KR980006014A - Logistics transportation system for semiconductor manufacturing - Google Patents

Logistics transportation system for semiconductor manufacturing Download PDF

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Publication number
KR980006014A
KR980006014A KR1019960024615A KR19960024615A KR980006014A KR 980006014 A KR980006014 A KR 980006014A KR 1019960024615 A KR1019960024615 A KR 1019960024615A KR 19960024615 A KR19960024615 A KR 19960024615A KR 980006014 A KR980006014 A KR 980006014A
Authority
KR
South Korea
Prior art keywords
ports
supply
discharge
semiconductor manufacturing
product
Prior art date
Application number
KR1019960024615A
Other languages
Korean (ko)
Inventor
김성근
김병완
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960024615A priority Critical patent/KR980006014A/en
Priority to JP9011332A priority patent/JPH1017142A/en
Publication of KR980006014A publication Critical patent/KR980006014A/en

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Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
    • G05B19/4189—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by the transport system
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Quality & Reliability (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

반도체 제조용 물류를 효율적으로 이송시켜 반도체 제조설비 및 이송장치의 가동율을 향상시키도록 된 반도체 제조용 물류 이송시스템에 관한 것이다. 본 발명은 공급포트 및 배출포트가 구비되어 물류를 공급포트에서 배출포트로 이송시키도록 된 이송라인과, 상기 공급포트에 물류를 로딩시키고 배출포트에 위치된 물류를 언로딩시키는 로봇으로 이루어진 반도체 제조용 물류 이송시스템에 있어서, 상기 이송라인의 공급포트 및 배출포트를 각각 복수로 구비하고, 로봇이 복수의 공급포트에 물류를 연속적으로 로딩시키고, 복수의 배출포트에 위치된 물류를 연속적으로 언로딩시키도록 된 것이다. 따라서, 물류의 로딩 및 언로딩이 효율적으로 이루어져 로봇의 대기시간이 단축되는 것이고, 이로써 생산설비의 가동율이 그 만큼 향상되는 효과가 있다.And more particularly, to a logistics transportation system for manufacturing semiconductors capable of efficiently transferring logistics for semiconductor manufacturing to improve the operation rate of semiconductor manufacturing facilities and transfer apparatuses. The present invention relates to a method of manufacturing a semiconductor device comprising a transfer line provided with a supply port and a discharge port for transferring a product from a supply port to a discharge port and a robot for loading the product at the supply port and unloading the product at the discharge port, A plurality of supply ports and a plurality of discharge ports of the transfer line are provided in each of the plurality of discharge ports, and the robot continuously loads the plurality of supply ports and continuously loads the plurality of discharge ports, . Therefore, the loading and unloading of the logistics can be efficiently performed, and the waiting time of the robot is shortened, thereby improving the utilization rate of the production facility.

Description

반도체 제조용 물류 이송시스템Logistics transportation system for semiconductor manufacturing

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is a trivial issue, I did not include the contents of the text.

제3도는 본 발명에 따른 물류 이송시스템의 일실시예를 개략적으로 나타낸 구성도이다.FIG. 3 is a schematic view showing an embodiment of the logistics transfer system according to the present invention.

Claims (3)

공급포트 및 배출포트가 구비되어 물류를 공급포트에서 배출포트로 이송시키도록 된 이송라인과, 상기 공급 포트에 물류를 로딩시키고 배출포트에 위치된 물류를 언로딩시키는 로봇으로 이루어진 반도체 제조용 물류 이송시스템에 있어서, 상기 이송라인의 공급포트 및 배출포트를 각각 복수로 구비하고, 로봇이 복수의 공급포트에 물류를 연속적으로 로딩시키고, 복수의 배출포트에 위치된 물류를 연속적으로 언로딩시키도록 됨으 특징으로 하는 반도체 제조용 물류 이송시스템.A transfer line provided with a supply port and a discharge port for transferring the product from the supply port to the discharge port and a robot for loading the product at the supply port and unloading the product at the discharge port, A plurality of supply ports and a plurality of discharge ports of the transfer line are provided respectively so that the robot continuously loads the products into the plurality of supply ports and continuously unloads the products located in the plurality of discharge ports. Wherein the semiconductor manufacturing system further comprises: 제1항에 있어서, 상기 이송라인은 복수의 공급포트에 로딩된 복수의 물류를 한꺼번에 이송시키고, 복수의 물류가 이송되어 복수의 배출포트에 한꺼번에 위치될 수 있도록 구동하는 것을 특징으로 하는 상기 반도체 제조용 물류 이송시스템.2. The semiconductor manufacturing apparatus according to claim 1, wherein the transferring line is configured to transfer a plurality of the products loaded in the plurality of supply ports at a time, and to transfer a plurality of the products to be simultaneously placed in the plurality of discharge ports Logistics transport system. 제1항에 있어서, 상기 이송라인은, 복수의 공급포트에 로딩된 복수의 물류를 하나씩 이송시키고, 물류가 이송되어 복수의 배출포트에 차례로 위치될 수 있도록 구동하는 것을 특징으로 하는 상기 반도체 제조용 물류 이송시스템.2. The semiconductor manufacturing logistics system according to claim 1, wherein the transferring line is configured to transfer a plurality of the products, which are loaded in the plurality of supply ports, one by one, and the products are sequentially transferred to the plurality of discharge ports, Transport system. ※참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: It is disclosed by the contents of the first application.
KR1019960024615A 1996-06-27 1996-06-27 Logistics transportation system for semiconductor manufacturing KR980006014A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1019960024615A KR980006014A (en) 1996-06-27 1996-06-27 Logistics transportation system for semiconductor manufacturing
JP9011332A JPH1017142A (en) 1996-06-27 1997-01-24 Part transfer system to manufacture semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960024615A KR980006014A (en) 1996-06-27 1996-06-27 Logistics transportation system for semiconductor manufacturing

Publications (1)

Publication Number Publication Date
KR980006014A true KR980006014A (en) 1998-03-30

Family

ID=19463949

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960024615A KR980006014A (en) 1996-06-27 1996-06-27 Logistics transportation system for semiconductor manufacturing

Country Status (2)

Country Link
JP (1) JPH1017142A (en)
KR (1) KR980006014A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100588451B1 (en) * 2005-06-27 2006-06-12 주식회사 인아텍 A method for supply and discharge a base plate

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6024004B2 (en) * 1979-11-30 1985-06-11 エ−スパツク株式会社 Carton blank transfer equipment in carton forming, filling, and sealing equipment
JP2548093Y2 (en) * 1992-12-07 1997-09-17 三菱自動車工業株式会社 Paint supply device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100588451B1 (en) * 2005-06-27 2006-06-12 주식회사 인아텍 A method for supply and discharge a base plate

Also Published As

Publication number Publication date
JPH1017142A (en) 1998-01-20

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