and method
US20230359168A1 (en) * 2022-05-03 2023-11-09 Nanya Technology Corporation Method for controlling deposition tool

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001076326A1 (en) * 2000-03-30 2001-10-11 Tokyo Electron Limited Optical monitoring and control system and method for plasma reactors
US7837836B2 (en) 2004-02-12 2010-11-23 Seagate Technology Llc Method and apparatus for multi-stage sputter deposition of uniform thickness layers
US8274792B2 (en) * 2005-09-06 2012-09-25 Beyond Blades Ltd. 3-dimensional multi-layered modular computer architecture
TWI404152B (zh) * 2007-01-16 2013-08-01 Univ Nat Cheng Kung Immediate Damage Detection Method and Measurement of Porous Ultra - low Dielectric Materials
WO2009143921A1 (en) * 2008-05-29 2009-12-03 Applied Materials, Inc A method for determining an optical property of an optical layer
KR101874429B1 (ko) * 2012-02-02 2018-08-03 삼성디스플레이 주식회사 표시장치 및 그 제조방법
DE102012109424A1 (de) * 2012-10-04 2014-04-10 Von Ardenne Anlagentechnik Gmbh Sputtermagnetron und Verfahren zur dynamischen Magnetfeldbeeinflussung
WO2014105557A1 (en) * 2012-12-27 2014-07-03 First Solar, Inc. Method and system for in-line real-time measurements of layers of multilayered front contacts of photovoltaic devices and calculation of opto-electronic properties and layer thicknesses thereof
JP6239294B2 (ja) * 2013-07-18 2017-11-29 株式会社日立ハイテクノロジーズ プラズマ処理装置及びプラズマ処理装置の運転方法

Also Published As

Publication number Publication date
KR20200010444A (ko) 2020-01-30
TW201901829A (zh) 2019-01-01
EP3631835B1 (en) 2022-03-02
BE1025251A1 (nl) 2018-12-14
EP3631835A1 (en) 2020-04-08
CN110651353B (zh) 2022-06-03
CN110651353A (zh) 2020-01-03
WO2018215274A1 (en) 2018-11-29
US20200090906A1 (en) 2020-03-19
BE1025251B1 (nl) 2018-12-18
TWI753166B (zh) 2022-01-21
ES2915224T3 (es) 2022-06-21
KR102432518B1 (ko) 2022-08-16
US11875979B2 (en) 2024-01-16

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