KR980005744A - Cleaning tank - Google Patents

Cleaning tank Download PDF

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Publication number
KR980005744A
KR980005744A KR1019960023996A KR19960023996A KR980005744A KR 980005744 A KR980005744 A KR 980005744A KR 1019960023996 A KR1019960023996 A KR 1019960023996A KR 19960023996 A KR19960023996 A KR 19960023996A KR 980005744 A KR980005744 A KR 980005744A
Authority
KR
South Korea
Prior art keywords
cleaning
cleaning tank
liquid supply
cleaning liquid
tank according
Prior art date
Application number
KR1019960023996A
Other languages
Korean (ko)
Inventor
방주식
황인석
박정훈
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019960023996A priority Critical patent/KR980005744A/en
Publication of KR980005744A publication Critical patent/KR980005744A/en

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  • Cleaning Or Drying Semiconductors (AREA)

Abstract

본 발명은 세정조(cleaning bath)에 관해 개시한다. 상기 세정조는 에어밸브 (air valve)가 설치된 다수의 세정액 공급라인과 상기 라인에 연결되고 다수의 분사홀이 균일하게 형성된 폐곡선 형태의 분사부분을 구비하는 것을 특징으로 한다. 따라서 본 발명에 의한 세정조를 사용하면, 세정조내의 세정액 흐름에서 와류의 형성을 최대한 억제할 수 있으므로 세정효율을 높일 수 있다. 즉, 웨이퍼 전면에 걸쳐서 고른 세정을 실시할 수 있고 이 결과 웨이퍼간에 세정단차를 줄일 수 있다. 따라서 다음 공정을 안정적으로 진핼할 수 있다.The present invention discloses a cleaning bath. The cleaning tank is characterized in that it comprises a plurality of cleaning liquid supply line is installed with an air valve and the injection portion of the closed curve form connected to the line and a plurality of injection holes are uniformly formed. Therefore, when the cleaning tank according to the present invention is used, the formation of vortices in the cleaning liquid flow in the cleaning tank can be suppressed as much as possible, thereby increasing the cleaning efficiency. That is, even cleaning can be performed over the entire wafer surface, and as a result, cleaning steps between wafers can be reduced. Therefore, the following process can be performed stably.

Description

세정조Cleaning tank

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제3도 및 제4도는 각각 본 발명에 의한 세정조를 나타낸 도면들이다.3 and 4 are views showing the cleaning tank according to the present invention, respectively.

Claims (4)

에어밸브(airvalve)가 설치된 다수으 세정액 공급라인과 상기 라인에 연결되고 다수의 분사홀이 균일하게 형성된 폐곡선 형태의 분사부분을 구비하는 것을 특징으로 하는 세정조.And a plurality of cleaning liquid supply lines provided with air valves, and a plurality of injection holes connected to the lines and having a plurality of injection holes, in which a plurality of injection holes are uniformly formed. 제1항에 있어서, 상기 분사부분의 형태는 사각형인 것을 특징으로 하는 세정조.The cleaning tank according to claim 1, wherein the injection portion has a quadrangular shape. 제1항에 있어서, 상기 분사부분은 양단이 상기 세정액 공급라인과 연결된 주름진형태인 것을 특징으로 하는 세정조.The cleaning tank according to claim 1, wherein the injection portion has a corrugated shape at both ends connected to the cleaning liquid supply line. 제1항에 있어서, 상기 세정액 공급라인은 2개인 것을 특징으로 하는 세정조.The cleaning tank according to claim 1, wherein the cleaning liquid supply line is two. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019960023996A 1996-06-26 1996-06-26 Cleaning tank KR980005744A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019960023996A KR980005744A (en) 1996-06-26 1996-06-26 Cleaning tank

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019960023996A KR980005744A (en) 1996-06-26 1996-06-26 Cleaning tank

Publications (1)

Publication Number Publication Date
KR980005744A true KR980005744A (en) 1998-03-30

Family

ID=66287705

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019960023996A KR980005744A (en) 1996-06-26 1996-06-26 Cleaning tank

Country Status (1)

Country Link
KR (1) KR980005744A (en)

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