KR980005744A - Cleaning tank - Google Patents
Cleaning tank Download PDFInfo
- Publication number
- KR980005744A KR980005744A KR1019960023996A KR19960023996A KR980005744A KR 980005744 A KR980005744 A KR 980005744A KR 1019960023996 A KR1019960023996 A KR 1019960023996A KR 19960023996 A KR19960023996 A KR 19960023996A KR 980005744 A KR980005744 A KR 980005744A
- Authority
- KR
- South Korea
- Prior art keywords
- cleaning
- cleaning tank
- liquid supply
- cleaning liquid
- tank according
- Prior art date
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
본 발명은 세정조(cleaning bath)에 관해 개시한다. 상기 세정조는 에어밸브 (air valve)가 설치된 다수의 세정액 공급라인과 상기 라인에 연결되고 다수의 분사홀이 균일하게 형성된 폐곡선 형태의 분사부분을 구비하는 것을 특징으로 한다. 따라서 본 발명에 의한 세정조를 사용하면, 세정조내의 세정액 흐름에서 와류의 형성을 최대한 억제할 수 있으므로 세정효율을 높일 수 있다. 즉, 웨이퍼 전면에 걸쳐서 고른 세정을 실시할 수 있고 이 결과 웨이퍼간에 세정단차를 줄일 수 있다. 따라서 다음 공정을 안정적으로 진핼할 수 있다.The present invention discloses a cleaning bath. The cleaning tank is characterized in that it comprises a plurality of cleaning liquid supply line is installed with an air valve and the injection portion of the closed curve form connected to the line and a plurality of injection holes are uniformly formed. Therefore, when the cleaning tank according to the present invention is used, the formation of vortices in the cleaning liquid flow in the cleaning tank can be suppressed as much as possible, thereby increasing the cleaning efficiency. That is, even cleaning can be performed over the entire wafer surface, and as a result, cleaning steps between wafers can be reduced. Therefore, the following process can be performed stably.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3도 및 제4도는 각각 본 발명에 의한 세정조를 나타낸 도면들이다.3 and 4 are views showing the cleaning tank according to the present invention, respectively.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960023996A KR980005744A (en) | 1996-06-26 | 1996-06-26 | Cleaning tank |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960023996A KR980005744A (en) | 1996-06-26 | 1996-06-26 | Cleaning tank |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005744A true KR980005744A (en) | 1998-03-30 |
Family
ID=66287705
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960023996A KR980005744A (en) | 1996-06-26 | 1996-06-26 | Cleaning tank |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005744A (en) |
-
1996
- 1996-06-26 KR KR1019960023996A patent/KR980005744A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |